Feedthrough-compensated image sensor

ABSTRACT

A control pulse is generated a first control signal line coupled to a transfer gate of a pixel to enable photocharge accumulated within a photosensitive element of the pixel to be transferred to a floating diffusion node, the first control signal line having a capacitive coupling to the floating diffusion node. A feedthrough compensation pulse is generated on a second signal line of the pixel array that also has a capacitive coupling to the floating diffusion node. The feedthrough compensation pulse is generated with a pulse polarity opposite the pulse polarity of the control pulse and is timed to coincide with the control pulse such that capacitive feedthrough of the control pulse to the floating diffusion node is reduced.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/051,344 filed Jul. 31, 2018 (now U.S. Pat. No. 10,356,350), which isa continuation of U.S. patent application Ser. No. 14/989,580 filed Jan.6, 2016 (now U.S. Pat. No. 10,070,084), which is a continuation of U.S.patent application Ser. No. 14/616,546 filed Feb. 6, 2015 (now U.S. Pat.No. 9,264,639), which claims the benefit of each of the following U.S.Provisional Patent Applications:

application Ser. No. Filing Date Title 61/937,436 7 Feb. 2014Differential Transfer Signaling for Low-Noise, High-Speed Pixel Readout61/954,517 17 Mar. 2014 Differential Transfer Signaling for Low-Noise,High-Speed Pixel Readout 62/076,011 6 Nov. 2014 Image Sensor Readoutwith Transfer- Gate Nulling 62/091,408 12 Dec. 2014 Ultra Low NoiseReadout ArchitecturesEach of the above-identified patent applications is hereby incorporatedby reference.

TECHNICAL FIELD

The present disclosure relates to the field of integrated-circuit imagesensors.

BACKGROUND

Low-light performance continues to be a challenge for CMOS imagesensors. In particular, as pixel geometries continue to shrink,second-order sampling inaccuracies have caused readout noise to climb.And, while the SNR (signal-to-noise ratio) loss is somewhat countered inmedium-to-bright light conditions by increased resolution, in officelighting conditions, the reduced electron capture of small pixels pushessignal levels so low that readout noise is dominating performance at awider range of the illumination spectrum.

BRIEF DESCRIPTION OF THE DRAWINGS

The various embodiments disclosed herein are illustrated by way ofexample, and not by way of limitation, in the figures of theaccompanying drawings and in which like reference numerals refer tosimilar elements and in which:

FIGS. 1A and 1B illustrate exemplary embodiments of single-mode anddual-mode pixels to which various feedthrough compensation and readouttechniques and architectures may be applied;

FIG. 2 is a timing diagram illustrating an exemplary pixel cycle withinthe dual mode pixel of FIG. 1B;

FIG. 3 illustrates exemplary electrostatic potential diagrams for aphotodiode, transfer gate and floating diffusion to illustrateunderthreshold (low-light) and overthreshold (brighter-light) read-outoperations, respectively;

FIG. 4 illustrates a capacitive feedthrough phenomenon that tends toprolong the CDS (correlated-double-sampling) readout interval and,consequently, increase temporal noise and constrain pixel conversiongain within the single-mode and dual-mode pixels of FIGS. 1A and 1B;

FIG. 5 illustrates an exemplary assertion of a feedthrough compensationpulse on one or more row-based and/or column-based signal lines thatextend in proximity to the floating diffusion nodes within a selectedrespective row or column of pixels;

FIG. 6 illustrates exemplary coupling capacitances between transfer-gateand reset-gate control signal lines and the floating diffusion node ofthe single-mode (4T) pixel of FIG. 1A;

FIG. 7 is an exemplary pixel readout timing diagram illustrating reset,exposure and readout with respect to pixel row ‘n’ and feedthroughcompensation conveyed via one or more neighboring TG control lines of ashared-floating-diffusion pixel unit cell;

FIG. 8 illustrates an exemplary set of feedthrough compensation pulsesconveyed via neighboring TG control lines of a shared-floating-diffusionunit cell;

FIG. 9 illustrates an exemplary feedthrough compensation approach inwhich neighboring transfer-gate signal lines are used to compensate thereset-gate feedthrough to the floating diffusion, and then used incombination with a negative-polarity reset-gate pulse to compensate fortransfer-gate feedthrough;

FIG. 10 illustrates an additional capacitive coupling to the floatingdiffusion node (“FD”) of a single-mode 4T pixel that may be exploited tocompensate for control-signal feedthrough;

FIG. 11 illustrates an exemplary routing of an adjacent-row reset-gatesignal line in proximity to the source-follower gate (SF) of atarget-pixel to yield a desired capacitive coupling;

FIG. 12 illustrates an exemplary readout timing for an architecture thatimplements control-signal feedthrough compensation at least in part viaone or more neighboring RG lines;

FIG. 13 presents an exemplary pixel readout timing diagram in which anegative pulse on a row-select signal line compensates for feedthroughfrom a transfer-gate signal line or reset-gate signal line;

FIG. 14A illustrates an alternative TG null timing approach, applicableat least to 4T pixel architectures, including, without limitation, thesingle-mode and dual-mode 4T pixels shown in FIGS. 1A and 1B;

FIG. 14B illustrates a high level schematic diagram for a single-modepixel and per column circuit elements for readout of the pixel;

FIGS. 15A and 15B illustrate an alternative feedthrough compensationapproach in which a dedicated compensation signal line is coupled to anin-pixel compensation structure;

FIG. 16A illustrates an alternative in-pixel compensation structureembodiment in which a photodiode and floating diffusion node are formedwithin a p-well that has been implanted into an n-substrate or n-epimaterial;

FIG. 16B illustrates the in-pixel compensation arrangement of FIG. 16A,but with the p-well and floating diffusion node implement in separateintegrated circuit dies or wafers;

FIG. 17 illustrates another in-pixel compensation structure embodimentin which an additional compensation gate is formed adjacent the floatingdiffusion node to establish a desired coupling capacitance;

FIG. 18 illustrates a further in-pixel compensation structureembodiment;

FIG. 19 illustrates an in-pixel compensation structure embodiment thatenables feedthrough compensation from the reset-gate line of an adjacentpixel or adjacent pixel unit cell;

FIG. 20 illustrates an exemplary pixel readout timing diagram for aconditional-read pixel in which feedthrough compensation pulses aregenerated on one or more neighboring row-based transfer-gate lines(TGr);

FIG. 21 illustrates an exemplary pixel readout timing diagram for aconditional-read pixel in which feedthrough compensation pulses aregenerated on neighboring TGr lines and on a local reset-gate line (RG);

FIG. 22 illustrates an exemplary pixel readout timing diagram in whichcolumn transfer-gate control line, TGc, is used in conjunction withneighboring TGr lines to compensate TGr and RG feedthrough;

FIG. 23 illustrates an exemplary pixel readout timing diagram in whichTGc is used to provide feedthrough compensation;

FIGS. 24A and 24B illustrate exemplary pixel readout timing diagrams forconditional-read pixels with feedthrough compensation;

FIGS. 25A-25C illustrate embodiments of a per column sample and holdblock, comparator/sense-amplifier, and per n-column PGA and ADC blocksthat may be used to effect the readout operations illustrated in FIGS.24A and 24B;

FIG. 26 illustrates an exemplary compressed-CDS pixel readout timingdiagram enabled by feedthrough compensation;

FIGS. 27A and 27B illustrate an exemplary S/H circuit embodiment andcorresponding pixel readout timing diagram corresponding to thesignal-state oversampling described in reference to FIG. 26;

FIG. 28 illustrates a compressed-CDS timing arrangement in which thefalling edge of the sample-and-hold control signal for capturinglow-light signal-state samples does not occur until sometime after thefalling edge of the transfer-gate control signal;

FIG. 29A illustrates an alternative compressed-CDS timing approach inwhich a low-light signal-state sample is captured before the fallingedge of the transfer-gate pulse;

FIG. 29B illustrates an expanded view of the low-light CDS operation inFIG. 29A;

FIGS. 30A and 30B illustrate respective unconditional and conditionalpixel readout timing that may be achieved using the shortened low-lightCDS sampling approach discussed in reference to FIGS. 28, 29A and 29B;

FIGS. 31A and 31B illustrate an exemplary high-level block diagram andcorresponding timing diagram for an analog-domain residual feedthroughcorrection technique;

FIG. 32 illustrates an embodiment of an image sensor having a dual-S/H(sample-and-hold) bank readout architecture to enable bifurcatedlow-light/bright-light signal capture;

FIG. 33 illustrates embodiments of a per-column multiplexer, per-columnFGA (fixed-gain amplifier) and per-column low-signal and high-signal S/Hcircuit banks that may be implemented within the column linemultiplexer, FGA and S/H circuit banks of FIG. 32;

FIG. 34 presents an exemplary timing diagram for a row readout operationwithin the image sensor architecture of FIG. 32;

FIG. 35 illustrates a sensor architecture having both a per-column SSADC(single-slope analog-to-digital converter) and a column-shared SAR ADC(successive approximation readout analog-to-digital converter) and thusthat provides both sub-electron read noise and low power for oversampledconditional readouts;

FIG. 36 illustrates an embodiment of dual direct conversion image sensorhaving separate (respective) ADCs for bifurcated low-signal andhigh-signal readout paths; and

FIG. 37 illustrates more detailed embodiments of low-signal ADC captureand high-signal ADC capture circuits that may be used to implement thelow-signal and high-signal capture blocks in FIG. 36.

FIG. 38 is an exemplary timing diagram illustrating operations withrespect to embodiments of FIGS. 36 and 37;

FIG. 39 illustrates an alternative embodiment of a dual directconversion image sensor;

FIG. 40 illustrates embodiments of low-signal and high-signal ADCcapture blocks that may be implemented within the single-slope ADC(SSADC) of FIG. 39;

FIG. 41 illustrates an exemplary high-level timing diagram correspondingto operation within ADC capture blocks shown in FIGS. 39 and 40;

FIG. 42 illustrates another embodiment of a dual direct conversion imagesensor;

FIG. 43 illustrates an embodiment of a per-column bias multiplexer thatmay be implemented within the bias multiplexer bank of FIG. 42;

FIGS. 44 and 45 illustrate an exemplary timing diagram and flow diagramfor such a switched-bias readout approach that leverages the imagesensor and bias multiplexer embodiments shown in FIGS. 42 and 43;

FIG. 46 illustrates an example of a non-linear low-signal voltage rampthat may be implemented within the embodiment of FIG. 42;

FIGS. 47A and 47B illustrate an alternative SSADC capture block andoperational sequence that may be employed within the image sensor ofFIG. 42;

FIG. 48 illustrates an alternative image sensor embodiment in which afixed-gain amplifier (FGA) bank is provided within readout circuitry toimplement a pixout signal gain uniformly in the low-signal andhigh-signal readout paths;

FIG. 49 illustrates an embodiment of a per-column FGA that may be usedto implement the FGA bank shown in FIG. 48;

FIG. 50 illustrates an embodiment of a single direct conversion,bifurcated-readout path image sensor;

FIGS. 51A and 51B illustrate optional readout path architectures thatmay be implemented within the single direct conversion image sensor ofFIG. 50;

FIG. 51C illustrates a more detailed embodiment of a bifurcatedlow-signal and high-signal readout path arrangement that may beimplemented within the image sensor of FIG. 50;

FIG. 52 illustrates an exemplary digital CDS operation that may becarried out within the embodiments of FIGS. 50 and 51A-51C;

FIG. 53 illustrates an alternative embodiment of a bifurcated readoutpath that may be implemented within the image sensor of FIG. 50;

FIG. 54A is a timing diagram illustrating an exemplary operationalsequence that may be implemented within the image sensor of FIG. 50 andbifurcated readout path of FIG. 53;

FIG. 54B is a timing diagram illustrating another exemplary operationalbifurcated low-signal/high-signal readout sequence;

FIG. 55A illustrates an embodiment of another direct-conversion,bifurcated readout image sensor;

FIG. 55B illustrates a more detailed example of a bias-multiplexedread-out path and SSADC comparator;

FIG. 56 illustrates an exemplary timing diagram for bifurcatedlow-signal/high-signal readout operations with respect to theembodiments of FIGS. 55A and 55B;

FIG. 57A illustrates an embodiment of a variable-conversion-gain pixel;

FIG. 57B is an exemplary timing diagram corresponding to a readoutoperation within variable-conversion-gain pixel of FIG. 57A;

FIG. 57C is a table of exemplary CDS times, readout noise levels,conversion gains and dynamic range that may be achieved by avariable-conversion-gain, feedthrough-compensated, bifurcated readoutpath image sensor embodiment according to embodiments described herein;

FIG. 58 illustrates a pixel array having shielded dark correctionblocks;

FIG. 59 illustrates an exemplary dark-emulation with respect to afull-resolution pixel array;

FIG. 60 illustrates exemplary timing diagrams for a number of pixelread-out modes within a conditional-read image sensor, including theconditional and unconditional read-out modes described above as well asa dark-emulation read-out mode;

FIG. 61 illustrates a more complete timing diagram for emulateddark-pixel read-out, showing the pipelined sequence of operations withinthe pixel array, sample-and-hold logic, comparator and ADC circuitry;

FIG. 62 illustrates an exemplary image sensor architecture that supportsemulated-dark read-out operations discussed in reference to FIGS. 59through 61;

FIG. 63 illustrates an embodiment of a dark-column pattern controllerthat may be used to implement the pattern controller of FIG. 62;

FIG. 64 illustrates an embodiment of a read-enable logic circuitmodified to support dark-emulation read-out;

FIG. 65 illustrates an embodiment of a read/dark-emulation logic circuitthat may be deployed within the read-enable logic circuit of FIG. 64;

FIGS. 66 and 67 relate to an image sensor architecture that enablessimultaneous readout of two diagonal pixels within a four-pixel Bayerpattern—one that provides dark emulation and another that provides anactive image signal;

DETAILED DESCRIPTION

Image sensors that compensate for disruptive control-signal feedthroughduring pixel readout operations are disclosed in various embodiments.More specifically, one or more feedthrough compensation signals areasserted in combination with readout-control signals in a number ofembodiments to null (i.e., negate, cancel or substantially reduce)control-signal feedthrough to the floating diffusion node of afour-transistor (4T) pixel. By this operation, the substantial delayotherwise required for feedthrough settling is eliminated (or at leastsignificantly reduced), permitting a dramatically shortened time betweensuccessive samples of the floating diffusion in a correlateddouble-sampling (CDS) operation and thus provide reduction of pixelreadout noise. In a number of embodiments, the time between“reset-state” sampling or readout and “signal-state” sampling or readoutare brought close to overlap, yielding nanoseconds-order CDS time andsub 1-electron pixel read-out. In other embodiments, the compressed CDStime is leveraged to enable novel readout architectures and techniques,including correlated photon counting without the use of noisy (and slowto recover) avalanche sensors. To accommodate and exploit the differentnoise considerations and delay times that bear on low-light and brighterlight pixel signals, two or more separate pixel readout paths areprovided to speculatively readout accumulated photocharge (i.e., readingout via at least one path on the speculation that a low-signal level ofphotocharge has accumulated, and via the other path on the speculationthat a higher-signal level of photocharge has been accumulated) withpost-readout selection of a finalized pixel value. As discussed below,different amplification levels, ADC operation, pixel conversion gain,timing and so forth may be applied with respect to such “bifurcated”readout-path embodiments (though more than two readout paths may beprovided), with varying degrees of parallelism between the two paths. Inyet other embodiments, different conversion gains are applied withrespect to low-signal and higher-signal readout paths, thus furtherreducing low-signal noise without compromising dynamic range. These andother embodiments, features and configurations are described in greaterdetail below.

Pixel Architectures/Readout Modes Enhanced by Feedthrough Compensation

FIGS. 1A and 1B illustrate exemplary embodiments of single-mode anddual-mode pixels (90 and 100, respectively) to which various feedthroughcompensation and readout techniques and architectures may be applied. Asshown, both pixels include a photodiode 110 (a pinned photodiode in thisexample) and floating diffusion node 112 switchably interconnected viatransfer gate 101. A reset transistor 109, controlled by reset-gate line(RG) is coupled between the floating diffusion node and a supply voltagerail (Vdd or Vdd-pix, for example), and a source-follower transistor 105and row-select transistor 107 are coupled as shown between the supplyvoltage rail and a pixel output line, a signal line referred to hereinas “pixout” that extends column-wise across the pixel array (i.e., arrayof pixels 90 or 100) to a readout circuit block. As shown, floatingdiffusion node 112 in both single-mode pixel 90 and dual-mode pixel 100is coupled to the gate of the source-follower transistor 105 which iscoupled in turn to the pixout line via the row-select transistor 107. Bythis arrangement, when row-select transistor is turned on (RS isasserted), a constant load current flowing on the pixout line generatesa voltage on the pixout line that follows (i.e., rises and fallsaccording to) the voltage produced by the charge level of the floatingdiffusion node. Accordingly, the level of photocharge accumulated (orintegrated) within the photodiode over a given interval may beascertained by switching on the transfer gate to enable photochargetransfer from photodiode 110 to floating diffusion node 112 (which isgenerally reset or precharged to draw the accumulated photocharge offthe photodiode when the transfer gate 101 is switched on) and assertingRS to yield a signal representative of the floating diffusion voltageproduced by the charge level on the pixout line. Because of itscapacitive/floating character, floating diffusion node 112 issusceptible to the many sources of noise in the pixel array and hostimage sensor. Accordingly, in a number of embodiments herein,photocharge readout is accomplished in a two-phase “correlateddouble-sampling” operation in which a noise signal and photocharge+noisesignal are sampled one after the other and then differenced to cancelthe noise component. More specifically, prior to photocharge transfer,the floating diffusion is reset (e.g., coupled to Vdd or Vdd-pix viareset-transistor 109 in response to RG assertion) and then thereset-state of the floating diffusion node (i.e., reset including kTCnoise level) is captured in an analog or digital sampling (orconversion) operation. After the reset-state capture, photocharge istransferred by activation of transfer gate 101 to establish the “signalstate” of the floating diffusion, which includes the reset-state/noiselevel plus the photocharge level floating diffusion. The signal-state isthen captured so that, in either the analog or digital domain, thereset-state measurement may be subtracted from the signal-statemeasurement to cancel/negate the reset-state component and thus yieldthe desired photocharge signal level. As the readout of the floatingdiffusion level for both the reset and signal states is subject tovarious high-frequency and low-frequency noise sources, noisecancellation efficacy of the correlated double-sampling (CDS) operationis highly dependent on the temporal proximity of the reset-state andsignal-state samples. As discussed in further detail below, thisproximity or “CDS time,” is constrained by numerous factors relating tosettling times for the floating diffusion node and/or pixout linesfollowing floating diffusion reset and photocharge transfer events.

In the case of single-mode pixel 90, a row-based transfer-gate controlsignal (TG) is coupled directly to transfer gate 101 as shown. When TGis raised, transfer gate 101 is switched on and photocharge transfer iscommenced. By contrast, dual-mode pixel 100 includes both row-based andcolumn-based transfer-gate control signals, TGr and TGc, which act incombination to permit row and column control over the transfer gate(e.g., via transfer-enable transistor and alternatives as discussedbelow) and thus column-by-column selectivity regarding photochargetransfer from the photodiode to floating diffusion. As discussed below,this column-selectivity permits pixels within a selected row of a pixelarray to be “conditionally” readout—that is, readout only if a thresholdlevel of photocharge is determined to have accumulated within thepixel's photodiode over a given frame or subframe interval. By forcingthe TGc signal on (or even holding it high), the dual-mode pixel may bereadout “unconditionally,” in effect operating in the “unconditional”readout mode of the single-mode pixel. Thus, while single-mode pixel 90is readout unconditionally in response to TG assertion, dual mode pixel100 may be readout conditionally or unconditionally at any readoutinterval. The following sections describe the conditional-read operationin greater detail to provide insight into particular challenges that mayapply as the various single-mode-pixel CDS compression techniques andbifurcated readout techniques and architectures disclosed herein areapplied to dual mode pixels.

FIG. 1B illustrates an exemplary column readout circuit and logictogether with the dual mode pixel described above. As shown, columnread-out circuit and logic 150 includes a sample-and-hold circuit block153 (e.g., including switches and capacitive elements for sampling andtemporarily holding analog signals output onto read-out line, pixout)and a comparator/ADC circuit block 155. During an overthresholddetection operation, a phase of a conditional-read operation that mayprecede or be executed after reset-state sampling, a transfer-enablesignal (TGcEn) is pulsed concurrently with application of partial-onpotential (V_(TG-Partial)) on transfer gate line TGr. Thetransfer-enable pulse passes through logic OR gate 159 to drive TGchigh, thus switching on transfer-enable transistor 103 so thatV_(TG-Partial) is applied to transfer gate 101, thereby enabling apartial charge transfer to floating diffusion 112 as discussed below.Signal levels representative of the charge state of floating diffusion112 (and thus photodiode 110 following the partial charge-transferoperation) are captured within sample and hold block 153 and supplied tocomparator 157 within comparator/ADC block 155. The output of comparator157 is supplied, via logic OR gate 159, to the TGc control line so that,after TGcEn goes low, TGc either remains high or goes low according towhether the charge integration state within photodiode 110 exceeds ordoes not exceed a conditional-read threshold (“CR Threshold”).

If an overthreshold condition is detected (i.e., output of comparator157 is high so that TGc remains asserted after TGcEn goes low), asubsequent assertion of a full-transfer control potential, V_(TG-Full),on row control line TGr enables a full charge transfer from photodiode110 to floating diffusion node 112 and thus a full read-out of thephotodiode state. More specifically, pixout is driven according tofloating diffusion charge level and an analog-to-digital conversion(ADC) operation is selectively enabled within an ADC circuit (notspecifically shown) of comparator/ADC logic 155. By contrast, if thepartial-read result indicates an under-threshold condition (i.e., outputof comparator 157 low), TGc will go low at deassertion of TGcEn, therebyswitching off transfer-enable transistor 103 to prevent application ofV_(TG-Full) at transfer gate 101 and thus disabling/suppressingphotocharge transfer (i.e., preventing/bypassing the full-readoperation). Accordingly, photocharge integrated within an underthresholdpixel will remain in photodiode 110 until a subsequent read-outoperation, effectively lengthening the exposure interval for that pixel.

Referring again to dual-mode pixel 100 (also referred to herein as a“conditional-read” pixel), a row-select transistor 107 is coupledbetween the source follower 105 and the read-out line (pixout) to enablemultiplexed access to the column read-out line by respective rows ofpixels within the larger pixel array. That is, row-select lines (“RS”)are coupled to the control inputs of row-select transistors 107 withinrespective rows of pixels and operated on a one-hot basis to select onerow of pixels for sense/read-out operations at a time. A resettransistor 109 is also provided within the pixel to enable the floatingdiffusion to be switchably coupled to the supply rail (i.e., when areset-gate line (RG) is activated) and thus reset. The photodiode itselfmay be reset along with the floating diffusion by fully switching ontransfer gate 101 (e.g., by asserting TGc while TGr is high) and resettransistor 109 concurrently, or by connecting the photodiode to areset-state floating diffusion. These reset and row-select operationsalso apply within the single-mode pixel of FIG. 1A.

Still referring to FIG. 1B, various charge-transfer control arrangementsmay be used instead of transfer-enable gate 103. In one embodiment,shown for example at 165, transfer-enable transistor 103 is replaced bya second section of a split transfer gate in which part of the gate iscontrolled by TGc and the other part by TGr, requiring both signals tobe at least partially asserted in order to lower the electrostaticbarrier between the photodiode and floating diffusion. This “split-gate”arrangement enables application of a negative TGr voltage (and/ordeassertion of TGc) during charge accumulation, for example, to morefully block the transfer path between photodiode 110 and floatingdiffusion 112. Also, the split-gate embodiment permits TGc to bedeasserted during photocharge integration without floating thetransfer-gate (i.e., as would happen upon lowering TGc in an embodimentemploying transfer-enable transistor 103). In another embodiment, shownat 167, the TGc potential may be directly coupled to a pinning layer ofphotodiode 110, thus raising and lowering the potential of thephotodiode relative to the electrostatic barrier formed by transfer gate101. In yet another embodiment, transfer-enable transistor 103 may beimplemented by a P-type transistor (as opposed to the N-type transistorshown in FIG. 1B), also enabling negative voltages to be applied viaTGr. In that case, OR gate 159 may be replaced by a NOR gate toestablish the desired active-low TGc assertion state.

To reduce pixel footprint (i.e., die consumption area), a singlefloating diffusion node and corresponding read-out/reset circuitry(i.e., transistors 105, 107, 109) may be shared by two or more pixels ina “pixel unit cell,” thus reducing the per-pixel transistor count andenabling charge-binned (reduced spatial resolution) imaging modes. Asshown in detail view 115, for example, a single floating diffusion node112 s is shared by a column of four pixels (denoted by respectivephotodiodes PD1-PD4), as is read-out circuitry formed by amplifiertransistor 105 s and row-select transistor 107 s and reset transistor109 s. In this four-row by one-column “4×1” pixel unit cell (variousothers are possible, including configurations that span two or morecolumns of pixels), four pixels are implemented by a total of eleventransistors (four of which are transfer gates 101), thus effecting anaverage transistor count of 2.75 (i.e., “2.75T”) per pixel. Similar“shared floating diffusion” pixel unit cells may be implemented withrespect to the single-mode pixel of FIG. 1A. Also, as discussed ingreater detail below, the TG, TGr and TGc lines may be routed in bothsingle-mode and dual-mode pixel arrays to achieve nominally uniformcapacitive coupling between the respective TG control lines and gates toshared floating diffusion 112 s and thus enable controlled feedthroughnulling through assertion of nulling signals on one or more otherwiseinactive row-based transfer-gate lines.

FIG. 2 is a timing diagram illustrating an exemplary pixel readout cyclewithin the dual mode (or “conditional-read”) pixel of FIG. 1B. As shown,the pixel readout cycle is split into five intervals or phasescorresponding to distinct operations executed to conditionally read outor refrain from reading out the pixel state. In the first phase (phase1), a reset operation is executed within the photodiode 110 and floatingdiffusion 112 by concurrently asserting the appropriate logic highsignals on the TGr, TGc and RG lines to switch on transfer-enabletransistor 103, transfer gate 101 and reset transistor 109, therebyswitchably coupling photodiode 110 to the supply rail via transfer gate101, floating diffusion 112 and reset transistor 109 (the illustratedsequence can begin with an unconditional reset (e.g., at the start of aframe interval), and can also begin from a preceding conditionalread-out/reset operation). To conclude the reset operation, the TGr andRG signals (i.e., signals applied on like-named signal lines) arelowered to appropriate “off” levels, thereby switching off transfer gate101 (and reset transistor 109) so that the photodiode is enabled toaccumulate (or integrate) charge in response to incident light in theensuing integration phase (phase 2). Lastly, although the row-selectsignal goes high during the reset operation shown in FIG. 2, this ismerely a consequence of an implementation-specific row decoder thatraises the row-select signal whenever a given row address is decoded inconnection with a row-specific operation (e.g., raising the TGr and RGsignals during reset directed to a given row). In an alternativeembodiment, the row decoder may include logic to suppress assertion ofthe row-select signal during reset as indicated by the dashed RS pulsein FIG. 2. Additionally, the reset transistor may be left on orpartially on during the integration phase.

At the conclusion of the integration phase, correlated double samplingis executed with respect to the floating diffusion to effect aconditional or unconditional read operation. Starting with theconditional-read case, the floating diffusion is reset (i.e., by pulsingthe RG signal to couple the floating diffusion to the supply rail) andthen sampled by a sample-and-hold element within the column read-outcircuit. This “reset-state” sampling operation (shown as phase 3 in FIG.2), in effect, samples the reset-state of floating diffusion 110 and isexecuted in the embodiment of FIGS. 1B and 2 by asserting the row-selectsignal (RS) for the pixel row of interest while pulsing a reset-statesample-and-hold signal (SHR) to convey the state of floating diffusion110 to the sample-and-hold element (e.g., a switch-accessed capacitiveelement, not shown in FIG. 1B) within the column read-out circuit viaread-out line, pixout.

After acquiring the reset-state sample in phase 3 of a conditional-readoperation, an overthreshold detection operation is executed in phase 4by raising the TGr line to the partially-on, “overthreshold-detection”potential, V_(TG-Partial), concurrently with switching ontransfer-enable transistor 103 (i.e., by asserting a logic high TGcsignal as discussed above). By this operation, V_(TG-Partial) is appliedto transfer gate 101 to switch the transfer gate to a “partial on” state(“TG partial on”). Referring to FIG. 3, electrostatic potential diagramsfor a photodiode (a pinned photodiode in this example), transfer gateand floating diffusion (corresponding to photodiode 110, transfer gate101 and floating diffusion 112 of FIG. 1B) are shown at 181 and 183 toillustrate underthreshold (low-light) and overthreshold (brighter-light)read-out operations, respectively. Note that the depicted levels ofelectrostatic potential are not intended to be an accuraterepresentation of the levels produced in an actual or simulated device,but rather a general (or conceptual) representation to illustrate theoperation of the pixel read-out phases.

Starting with underthreshold/low-light example 181, the level of chargeaccumulated within the photodiode at the time of the overthresholddetection operation (phase 4) does not rise to the threshold levelrequired for charge to spill over (i.e., be transferred) to the floatingdiffusion via the shallow channel potential (187) of the partially-ontransfer gate. Accordingly, because the accumulated charge level doesnot exceed the transfer threshold (or spillover threshold) establishedby application of V_(TG-Partial) to the control node of transfer gate101, there is no charge transfer from the photodiode to the floatingdiffusion and the accumulated charge instead remains undisturbed withinthe photodiode. By contrast, in overthreshold/bright-light example 183,the higher level of accumulated charge does exceed the transferthreshold so that a portion of the accumulated charge (i.e., that subsetof charge carriers that are above the transfer gate partially-onelectrostatic potential) spills over into floating diffusion node 112,with the residual accumulated charge remaining within the photodiode asshown at 188.

Still referring to FIGS. 2 and 3, prior to conclusion of overthresholddetection phase 4, the charge level of the floating diffusion is sampledand held within a signal-state sample-and-hold element (i.e., inresponse to assertion of signal SHS) to yield a threshold-testsample—the difference between the signal-state sample and the previouslyobtained reset-state sample and thus a correlated double sample—to beevaluated with respect to a conditional-reset threshold as describedabove.

In one embodiment, the conditional-read threshold is an analog threshold(e.g., to be compared with the threshold-test sample in a senseamplifier in response to assertion of a compare/convert strobe signal)set or programmed to a setting above the sampling noise floor, but lowenough to enable detection of minute charge spillover via the shallowtransfer gate channel. Alternatively, the threshold-test sample may bedigitized in response to assertion of the compare/convert signal (e.g.,within an analog-to-digital converter that is also used to generate thefinalized pixel sample value) and then compared with a digitalconditional-reset threshold, again, set (or programmed to a setting)above the noise floor, but low enough to enable detection of tracecharge spillover.

However evaluated, if the threshold-test sample indicates that nodetectable spillover occurred (i.e., threshold-test sample value is lessthan conditional-reset threshold), the photodiode is deemed to be in theunderthreshold state shown in the low-light example of FIG. 3 and theTGc line is held low in the ensuing conditional read-out phase (phase 5,the final phase) to disable transfer gate 101 for the remainder of theconditional read-out operation—in effect, disabling further read-outfrom photodiode 103 and thus enabling the photodiode to continueintegrating charge without disruption for at least another samplinginterval. By contrast, if the threshold-test sample indicates anoverthreshold condition (i.e., threshold-test sample greater thanconditional-reset/transfer threshold), then the TGc line is pulsed high,(or alternately is maintained high) during the conditional read-outphase concurrently with application of a fully-on, “remainder-transfer”potential, V_(TG-Full), to the TGr line, thereby enabling the remainderof the charge (i.e., charge 188 as shown in the bright-light example ofFIG. 3) within photodiode 110 to be transferred to floating diffusion112 via the full-depth transfer-gate channel (189). By this operation,between the overthreshold transfer in phase 4 and the remainder transferin phase 5, the charge accumulated within the photodiode since the hardreset in phase 1 is fully transferred to the floating diffusion where itmay be sensed in a pixel read-out operation.

In the embodiment shown, the pixel-readout operation is effected bypulsing the SHS signal in read-out phase 5 to capture thepost-charge-transfer signal-state of the floating diffusion and thuspermit a correlated double sampling with respect to the floatingdiffusion reset-state sample acquired in phase 3. As shown, acompare/convert strobe is asserted at the conclusion of phase 5 totrigger an ADC operation with respect to the CDS pixel readout. Asdemonstrated by the dashed SHS and compare/convert pulses, SHS and/orcompare/convert may optionally be suppressed in read-out phase 5 inabsence of an overthreshold detection.

Still referring to FIG. 2, the conditional read-out of the photodiode(i.e., effected by asserting TGc in conjunction with application ofV_(TG-Full) on TGr) effectively resets the photodiode (i.e., drawing offall charge to the floating diffusion), while suppression of theconditional read-out leaves the integration state of the photodiodeundisturbed. Accordingly, execution of the conditional read-outoperation in phase 5 conditionally resets the photodiode in preparationfor integration anew in the succeeding sampling interval (i.e., thesucceeding “subframe interval” or “subframe” for short) or refrains fromresetting the photodiode to enable cumulative integration in thesubsequent sampling interval. Thus, in either case, a new integrationphase follows phase 5, with phases 2-5 being repeated for each subframeof the overall frame (or exposure) interval, before repeating the hardreset in a new frame. In other embodiments, where cumulative integrationis permitted across frame boundaries, the hard reset operation shown atphase 1 may be executed to initialize the image sensor and omitted foran indeterminate period of time thereafter. Also, instead of the hardreset operation shown in phase 1, an unconditional read/reset may beeffected following the final subframe of a frame interval or, ifdesired, in any non-final subframe by unconditionally asserting TGcduring read-out phase 5.

An unconditional readout of dual-mode pixel 100 may be carried outgenerally as described with respect to FIG. 2, except that theoperations shown in readout phase 5 are executed without regard to theunder/overthreshold evaluation in phase 4. More specifically, thephase-4 threshold evaluation may be carried out as shown in FIG. 2 andthen ignored (e.g., overridden by continued assertion of TGcEn duringreadout phase 5), or the threshold evaluation may be omitted altogetherto yield a four-phase CDS pixel readout. In general, such four-phasereadout sequences are illustrated below with respect to image sensorembodiments that may employ but do not require conditional-readcapability and/or image sensors having single-mode pixel arrays. Thus,column-line control over transfer gate 101 may be provided but unused(e.g., during certain subframes and/or sensor operating modes) or may beomitted altogether. Also, the transfer-gate control signal is generallydesignated “TG_(n)” (with ‘n’ denoting the n^(th) row of an imagesensor) in four-phase readout diagrams and may be representative ofeither exclusively row-based transfer-gate control (i.e., column-lineomitted and thus a single-mode pixel array) or logical combination ofrow- and column-based transfer-gate control.

Mitigating Floating Diffusion Disruption Due to Control SignalFeedthrough

FIG. 4 illustrates a capacitive feedthrough phenomenon that tends toprolong the CDS readout interval and, consequently, increase temporalnoise and constrain pixel readout conversion gain within the single-modeand dual-mode pixels of FIGS. 1A and 1B. More specifically, controlsignal pulses, particularly on the reset-gate (RG) and transfer-gate(TG) control lines, tend to capacitively couple (i.e., feedthrough) tothe floating diffusion node of the pixel, creating feedthroughtransients on the floating diffusion node as shown at 75 a and 75 b.Accordingly, to provide sufficient time for the pixel output line(pixout) to settle to its correct value, a delay is generally imposedbetween the falling edge of the feedthrough-producing signal (i.e., the“feedthrough source”) and the falling edges of the reset-state andsignal-state sample-and-hold pulses, SHR and SHS, respectively. Morespecifically, a first settling delay is imposed between the falling edgeof the RG pulse and the falling edge of SHR (the reset-statesample-and-hold pulse) to provide time for the RG feedthrough to settle,and a second even longer settling delay is imposed between the fallingedge of the TG pulse and SHS (the signal-state sample-and-hold pulse) toprovide time for the TG feedthrough to settle. As shown, theTG-feedthrough-imposed settling delay falls directly within the CDSinterval marked by the falling edges of SHR and SHS and, indeed, mayconstitute the dominant portion of the CDS time, particularly forlow-light (small) signal levels. Unfortunately, capacitive feedthroughincreases with the reduced process geometries required to buildever-smaller pixels. Making matters worse, full-well capacity andresponsivity tends to decrease with pixel size, so that smaller pixelsgenerally require higher conversion gain to maintain image readoutsignal-to-noise ratio (SNR). The magnitude of the TG feedthrough willincrease with higher conversion gain causing even longer settling timeand correspondingly longer CDS time. This increase in CDS time willincrease the read noise and thus counter the SNR improvement intended bythe higher conversion gain. Thus, the TG feedthrough settlingrequirement limits the magnitude of conventional conversion gains thatcan be used and thus limits the ability to reduce input-referred noise.

To appreciate the disruption/delay imposed by control-signalfeedthrough, consider some exemplary component and timing values. Forexample, the minimum pulse width of control signals entering the pixelarray, such as reset (RG) and transfer-gate control (TG), is constrainedby the RC time constant of their respective control lines so that arow-line resistance of ˜1000 ohms and capacitance of ˜0.5 pF yields a500 picosecond RC time constant. To achieve 2-sigma settling, the entirerise and fall of the respective control pulses can be accomplished in ˜2ns and thus very rapidly.

By contrast, pixel output settling times are orders of magnitude longer.The source-follower bias current is typically on the order of 3 μA-10 μA(i.e., to avoid fixed pattern noise and shading caused by voltage dropsacross the source follower and pixout line) so that, even in the dark, apixout settling time delay on the order of 1-3 μs is generally imposedduring signal-state sampling to compensate for control-signalfeedthrough. This can be understood from the slew-rate limitationdictated by V(t)=1/C∫i(t)dt, where i(t) is, for example, 3 μA, and C isthe combined capacitance of pixout line and the sampling capacitors andother parasitic capacitance of the pixout line. A typical value might be2 pF. Even though the sensor is in the dark, feedthrough-induceddisturbance of the pixout line can be roughly 500 mV to 1000 mV (e.g.,depending on the coupling capacitance of the TG to the floatingdiffusion and the total capacitance of the floating diffusion), so thatan exemplary pixout settling time following TG pulse feedthrough can becalculated as t=(500 mV/3 μA)*2 pF=333 ns. Because of the large voltagejump, several times the slew settling time is required in practice inorder to achieve matching between pixels and columns, yielding a 1 μs to3 μs delay overall.

As FIG. 4 shows, there is a large disruption on the floating diffusionand pixout because of TG pulse feedthrough. This leads to a number ofundesirable effects including extended CDS times (i.e., to account forthe substantial settling delays detailed above), high row-wise temporalnoise and, unless settling time is made long enough to accommodate theworst-case columns in the array, fixed pattern noise due to mismatch incolumn and pixel settling. More generally, the CDS transfer function isa band-pass function that rejects noise at frequencies outside thebandpass, but passes in-band noise into the readout signal. The CDS timedetermines the lower/bottom frequency of the bandpass (the upperfrequency being determined by the bandwidth of the source follower andother circuits in the CDS readout path) so that feedthrough-imposedextension of the CDS time widens the bandpass and thus increases readoutnoise.

TG-Nulling/Active-Stabilization

In an embodiment shown generally in FIG. 5, a feedthrough compensationpulse (or “nulling” pulse) is asserted on one or more row-based and/orcolumn-based signal lines (shown collectively as “Null”) that extend inproximity to the floating diffusion nodes within a selected respectiverow or column of pixels, there being at least one such “nulling” linefor each pixel row and/or each pixel column. The nulling pulsecounteracts (i.e., cancels, negates, mitigates or otherwise compensates)capacitive feedthrough resulting from application of the TG pulse duringthe photocharge sampling phase, reducing floating diffusion and pixoutsettling times and thus reducing CDS time and corresponding temporalnoise during pixel readout. Although not specifically shown in FIG. 4, anulling pulse may additionally be generated in coordination with othercontrol signal pulses (e.g., during partial-TG pulse duringoverthreshold detection in a conditional-read pixel, concurrently withthe RG pulse that precedes reset-state sampling and so forth). Also,while the nulling pulse is shown as transitioning from Ov to a negativevoltage, any low-going pulse (i.e., negative-polarity pulse) thattransitions from a positive to a negative voltage, or from a positivevoltage to a less positive voltage may alternatively be applied. Moregenerally, nulling pulses may be generated at appropriate times and withappropriate amplitudes and polarities to counteract any control signalfeedthrough including, for example and without limitation, feedthroughfrom the row-select signal assertion (RS), reset-gate signal assertion(RG) as well as various other row and column control signals discussedbelow.

In general, the nulling signal line is routed across or in proximity toone or more target rows or columns of pixels to effect parasiticcapacitive coupling to the floating diffusions of the pixels, and may ormay not be connected to pixel transistors within the pixel row beingread-out (i.e., the “active” pixel row). In a number of embodiments, forexample, the nulling signal line may be implemented by one or more rowcontrol lines for a pixel row (or rows) that neighbors the active row(e.g., is adjacent or proximal to the active row), while in otherembodiments, the nulling signal line may be implemented by a dedicatednulling line (i.e., line provided solely to convey a null signal pulse),and in yet other embodiments the nulling signal line may be a controlsignal line for the active pixel row itself. In further embodiments,combinations of dedicated nulling lines and neighbor-row control lines,and/or active-row control lines may yield a desired feedthroughcompensation, and in yet further embodiments, column control lines andor dedicated column nulling lines may be used in addition to or insteadof row-based nulling lines. In all such cases the nulling signalconveyed on the nulling line(s) performs a counter coupling to eliminateor substantially mitigate any net control-signal feedthrough to thefloating diffusion node—an effect referred to herein alternately as“feedthrough compensation,” “feedthrough nulling” and“floating-diffusion stabilization.”

Whether implemented by row-based and/or column-based signal lines,nulling lines can be placed near (or likely above) the verticalrow-based floating diffusion trace (and thus near the floating diffusionregions for respective pixels), and the distance from pixout and thecolumn-based transfer-gate control line (i.e., TGc) can also becontrolled. There is significant freedom to adjust both or either of thewidth of the nulling line and proximity to other lines (such as TGr,pixout and TGc) to yield an ideal “counter-coupling” effect. Also, theamount of “counter-coupling” can be tuned from a voltage standpoint, forexample, using run-time and/or production time calibration operationsand on-chip or off-chip calibration circuitry. In practice, the TG-nullpulse amplitude can be made quite large (without reliability risk),particularly where it is not driving a node or a gate. For example, anon-chip switched-capacitor “booster” can be used to achievenegative-polarity or positive-polarity feedthrough compensation pulseswith amplitudes of 10v or more, though smaller pulse amplitudes may alsosuffice.

Still referring to FIGS. 4 and 5, while feedthrough compensation enablesarbitrarily small CDS periods approaching the time constant of pixoutline, meaningful image production requires a CDS period long enough toread out non-negligible photocharge according to V(t)=1/C∫i(t)dt), wherepixout signal following the TG pulse is now representative ofphotocharge, not parasitic voltage coupling. Observing that theunfettered pixout settling time is dependent on the level of photochargetransfer, it follows that low-light signals may be sampled with lowersettling delay than brighter-light signals—an insight exploited in anumber of embodiments detailed below. As an example, single photons maybe counted without regard to a slew rate limitation. As another example,the CDS period can be arbitrarily shortened or extended based on theimaging condition (i.e. very short for known low-light and high-ISOscenes). Other techniques may be applied in alternative embodiments.

Another consideration that arises with enablement of very short durationCDS (“compressed CDS”) and thus a very low noise pixel is howpractically to achieve sub-electron read-noise performance in view ofadditional readout circuit noise from components in the readout pathafter the pixel source follower transistor. This added noise may arisefrom circuits such as the sample and holds, gain amplifiers andanalog-to-digital converters (ADCs). Assuming that the read noise of acompressed-CDS pixel readout (e.g., 10 ns-100 ns CDS duration) will bemuch lower than typical readout circuit noise, then the capacitor sizeof the sample-and-holds may be chosen accordingly. That is, given asub-electron-noise pixel (i.e., noise less than single electron), thencapacitance of capacitive sample-and-hold elements may be increased toreduce the readout circuit noise addition.

Compressed-CDS (i.e., sub-electron) pixel readout also permits adoptionof higher conversion-gain architectures to reduce post source-followernoise. For example and without limitation, an architecture that yields a500 uV/e− conversion gain instead of 100 uV/e− will effectively reducenoise post-source follower by 5×. A number of such high-conversion-gainembodiments are discussed in greater detail below.

Various embodiments disclosed herein enable the CDS duration to becompressed to the theoretical RC constant of the pixout line itself,reducing CDS time by an order of magnitude or more (e.g., from 1 μs to100 ns or less), greatly reducing temporal source-follower readout noiseand pixel fixed pattern noise/column fixed pattern noise in the dark.The following sections detail pixel feedthrough compensation schemes(i.e., floating diffusion stabilization through TG-nulling and otheractive compensation techniques) that may be applied, for example andwithout limitation, in otherwise standard CMOS image-sensor pixels andsensor architectures as well as in specialized or otherwise non-standardpixel and sensor architectures.

Baseline Feedthrough Compensation

A baseline embodiment for floating-diffusion feedthrough compensationincludes an added signal wire and attendant decoder/driver dedicated tofeedthrough nulling. In a number of embodiments, this dedicated nullingsignal line (or “coupling” or “compensation” signal line) extendsrow-wise across the pixel array to match skew and droop over the arrayof the row-control pulses and signals to be compensated. In alternativeembodiments, column-based nulling lines may be used instead of or inaddition to row-based lines, with column signal timing, waveform shapingand/or signal line routing designed to match skew and droop of thespecified feedthrough signals to be compensated. In yet otherembodiments, existing control signal lines may be leveraged to carrynulling signals. Also, transistors or other active components may beprovided within individual pixels to provide feedthrough compensationinstead of or as a supplement to signal-line-based compensation, thoughpotentially at the cost of reduced fill factor.

With respect to the exemplary waveform diagrams and embodimentsdescribed herein, it should be noted that feedthrough compensation neednot be “perfect” in order to achieve the advantageous effects. Forexample, the pulse edges of the compensation signals do not have alignexactly with the signal pulse edges that produce the feedthroughdisturbance, nor are matching voltage swings, coupling capacitances (orproducts of voltage swings and coupling capacitances) required betweenthe feedthrough-compensation pulse and control signal that produces thefeedthrough.

FIG. 6 illustrates exemplary coupling capacitances between TG and RGcontrol signal lines and the floating diffusion node, FD, of thesingle-mode (4T) pixel of FIG. 1A. In a first-order analysis, which mayapply equally to the dual mode pixel of FIG. 1B, the couplingcapacitances between TG and FD (i.e., “C_(tg-fd)”) and between RG and FD(“C_(tg-rg)”) will yield a feedthrough signal on the floating diffusionnode that follows the pulses from TG and RG signals. With regard to theTG pulse, for example, the magnitude of the feedthrough signal (ΔV_(FT))is given by:ΔV _(FT) =ΔV _(tg)*(C _(tg-fd) /C _(fd))  (1)Where ΔV_(tg) is the voltage swing of the TG pulse and C_(fd) is thetotal capacitance of the floating diffusion node.

Note that the pixel conversion gain is generally adjusted by decreasingC_(fd) (i.e., conversion gain=q/C_(fd)) meaning that, if the feedthroughto the floating diffusion is not compensated, the ΔV of the feedthroughwill increase as the conversion gain is increased. This largerfeedthrough then imposes longer floating diffusion node and pixoutsettling delays and thus increases the CDS time. On the other hand, bycompensating the floating-diffusion feedthrough, conversion gain may beincreased without appreciably increasing settling time, and thus furtherreduce input-referred read noise.

Leveraging Pixel Control Lines to Effect Feedthrough Compensation

An alternative to adding a dedicated feedthrough compensation signalline is to use existing control signal lines and structures in thesubject pixel for feedthrough compensation—an approach that avoids addedfloating-diffusion capacitance (as may occur when a signal line or linesare added to accomplish feedthrough compensation) and thus avoidschanging the pixel conversion gain. In a number of embodiments,row-based control signal lines for neighboring pixel rows within a rowof four floating-diffusion-sharing pixel cells (e.g., individual 4×1unit cells as shown at 115 in FIG. 1B, though transfer-enabletransistors 103 may be omitted in single-mode embodiments) are employedto convey feedthrough compensation pulses. These neighbor-row controllines may be routed to closely match the clock skew and droop of thefeedthrough-sourcing signal line (i.e., the “source line”) and, in thecase of a distributed or otherwise shared floating diffusion, mayexhibit capacitive coupling to the floating diffusion that matches thatof the source line. For example, a source TG line and three neighboringTG lines may be routed uniformly across a row of four-pixel unit cellsand exhibit uniform capacitive coupling with respect to the sharedfloating diffusion within each unit cell so that capacitive feedthroughresulting from control signals conveyed on the source TG line may benulled by compensation signals conveyed on any other of the unit-cell TGlines or combination of the other TG lines. The same techniques can beapplied with respect to pixels having respective (unshared) floatingdiffusion nodes, though higher compensation voltage swings may be neededin some cases. Also, as discussed below, compensation pulses may also beconveyed via RG signal lines and RS (row-select) signal lines, as wellas column signal lines, like the column transfer-gate control line, TGc.

FIG. 7 is an exemplary pixel readout timing diagram illustrating reset,exposure and readout with respect to pixel row ‘n’ (i.e., controlled byRG_(n) and TG_(n)) and feedthrough compensation conveyed via one or moreneighboring TG control lines, designated TG_(n)*, of a shared-FD unitcell. In one embodiment, compensation pulses are asserted simultaneouslyon multiple neighboring TG lines to limit the compensation pulseamplitude (voltage swing) required on any single line (i.e., as comparedto the pulse amplitude if only one neighboring TG line was used toconvey the compensation pulse). By this arrangement, relatively lowcompensation pulse voltages can be implemented and applied withoutaffecting pixel performance, (e.g. GIDL (gain-induced drain leakage),Qsat, or blooming). Use of a single neighboring TG line to compensatefeedthrough, while feasible, may require a larger voltage swing on thecompensating line and may impose additional design considerations toensure gate reliability and avoid GIDL during readout, driverimplementation challenges, etc. As an example, if the TG_(n) pulseexhibits a 2.5V swing, the negative pulse amplitude required on threeneighboring TG_(n)* lines of a 4×1 shared-FD pixel cell is 2.5V/3=0.83V,instead the full 2.5V needed if a single TG_(n)* line was used forfeedthrough compensation.

In the embodiment of FIG. 7, the four TG lines in the unit cell havesubstantially the same FD coupling capacitance, C_(tg-fd). Consequently,because the transfer-control pulse conveyed on TG_(n) will have avoltage swing of Vtg_vsf=Vtg_on−Vtg_mid1, Vtg_mid1 may be set such thatVtg_mid1−Vtg_off=(Vtg_vsf/3) to yield feedthrough compensation pulseamplitudes of Vtg_vsf/3 (and thus, collectively, the desired Vtg_vsfcompensation level) on each of the three TGn* lines by pulsing thoselines from Vtg_mid1 to Vtg_off and back. Note that all four of the TGlines in the quad pixel unit cell are initially transitioned fromVtg_off to Vtg_mid (a signal level chosen to avoid gate-induced drainleakage to the FD node) in preparation for the feedthrough-compensatedCDS readout—a transition that may be safely (non-disruptively) effectedat any time between end of the integration phase and the falling edge ofthe SHR pulse.

FIG. 8 illustrates an exemplary set of feedthrough compensation pulsesconveyed via neighboring TG control lines (TGn*) of a shared-FD unitcell, and via the RG line of the target pixel row (RG_(n)), thuspermitting even smaller negative pulse swings on thefeedthrough-compensating signal lines. For example, in an embodiment inwhich C_(rg-fd) approximately matches C_(tg-fd) and in whichVtg_mid1−Vtg_off=Vtg_vsf/4, each of lines TGn* may be negatively-pulsedfrom Vtg_mid1 to Vtg_off and back simultaneously with assertion of asame-amplitude compensation pulse on RG to yield the desired feedthroughcompensation.

In the embodiment of FIG. 9, the TG_(n)* signal lines are used tocompensate the RG_(n) feedthrough to the floating diffusion, and thenused in combination with the RG_(n) pulse as shown in FIG. 8 tocompensate for TG_(n) feedthrough. That is, when the RG_(n) is pulsedhigh the TG_(n)* signal lines are pulsed low at 185 by an appropriatevoltage swing to compensate the RG_(n) feedthrough. Later, at 186 and187, respectively, feedthrough compensation pulses are generated onTG_(n)* and RG_(n) to collectively compensate TG_(n) feedthroughcompensation.

While described in reference to a particular 4T pixel that forms part ofa shared-floating diffusion node architecture, the feedthroughcompensation techniques illustrated in FIGS. 7-9 may also be employedwith other 4T pixel architectures such as switched-supply row-selectarchitectures, reset-through-output architectures or others. In allcases, the TG and RG signal lines in the pixel unit cell can be used tocancel, negate or otherwise compensate specific sources of feedthroughto the floating diffusion node.

FIG. 10 illustrates an additional capacitive coupling to the floatingdiffusion node (“FD”) of a single-mode 4T pixel 90 that may be exploitedto compensate for control-signal feedthrough—in this case with respectto the RG line of an adjacent pixel (for unshared-FD architectures) orpixel unit cell (for shared-FD architectures). In a number ofembodiments, the adjacent RG line, “RG_(adj),” is purposefully designedand laid out with respect to the floating diffusion node of the targetpixel to yield the desired coupling capacitance, C_(rgadj-fd). As anexample, in one implementation, a metal layer formation of the RG_(adj)line is extended into the neighboring (target) pixel in a designedproximity to the target pixel's floating diffusion node. In anotherimplementation, the RG_(adj) line is disposed immediately adjacent theFD-to-source-follower connection for the neighboring (target) pixeland/or routed in proximity to the source-follower gate of the targetpixel. As the exemplary embodiment of FIG. 11 illustrates, the proximalrouting of signal line RG_(adj) to the source-follower gate (SF) of thetarget-pixel effects a capacitive coupling, C_(rg-sf), that iselectrically equivalent to C_(rgadj-fd) by virtue of the electricalinterconnection between the source-follower gate and floating diffusionnode. Various additional/alternative layout and design techniques mayemployed to achieve/tune the desired coupling capacitance.

FIG. 12 illustrates an exemplary readout timing for an architecture thatimplements control-signal feedthrough compensation at least in part viaone or more neighboring RG lines. In the example shown, pixel row ‘n’ isbeing readout, with RG_(n) and TG_(n) being pulsed at 201 and 203 toreset the floating diffusion node and enable photocharge transfer,respectively. The adjacent RG signal line, RGadj may be the RG line froma pixel row above or below the row containing the pixel being readout(i.e., the target pixel) or, in the case of a pixel unit cell in which asingle RG line is shared among all the pixels in the unit cell, the RGline from an adjacent unit cell. Where RG_(adj) corresponds to thepreviously-read out neighboring pixel row (i.e., RG_(n-1)), RG_(adj)would normally be in the “on-state” as that pixel row has been readoutand is now integrating or waiting to integrate. In that case, RG_(adj)can then be pulsed off and on to effect a negative-polarity pulse 205that counteracts (i.e., compensates for) feedthrough of TG_(n) pulse 203without effect on the neighboring pixel row (i.e., row n−1). While notspecifically shown in FIG. 12, the RG_(adj) line could also be used tocompensate the feedthrough from the RG_(n) pulse.

While neighbor-row TG and local RG control lines are particularlyeffective for compensating feedthrough from a source line to thefloating diffusion (i.e., in shared-FD unit cells, those neighboringlines tend to be physically adjacent the floating diffusion node andthus couple effectively to the FD, primarily through the gate to drainoverlap capacitance), the RS signal line and row-select transistor gatemay also be used for feedthrough compensation. FIG. 13, for example,presents an exemplary pixel readout timing diagram in which a negativepulse on the RS line compensates for (i.e., negates in whole or part)the feedthrough from a TG or RG source line. As shown at 207 and 208,the negative RS pulses ride upon an active (e.g., asserted to a logichigh state in this example) RS signal. The voltage swing, ΔV, of thenegative RS pulse required to cancel the feedthrough will depend on thecoupling capacitance between the RS line and the floating diffusionnode. Larger compensation voltage swings may be implemented inembodiments where the RS gate and/or signal line are not physicallyadjacent (or otherwise do not sufficiently capacitively-couple to) thefloating diffusion, so long as the negative-going compensation pulsedoes not disrupt the row-select function of the RS line. To achieve asufficient compensation voltage swing on RS that is compatible withallowable pixel and drive circuit voltages, the RS to FD couplingcapacitance may be purposefully increased (e.g., by routing part of theRS gate poly close to the source-follower (SF) gate, routing the RSsignal-line interconnect over the FD-to-SF gate interconnect, etc.)Alternatively (or additionally), RS compensation pulses may be appliedin combination with the above-described TG_(n)* and RG compensationpulses.

Alternate TG Null Timing

FIG. 14A illustrates an alternative TG null timing approach, applicableat least to 4T pixel architectures, including, without limitation, thesingle-mode and dual-mode 4T pixels shown in FIGS. 1A and 1B. This TGfeedthrough cancellation or compensation method can be applied inconjunction with various feedthrough-compensated readout techniques,including the bifurcated read-path and/or variable conversion gaintechniques described below. The specific example shown in FIG. 14A isparticularly applicable to readout of low-light signals to achieve fastCDS times and low read noise.

A generalized single-mode pixel 90 and readout circuit block diagram isshown in FIG. 14B, with corresponding timing diagram shown in FIG. 14A.Referring to FIGS. 14A and 14B, initially the photodiode 110 (PD) isreset by pulsing the transfer gate line (TG) and raising the reset gateline (RG) as shown. After TG goes low, photocharge integration commencesand RG is left on or partially on to provide blooming protection. At thestart of a CDS readout, the row select (RS) signal for desired row isasserted and the source follower 105 (SF) is connected to the columnoutput line, pixout. Next the reset-state sample-and-hold control signal(SHR) signal and signal-state sample-and-hold-signal control signal(SHS) are raised (e.g., concurrently or one after the other as shown) toswitchably couple capacitors Cr and Cs of sample-and-hold circuit 224 tothe pixout line (i.e., via access transistors 225, 227) and thus chargeto the reset-state potential thereon. Shortly thereafter SHR goes low,switching off transistor 225 to store (or capture) the reset-state ofthe floating diffusion node 112 (FD) on reset-state sample-and-holdcapacitor, Cr. Note that while SHR is shown as falling shortly beforeRG, SHR may alternatively be lowered between the RG falling edge and thesubsequent TG rising edge.

At this point, feedthrough-compensated photocharge transfer is enabledby lowering RG and raising TG in a manner that enables the negative RGfeedthrough to cancel or substantially reduce (i.e., compensate for)positive TG feedthrough. To avoid lost photocharge, the RG signal startsto go low prior to (and, in one embodiment, as close as possible to) theTG signal going high. The proximity of the RG falling edge and TG risingedge are constrained by timing control and charge transfer, (see inset219 in FIG. 14A). The TG rising edge does not occur prior to the RGfalling edge since this will cause at least some portion of the chargetransferred from the PD to the FD to be swept out to the supply Vdd viareset transistor 109.

Alternately the RG signal can go partially lower, (see inset 221 in FIG.14A), prior to the rising edge of TG and the full falling edge of RG.This provides two benefits; (1) the RG feedthrough can be matched to theTG feedthrough since RG and TG may have inherently different couplingcapacitances to the FD, and (2) this produces a barrier from the FD tothe RG region to prevent charge loss of the initial small amount ofsignal transferred from the PD as TG is turned on. The RG and TG edgescancel each other's feedthrough to the FD and the column output line cansettle quickly for small signals, (as previously described). Next, theSHS signal falls to sample the signal+reset level onto capacitor Cs.

Referring to inset 223 of FIG. 14A, the TG and RG edges can also bedesigned to fall more slowly to provide more timing margin for placementof edges to avoid charge loss.

Feedthrough Compensation Using Added Signal Lines and/or PixelComponents

FIGS. 15A and 15B illustrate an alternative feedthrough compensationapproach in which a dedicated compensation signal line (“Comp”) iscoupled to an in-pixel compensation structure. Referring first to thepixel cross-section embodiment shown in FIG. 15A, a somewhat heavilyn-doped floating diffusion node 240 (n+) is formed within a more lightlydoped n-type isolation well 241 together with a p+ compensation node243. By this arrangement, the floating diffusion node is effectivelyextended to the size of the n-type isolation well 241 (while maintainingisolation between the n+ and p+ nodes 240, 243) so that a capacitivecoupling “C_(p-fd)” is formed between the p+ node 243 and the floatingdiffusion. Consequently, a negatively pulsed feedthrough compensationsignal applied to the isolated p-region 243 via the compensation linewill capacitively couple to the floating diffusion and thus may be usedto compensate for (i.e., negate or otherwise mitigate) undesiredcontrol-signal feedthrough. An example of this operation with respect toTG-feedthrough is illustrated in FIG. 15B. In the embodiment shown, thecompensation line is raised to a predetermined baseline potential, andthereafter pulsed negatively, from the baseline potential to abelow-baseline potential and back as shown at 251, simultaneously withassertion of the TG_(n) pulse, thereby compensating for TG_(n)feedthrough.

The required voltage swing on the negative-polarity compensation pulse(and thus the baseline potential to which the compensation signal isarmed in the embodiment of FIG. 15B) is dependent on C_(p-fd) and ismade small enough to avoid a large dark current (or breakdown orpunch-through) in the p+ to n-FD junction.

FIG. 16A illustrates an alternative in-pixel compensation structureembodiment in which photodiode 110 and floating diffusion node 112 areformed within a p-well 261 that has been implanted into an n-substrateor n-epi material. An isolated p-region 263 is formed outside of thep-well and a separate n+ diffusion 265 is formed inside of the isolatedp-region. This n+ diffusion 265 in isolated p-region 263 is connected tothe n+ floating diffusion node 112 (e.g., by metal layer connection orpoly 266) and the isolated p-region 263 is connected to the COMP signalline. By this arrangement a negative-polarity COMP pulse willcapacitively couple from the isolated p-region 263 to the n+ diffusion265 (i.e., by virtue of capacitance C_(p-fd) as shown) and therefore tothe floating diffusion via the n+ diffusion-to-FD interconnect 266, thuscompensating for control-signal feedthrough to the floating diffusion.

The approach shown in FIG. 16A can also be used for 3D(three-dimensional) stacked sensors or other multi-die arrangements.Referring to FIG. 16B, for example, floating diffusion node 112 andisolated p-region 263 are fabricated as in FIG. 16A, but disposed onseparate (respective) integrated circuit dies (or wafers) that areinterconnected in a die stack or other multi-die arrangement toestablish connection 276 between isolated p-region 263 and floatingdiffusion node 112.

FIG. 17 illustrates another in-pixel compensation structure embodimentin which an additional compensation gate 291 (CG) is formed adjacent thefloating diffusion node 112 to establish a coupling capacitance to thefloating diffusion as shown by C_(g-fd). The channel region 292 beneaththe compensation gate is p-doped so that no additional transistor isformed and so that voltages applied to CG do not alter the channelpotential in a manner that would affect the capacitance or charge flowof floating diffusion node 112.

FIG. 18 illustrates a further in-pixel compensation structureembodiment. As shown, the source-follower poly feature 298, which iselectrically coupled to the floating diffusion node (connection notshown), is extended over a shallow trench isolation (STI) region 299 toan adjacent gate oxide and n+ source/drain region 301. By thisarrangement, a capacitive coupling (Cg-cd) is formed between the n+source/drain region 301 and the source-follower poly 298 and thusbetween the n+ source/drain region and the floating diffusion node. Acompensation line (COMP) is connected to the isolated n+ source/drainregion 301 as shown, so that, a negative-polarity pulse on the COMP linewill capacitively couple to the floating diffusion node to compensatefor control signal feedthrough.

FIG. 19 illustrates an in-pixel compensation structure embodiment thatenables feedthrough compensation from the RG line of an adjacent pixelor adjacent pixel unit cell (e.g., as discussed above in reference toFIGS. 10-12). As shown, adjacent pixel (or unit cell) RG line, RG_(n-1),is connected to a floating drain 308 adjacent the source-follower polyand/or floating diffusion node of the target pixel to create the desiredC_(rg-sf).

Feedthrough Compensation within a Conditional-Read Pixel Array

While feedthrough compensation has thus far been discussed primarilywith respect to single-mode 4T pixels (i.e., pixels that lackcolumn-line transfer-gate control and thus without column-controlledconditional-read capability), the approaches and techniques disclosedmay readily be extended to dual-mode (conditional-read) pixels in whicha column control/feedback line (or lines) is used to enable or disablephotocharge readout (i.e., photocharge transfer to floating diffusionand ensuing readout generation) according to an over/under thresholddetermination. For example, feedthrough compensation pulses may begenerated on local RG or RS signal lines (i.e., on the instances ofthose lines that control reset and row-select operations within thepixel row or unit cell row for which feedthrough is being compensated)and/or neighboring RG/RS lines generally as discussed above.

FIG. 20 illustrates an exemplary pixel readout timing diagram for aconditional-read pixel in which feedthrough compensation pulses aregenerated on one or more neighboring TGr lines (i.e., row-basedtransfer-gate control signal lines, designated TGr_(n-1)* ). The diagramshown assumes a “stacked-gate” conditional-read pixel architecture(i.e., the pixel includes a transfer-enable transistor interconnectedbetween TGr, TGc and the pixel transfer gate as shown at 103 in FIG.1B), so that the TGr_(n) potential (i.e., a primary source of otherwisedisruptive feedthrough) is maintained at or above a level that avoidsforward biasing the drain-to-body junction of the transfer-enabletransistor, and TGc is generally held high during photochargeintegration (i.e., phase 2). As FIG. 20 shows, negatively-directedfeedthrough compensation pulses are generated in a manner analogous togeneration of feedthrough compensation pulses on the neighboring TGlines shown in FIG. 8. As with the TG_(n) and TG_(n)* lines shown inFIG. 8, TGr_(n) and TGr_(n)* may be routed to respective pixels within ashared-FD unit cell. Also, as with TG_(n)*, by using conveying multiplefeedthrough compensation pulses on respective neighboring TGr lines inthe same shared unit cell, the compensation pulse amplitude required onany single neighboring TGr line can be reduced, thus enabling generationof relatively low compensation voltages that will not disrupt pixelperformance (e.g. GIDL, Qsat, blooming).

In contrast to the various unconditional read operations discussedabove, the conditional-read operation involves two TGr_(n) pulses atdifferent amplitudes—a first TGr_(n) pulse for partial charge transfer(during overthreshold-detection phase 4) having a voltage swingVtgr_vsp=Vtgr_part−Vtgr_mid1, and second TGr_(n) pulse for full chargetransfer (during conditional readout phase 5) having a voltage swingVtgr_vsf=Vtgr_on−Vtgr_mid1. In the particular embodiment shown,Vtrg_mid1 is set so that Vtgr_mid1−Vtgr_off=Vtgr_vsf/3.

As explained above in reference to FIGS. 1B, 2 and 3, the full chargetransfer pulse amplitude is greater than the partial transfer pulseamplitude (Vtgr_vsf>Vtgr_vsp) so that different levels of feedthroughcompensation are needed. In one embodiment, the differentpartial-transfer and full-transfer feedthrough-compensation levels areachieved by varying the number of compensation pulse contributorsbetween those two operations and thus avoiding generation of anadditional TGr_(n)* voltage level. That is, compensation pulses areapplied on N neighboring TGr lines to compensate for full-transferTGr_(n) feedthrough, and on M neighboring TGr lines to compensate forpartial-transfer TGr_(n) feedthrough, where M is less than N inaccordance with the difference between Vtgr_vsf and Vtgr_vsp. In anotherembodiment, an additional Vtgr_off level is provided for the partial TGpulse feedthrough compensation. This is indicated in FIG. 20 by thedotted line for the partial feedthrough compensation pulse and signalname Vtgr_off*. In a further embodiment not shown in FIG. 20, thepartial transfer TGr pulse is implemented as a pulse with asubstantially shorter width than the full transfer pulse. In this casethe amplitudes of the negative-polarity compensation pulses for partialand full photocharge-transfer may be the same.

FIG. 21 illustrates an exemplary pixel readout timing diagram for aconditional-read pixel in which feedthrough compensation pulses aregenerated on neighboring TGr lines (TGr_(n)*) and on the local RG line(RG_(n)). In the particular arrangement shown, TGr_(n)* and RG_(n) areall negatively pulsed to compensate for full-transfer TGr_(n)feedthrough, while only the TGr_(n)* lines (or a subset thereof) arepulsed to compensate for partial-transfer TGr_(n) feedthrough. Otherfeedthrough compensation combinations of TGr_(n)* and RG_(n) arepossible.

FIG. 22 illustrates an exemplary pixel readout timing diagram in whichcolumn transfer-gate control line, TGc, is used to compensate TGr and RGfeedthrough, either exclusively or in combination with neighboring TGrlines and/or the local RG_(n) line. The layout of the transfer-enabletransistor (i.e., element 103 of FIG. 1B) and/or TGc signal line maypurposefully designed/altered to achieve a desired coupling capacitancewith respect to the floating diffusion node. Also, to avoid disruptionof the pixel cycle, any negative-polarity compensation pulses on the TGcline are implemented such that the logic-level signal applied on TGcremains undisturbed. Accordingly, in embodiments where TGc is maintainedpredominantly at a high logic level (e.g., Vdd) throughout theintegration, reset-state sampling, overthreshold detection andconditional-readout phases of the pixel cycle, TGc is elevated tovoltage level (Vtgc_on) above the high logic level during thereset-state sampling, overthreshold detection and conditional readoutphases to permit negative-pulse amplitudes that will not cause the TGcsignal to fall below the logic-high voltage level. Thus, TGc is pulsednegatively from Vtgc_on to Vdd and back at 351 to compensate for RG_(n)feedthrough, is pulsed somewhat less negatively from Vtgc_on to Vtgc_on2and back at 353 to compensate feedthrough from the lower-amplitudeTGr_(n) pulse applied to effect partial transfer, and is thenconditionally (i.e., according to the over/under thresholddetermination) pulsed again from Vtgc_on to Vdd and back at 355 tocompensate feedthrough from the higher-amplitude full-transfer TGr_(n)pulse. As shown, for those pixel columns determined not to exceed theconditional-read threshold, TGc is driven low to prevent photochargetransfer and thus prevent pixel readout.

Although TGr_(n)* signals may be applied to compensate control-signalfeedthrough in split gate conditional-read pixels in generally the sameway as described for stacked gate embodiments, the direct connection ofthe TGc signal to the transfer gate (i.e., portion thereof) bringsadditional considerations. For one, the capacitive coupling between theTGc line and floating diffusion tends to be significantly increased(i.e., in a split-gate vs. stacked gate embodiment) by virtue ofFD-adjacent layout, reducing the requisite compensation pulseamplitudes. An exemplary pixel readout timing diagram for use of TGc forTGr_(n) feedthrough is shown in FIG. 23. As shown, TGc is raised toVtgc_on2 at the conclusion of integration phase 2, then pulsednegatively to Vdd and back to compensate RGn feedthrough prior toreset-state sampling. Thereafter, TGc is pulsed negatively from Vtgc_on2to Vtgc_on3 and back to compensate for the partial-transfer pulse onTGr_(n) and then conditionally pulsed from Vtgc_on2 to Vdd and back tocompensate for the full-transfer pulse on TGr_(n). As in the embodimentof FIG. 22, TGc is driven low during the full-transfer pulse on TGrn forthose pixels (in respective columns) determined not to exceed theconditional-read threshold.

FIGS. 24A and 24B illustrate exemplary readout timing diagrams forconditional-read pixels with feedthrough compensation. Morespecifically, FIG. 24A presents exemplary readout control signals andwaveforms with respect to conditional-read operations within pixel rowsi, i+1, i+2 and i+3 (i.e., rows that may be but are not necessarilyphysically adjacent one another), and thus partial-transfer andfull-transfer pulses on respective TGr control lines (designated“TGr_(n)”) for those pixel rows. By contrast, FIG. 24B illustratescontrol signals and waveforms for unconditional read operations withinthe same conditional-read pixel array. In both cases, the TGc line isassumed to be coupled to a split-gate photocharge transfer structure,though stacked-gate structures may be used in alternative embodiments.Also, it is assumed in this example that the neighboring TGr signalsused for feedthrough compensation (i.e., TGrn*) are coupled to pixelsthat share a floating diffusion node with the pixel coupled to TGr_(n).In other embodiments, other local and neighboring control signal linesmay be used instead of or in addition to the TGr_(n)* lines, andTGr_(n)* may apply to neighboring pixels that do not share a floatingdiffusion. Also, as discussed above, in-pixel feedthrough compensationstructures and corresponding compensation control lines may be providedto enable feedthrough compensation with or without contribution fromexisting pixel control lines.

The timing diagrams presented in FIGS. 24A and 24B are associated withthe readout circuitry diagrams in FIGS. 25A-25C, which illustrateembodiments of per column sample and hold blocks 388 (FIG. 25A),comparator/sense-amplifier 401 (FIG. 25B), and per n-column PGA and ADCblocks 419, 421 and 422 (FIG. 25C). Notable features of the readouttiming include, without limitation:

-   -   For conditional sub-frame readouts, the partial transfer readout        can be done with short CDS time and short read time. Since the        partial transfer and threshold assessment operation are to        determine whether the signal integrated in the PD and        transferred to the FD is larger than a specified threshold, it        is not necessary to have an SHS time and pixout settling time        that is long enough to charge a storage capacitor Cs to a high        light or saturated pixel level. It is only necessary to have an        SHS time and pixout settling time that is long enough to charge        Cs to the specified threshold level, (which is a very small        signal for the partial transfer threshold detection method).        With this method the pixel read noise for the partial transfer        and threshold assessment can be made to be very low and thus        increase the detection sensitivity, (reduce the number of        electrons required to trip the comparator), of the threshold        assessment.    -   For conditional sub-frame readouts, the full-conditional        transfer readout can be done with an SHS time and pixout        settling time that is long enough to charge Cs to a high light        or saturated pixel level. Since the threshold level is typically        set to half of full well for example, the conditional full        transfer readouts will be signals higher than half of full well        and it is not necessary to have the lowest read noise due to the        signal being photon shot noise limited. The CDS time and read        noise cannot be short and low respectively since the partial        transfer and threshold assessment time has elapsed between the        falling edge of SHR and the falling edge of the conditional SHS.        Note that this time and read noise may be reduced by having a        very short partial transfer and threshold assessment readout        enabled by the feedthrough compensation.    -   Because the CDS time is reduced for the partial transfer        readout, the read time and row time can be diminished. May be        able to reduce from 3 sequences that are pipelined in the sample        and hold to two sequences that are pipelined in the sample and        hold. This would reduce the number of S/H capacitor banks        required which will shrink die size.    -   For unconditional sub-frame readouts, the time slot normally        reserved for partial transfer and threshold assessment is used        for the full transfer unconditional readout. With this approach,        described in greater detail below, a bifurcated (dual) readout        or dual SHS technique can be utilized to optimize the readout        for both low and high light signal levels. Also, since no        partial or conditional sequence occurs in an unconditional        sub-frame, the low light SHS can use the comparator S/H bank and        the high light signal readout can use the readout S/H bank, (no        added banks or signals are required).

Bifurcated Low-Light/Bright-Light Readout Paths—Leveraging CompressedCDS for Enhanced Low-Light SNR

FIG. 26 illustrates an exemplary compressed-CDS pixel readout timingdiagram enabled by feedthrough compensation (e.g., using techniquesshown in FIGS. 7-9). As shown, now that control-signal feedthroughdisturbances to the floating diffusion and pixout have been compensated,SHS (the signal-state sample-and-hold control signal) can rise at thesame time as SHR (the reset-state sample-and-hold control signal) inorder to pre-charge the signal-state storage capacitor to the resetlevel prior to photocharge transfer from photodiode to floatingdiffusion. Also, for low-light (small) signal readout, the CDS time isnow constrained primarily by the TG_(n) pulse width and thus may be onthe order of 30-50 nanoseconds, or possibly less. In the case of amedium to bright-light (“large”) signal readout, however, additionaltime may be required after the falling edge of the TG_(n) pulse to fullycharge the sample-and-hold capacitance to the correspondingly higherlevel—a circumstance accommodated by extending the SHS pulse width atpenalty of increased pixel read noise. FIG. 26 illustrates thistimewise-SHS extension within shaded region 471, contrasting the highlycompressed (and thus low-noise) CDS time possible for low-light signalswith the longer, higher-noise CDS time needed for medium andbright-light signals, reaching a maximum duration at the full-wellpotential of the photodiode.

Recognizing that the SNR of small, low-light signals will suffer most ifCDS time is extended to accommodate all lighting conditions, a number ofembodiments detailed below oversample the signal-state of the floatingdiffusion, capturing a first signal-state sample after a compressed-CDStime corresponding to a fixed or programmable threshold between smalllow-light and brighter-light signals (the “intermediate” threshold), andthen capturing a second signal-state sample after a longer CDS timesufficient to accommodate larger (brighter-light) signals within theperceptible range of the image sensor. The brighter-light CDS result (orlow-light CDS result) may then be evaluated pixel by pixel to determinewhich of the two signal-state samples should be output as the finalizedCDS value, for example, by comparing the brighter-light CDS value(before or after digitization) to the intermediate threshold (or anoffset from the intermediate threshold), selecting the brighter-lightCDS result if the threshold is exceeded and selecting the low-light CDSresult otherwise.

FIGS. 27A and 27B illustrate an exemplary S/H circuit embodiment andcorresponding pixel readout timing diagram corresponding to thesignal-state oversampling described above—a dual or bifurcated read-pathapproach that preserves tightly-compressed CDS times for the low-lightsignals that most benefit from increased noise rejection, whilemaintaining the longer pixout settling time needed for brighter-lightsignals. Referring first to FIG. 27A, the pixel readout circuitryincludes two banks of sample-and-hold capacitors, a low-signal bank 501and a high-signal bank 503. As shown, access transistors 505, 509 thatswitchably couple the reset-state capacitive elements Cr1, Cr2 withineach of the two signal banks to the pixout line for a given pixel columnare controlled by a shared SHR signal and thus are operated in parallelto capture reset-state samples. By contrast, the access transistors 507,511 that switchably couple pixout to the sample-state capacitiveelements Cs1, Cs2 within the low and high signal banks are controlled byseparate low and high SHS signals, SHS1 and SHS2. By this arrangement,and by setting the SHS1 and SHS2 pulse widths to respective short andlong durations, divergent CDS times are achieved for the twosignal-state samples, enabling low-light-level signals to be capturedafter a tightly compressed CDS time within low-signal S/H bank 501, andhigher-light-level signals to be captured after a longer CDS time withinhigh signal bank 503.

FIG. 27B illustrates an exemplary dual-readout timing pattern that maybe employed with respect to the dual-bank per-column sample-and-holdcircuitry of FIG. 27A, emphasizing the compressed small-signal CDS andreadout times effected by SHR and SHS1, and the longer large-signal CDSand readout times effected by SHR and SHS2. As shown, RG_(n) is pulsedto reset the floating diffusion, while TG_(n)* are simultaneously pulsednegatively (i.e., pulsing from Vtg_mid1 to Vtg_off and back in thisexample) to negate feedthrough from RG_(n) to the floating diffusion.SHR1 and SHR2 are raised with RG_(n) to enable the signal-statecapacitors Cs1 and Cs2 to charge to the baseline reset-level inpreparation for eventual signal-state sampling. SHR is also raised withRG_(n) and then lowered as shown to capture the floating-diffusion resetlevel on both reset capacitors Cr1 and Cr2 (i.e., as reset-statesamples). Note that the SHR signal may be lowered shortly after the SHRrising edge (i.e., effecting narrow SHR pulse) as the floating diffusionnode and pixout line can settle quickly without the RG feedthrough.

After capturing reset-state samples on Cr1 and Cr2, the TG_(n) andTG_(n)* signals are pulsed to transfer photocharge from the photodiodeto the floating diffusion (i.e., TG_(n) is pulsed to enable the chargetransfer and one or more TGn* lines are pulsed negatively to negateTG_(n) feedthrough). As shown, SHS1 may be lowered very shortly afterthe falling edge of the TG_(n) at a design-selected timing point thatpermits the Cs1 capacitor to be charged to signal level at least up tothe intermediate threshold (i.e., capturing a signal-state sample on Cs1corresponding to a luminance range from dark to the intermediatethreshold between low-light and brighter-light signals) whilemaintaining low pixel read noise (i.e., due to the CDS compression); anoperation made possible by the TG_(n) feedthrough compensation. Toaccount for the possibility that a given pixel will yield abrighter-light (above intermediate threshold) signal that will notstabilize on pixout within the compressed low-light CDS time, SHS2 goeslow at a substantially later time corresponding to the pixel full-wellpoint (i.e., pixel saturation level), thus capturing a possiblebright-light signal-state sample (“large signal sample”) onsample-and-hold element Cs2.

At this point, with low-light and bright-light signal-state samplescaptured within Cs1 and Cs2, and with reset-state samples capturedwithin Cr1 and Cr2, the “bright-light” CDS value, SIGhigh=VCs2−VCr2, iscompared to the intermediate threshold (Vref) within, for example, acomparator circuit within the column readout circuitry. As explained,the intermediate threshold is designed (and may be programmed and/orcalibrated) to be slightly above a selected low-light signal level, butnot above a signal level that would yield a specified pixout settlingtime outside the low-light CDS time. Depending on whether SIGhighexceeds or does not exceed the intermediate threshold, Vref, eitherSIGhigh or SIGlow (i.e., VCs1−Vcr1) is selected, respectively, as thefinalized (true) CDS representative of the pixel state (i.e., level ofintegrated photocharge) and is converted to a digital pixel value. Bythis operation, low-light pixels will retain a low read noise so thatthe image sensor as a whole will yield a higher low-light SNR. Also, byevaluating only SIGhigh to select between the low-light and bright lightCDS captures, the low-light analog CDS signals on Cs2 and Cr2 remainundisturbed until needed for conversion and readout, thus preserving SNRof the low-light signal. Also, the SNR impact of increasedbrighter-light read noise resulting from the SIGhigh evaluation (i.e.,for the over/under threshold determination) is negligible in view of thedominance of photon shot noise in brighter light conditions. Despitethese benefits, the low-light CDS result may be used for over/underthreshold determination in alternative embodiments. Similarly, despitethe power savings of analog-domain selection between the low-light andbrighter-light CDS values (i.e., only one CDS value need be digitized),both the low-light and brighter-light CDS values could be digitized inalternative embodiments, with the final pixel value being selected inthe digital domain (e.g., comparing either or both digital samples toone or more digital threshold values). Additionally, the followingalternative approaches may be implemented to evaluate the low-light orbrighter-light CDS results with respect to the intermediate threshold:

-   -   A singled ended comparison can be made instead of a differential        comparison, (i.e. the voltage on Cs2 (VCs2) is compared to a        reference instead of VCs2−VCr2).    -   Comparison of SIGhigh to a reference could be done in the        digital domain (i.e., with or without pre-selection digitization        of SIGlow)    -   SIGlow and SIGhigh could be compared with one another in the        analog domain or digital domain to select one or the other as        the finalized CDS value;    -   VCs1 can be compared directly with VCs2 in the analog domain        (i.e., as the reset level is the same for both) to select one or        the other as the signal-state sample for the final CDS value—in        such an embodiment, SIGlow or SIGhigh signal level may be        generated digitally after the selected signal-state and        reset-state samples have been digitized by an ADC        (analog-to-digital converter).

Although embodiments having two readout paths (low-signal andhigh-signal) and 2× signal-state oversampling are presented in FIGS. 26,27A and 27B and in other multiple-read-path embodiments described below,in all cases the number of read paths and corresponding oversamplingfactor may be extended to three or more. For example, three SHS signalsand a corresponding set of three sample-and-hold banks may be providedto yield 3× oversampling and thus enable selection from among threepossible CDS durations and corresponding read paths (e.g., low-light,medium-light and bright-light conditions) for the finalized pixel value.

Further CDS Compression Through TG-Asserted Signal-State Capture

In the compressed-CDS timing arrangements described thus far, thefalling edge of SHS1 (i.e., sample-and-hold control signal for capturinglow-light signal-state samples) does not occur until sometime after thefalling edge of TG. Under this approach, emphasized in FIG. 28, thebrevity of the low-light CDS time is constrained by the TG pulse width,which, for large and/or high resolution arrays, is generally more than30 nanoseconds. And, while generating TG pulse widths on the order of 30nanoseconds or less may be feasible in some applications, such tightpulse width demands higher power and larger area for TG decoders anddrivers.

When TG feedthrough to the floating diffusion is compensated by anexisting pixel signal or separate compensation signal, residualfeedthrough from the rising TG edge can be made extremely small. In anumber of embodiments, this circumstance is exploited by completing alow-light signal-state sample before the falling edge of the TG pulse,freeing the low-light CDS operation from the TG pulse width constraintto enable more tightly compressed CDS times. More specifically, as shownin FIG. 29A, the SHS1 pulse width is set to yield a falling edge apredetermined time, t_(LTX), after the TG rising edge (and prior to theTG falling edge), with t_(LTX) representing the time needed for aspecified level of photocharge, corresponding to an upper end of thelow-light signal range, to be transferred from the photodiode to thefloating diffusion (e.g., 20e⁻, though higher or lower charge levels maybe selected by design or configuration programming), and for the timeneeded for the pixout line to settle to the voltage representative of anupper end of the low-light signal range, including any residualfeedthrough signal. FIG. 29B illustrates an expanded view of thelow-light CDS operation in FIG. 29A, showing that the SHS1 falling edgeoccurs the predetermined t_(LTX) time (designated ‘c’) after the TGnrising edge and thus after the floating diffusion node receives thedesign-specified (and/or programmatically specified) amount of chargefrom the photodiode. This time can be as short as 5-10 nanoseconds, thuseffecting an extremely brief low-light CDS time (i.e., interval ‘b’ fromthe falling SHR edge to the rising TGn edge plus interval ‘c’ from therising TGn edge to the falling SHS1 edge) on the order of 10 to 20nanoseconds. The minimum CDS time may be limited by the time needed forthe pixout line to settle to the voltage representative of an upper endof the low-light signal range, including any residual feedthroughsignal. The total low-signal read time, t_(RD-L), which includes the CDStime (b+c) plus the reset-state sampling time ‘a’ (the time betweenconclusion of the reset operation at the falling edge of RG and thefalling edge of SHR), is also shortened. interval a+b+c (which beginsfrom the falling RG edge) is also reduced relative to the low-signalread time required for post-TG-pulse signal-state sampling, as the TGpulse delay is avoided.

In addition to reducing the CDS time (and thus improving noiserejection), enabling low-light signal-state capture while TG remainsasserted may also reduce the pixel or row read time and thus improve thesensor frame rate and/or oversampling capability. For example, forconditional-read operation, the pipelining required to achieve a desiredtemporal oversampling rate may be reduced. That is, the shortenedlow-light CDS time and read time may hasten availability of downstreamreadout resources (e.g., ADC converter and/or other resource shared byboth low-signal and high-signal readout paths), enabling thebright-light signal-state sample to be captured at an earlier point intime (i.e., advancing the falling edge of SHS2) so that the high-signalCDS time (tCDS-H) and read time (tRD-H) to be correspondingly reduced,and thus shortening the overall dual-path readout operation.

FIGS. 30A and 30B illustrate respective unconditional and conditionalpixel readout timing that may be achieved using the shortened low-lightCDS sampling approach discussed in reference to FIGS. 28, 29A and 29B(i.e., lowering SHS1 before TGn).

For the exemplary unconditional read timing shown in FIG. 30A, theSHRcomp and SHScomp signals effect a short CDS time for the low signallevel readout. With the falling edge of SHScomp occurring prior to thefalling egde of the partial TG as shown at 581, the CDS time (andtherefore read noise) for the low signal readout is reduced in a manneranalogous to CDS compression/read-noise reduction for the low-lightsamplings discussed in reference to FIGS. 28, 29A and 29B. The highsignal readout is done in a pipelined manner using the SHS1 and SHS2signal levels, (i.e. the high light readout path for even rows is donewith SHS1 and Cs1, and done for odd rows with SHS2 and Cs2).

For the exemplary conditional read timing shown in FIG. 30B, the SHRcompand SHScomp signals effect a CDS to determine whether the pixel hasexceeded the threshold. With the falling edge of SHScomp occurring priorto the falling egde of the partial TG as shown at 581, the CDS time (andtherefore read noise) for the threshold assessment is reduced in amanner analogous to CDS compression/read-noise reduction for thelow-light samplings discussed in reference to FIGS. 28, 29A and 29B.This improved noise rejection will correspondingly improve the detectionlimit of the threshold assessment, which reduces the spillover loss andimproves near-threshold SNR.

Dual Readout Path Residual TG Feedthrough Correction

Continuing with TG-asserted signal-state capture (i.e., SHS fallingbefore TG), because the TG rising edge and the nulling signal(s) fallingedge occur substantially simultaneously or close temporally, the TGfeedthrough to the floating diffusion is substantially eliminated.Consequently, the column output signal line (pixout) will remain at orvery close to the reset signal level as charge begins to transfer fromthe photodiode and thus settle very quickly. Despite this rapid pixoutsettling, there may be some residual feedthough voltage due tonon-uniformity between the TG/FD coupling capacitance and thenulling-line/FD coupling capacitance, TG and nulling signal levels, etc.Any such residual feedthrough will generally yield a systemic spatialfixed pattern offset noise (FPN) that may be corrected in a number ofdifferent ways.

In one embodiment, an additional FPN correction (i.e., to account forspatial FPN from residual feedthrough of the rising edge of TG) iseffected by capturing and storing of a dark frame (i.e., in the darkcapture) containing the residual feedthrough. Thereafter, this darkframe digital data is subtracted from each newly readout image frame tocancel the residual feedthrough. No other added analog circuits arerequired.

In another embodiment, instead of storing a dark frame to subtract,analog samples of the settled signal level are captured both before andafter the TG falling edge using sample and hold circuitry. By sample andholding the signal value both before and after the falling edge of TG,(and rising edge of TG null signal), the difference between theTG-asserted sample and the TG-deasserted is measured to yield, as acorrection value, the amount of the residual TG feedthrough. Thisresidual feedthrough analog voltage is then subtracted in the analogdomain from the CDS's signal value. In one implementation, thiscorrection value is applied to TG-asserted CDS values on a row-by-rowbasis to cancel the residual TG feed-through component of those values.FIGS. 31A and 31B illustrate an exemplary high-level block diagram andcorresponding timing diagram for this analog-domain residual feedthroughcorrection technique.

Referring to FIG. 31A, the pixel comprises a photodiode, transfer gate(TG), reset transistor with a reset gate (RG), a floating diffusion(FD), source follower input transistor (SF) and row select transistorwith a row select gate (RS). The pixel also has a TGnull signal with acoupling capacitance (C1) to the FD. The TGnull signal can beimplemented in many embodiments as has disclosed earlier. The per columnsample and hold readout circuitry comprises a source follower constantcurrent load (Ibias), sample and hold capacitors for storage of resetand signal voltages (Cr and Cs respectively). Sample and hold reset andsample and hold signal switches are controlled by SHR and SHS signalsrespectively. Two differential amplifiers (Diff Amp1 and Diff Amp2) areused to perform analog correlated double sampling (CDS) and residual TGfeedthrough (Δ_(vtgf)) FPN correction. Diff Amp 1 is used to determinethe low-signal voltage and Diff Amp 2 is used to determine thehigh-signal voltage.

A representative timing diagram for the circuit in FIG. 31A is shown inFIG. 31B. Voltages on certain nodes in FIG. 31A as a result of thetiming and operation of the signals in FIG. 31B are also shown in FIG.31B. Voltages on these nodes representative of a small signal on pixoutare shown as a solid line, whereas voltages on these nodesrepresentative of a large signal on pixout are shown as a dashed line.The readout operation commences with a reset of the FD by pulsing RG.TGnull is used to compensate the RG feedthrough so that the pixout willsettle quickly to the reset level. There will be some residual voltageΔ_(vrgf). After the falling edge of RG the FD is at a reset voltage witha corresponding pixout voltage V_(RST). This voltage is sample and heldon capacitors CR1A and CR2 via signal SHR1. Next, TG and TGnull signalsare asserted and deassserted respectively. Charge begins to transferfrom the PD to the FD. As discussed above, a residual feedthrough signalΔ_(vtgf) will also appear on the FD. For a small signal the FD andpixout will settle quickly, whereas a large signal will take a longertime to settle. After a sufficient amount of time to allow the targetedsmall signal (V_(s)) to settle the voltage level of the FD andcorresponding pixout is stored on capacitor CS1 a via the pulse on SHS1.After the falling edge of SHS1, the voltage on CS1 a is Vs+Δ_(vtgf). Nowafter a sufficient amount of time to allow the pixel full well signal tosettle to the large signal (V1), the PixOut voltage (V_(L)+Δ_(vtgf)) issampled and held on capacitor CR1 b by pulsing SHR2. Next TG and TGnullgo low and high respectively. The residual feedthrough signal Δ_(vtgf)is now removed by this transition. The resulting pixout voltage is nowV_(L) and is stored on CS2 and CS1 b by signal pulse SHS2.

The small signal voltage S is determined via Diff Amp 1 whereS=(CS1a+CS1−(CR1a+CR1b)=V _(s) −V _(RST)The large signal voltage is determined by Diff Amp 2 whereS=CS2−CR2=V _(L) −V _(RST).

Bifurcated Low-Signal/High-Signal Readout Architectures

Ultra low noise readout architectures having bifurcated low-light andbright light (low signal/high signal) readout paths with respectiveshort and longer CDS times are presented in a number of embodimentsbelow. In general, the low-signal and high-signal ranges overlap at aboundary signal level where photon shot noise does not completelydominate the total temporal readout noise. That is, the high signalrange extends from just below the boundary to a full-well signal level(i.e., saturated photodiode) and the low signal range extends from dark(no photocharge) to just above the boundary. As generally discussedabove, CDS values are captured/generated speculatively via both the low-and high-signal paths, with either the low-signal CDS value or thehigh-signal CDS value being selected based on the signal level indicatedby either or both of the CDS values themselves. The dual readout pathscan share some or all circuit components leading up to the finalselection point (e.g., amplifier, S/H bank, ADC) and thus do not, in allcases, have physically different circuit paths but rather differenttemporal intervals, conditions and controls.

FIG. 32 illustrates an embodiment of an image sensor 625 having adual-S/H bank readout architecture to enable bifurcatedlow-light/bright-light signal capture. As shown, image sensor 625includes a pixel array 631 (e.g., rows and columns of pixels which mayor may not include shared-floating-diffusion pixel unit cells), rowdecoder/driver 635 to generate row-control signals (e.g., RS, RG, TG)and row-based feedthrough compensation signals in any of the variouspermutations described above, readout circuitry 637 coupled to thecolumn output lines (i.e., pixout or Vout) of the pixel array, andreadout control logic 633 (“readout controller”) to output timing,configuration and/or control signals to row decoder/driver 635 andreadout circuitry 637. In the embodiment shown, readout circuitry 637includes a column-line multiplexer bank 641, per-column fixed-gainamplifier (FGA) bank 643, low-light (low-signal) and brighter-light(high signal) sample-and-hold (S/H) banks 645, 647, ADC inputmultiplexer bank 649, ADC circuitry 650, decision/write logic 655 anddigital output buffer 657.

Each pixout line 632 is coupled to a respective column of pixels withinpixel array 631 and conveys reset-state and signal-state outputs of aselected pixel to readout circuitry 637. More specifically, in theembodiment of FIG. 32, each pixout line is coupled from output nodes ofa pixel column (i.e., a column of pixels, one of which is selected at agiven time by a row-based row-select signal (RS) to drive pixout) to arespective 1:2 multiplexer within multiplexer bank 641, which in turndelivers the pixout signal to either a per-column FGA within FGA bank643, a S/H circuit within high-signal S/H bank 647, or both depending onthe state of low-select/high-select mux control signals from readoutcontroller 633.

FIG. 33 illustrates embodiments of a per-column multiplexer, per-columnFGA and per-column low-signal and high-signal S/H circuit banks that maybe implemented within the column line multiplexer 641, FGA 643 and S/Hcircuit banks 645 and 647 of FIG. 32. In the embodiments shown,multiplexer control signals Cmux1 and Cmux2 (which are delivered to eachper-column multiplexer within the larger column multiplexer bank) areused to select between a low-signal pixout routing to per-column FGA(Cmux=1, Cmux2=0), high-signal pixout routing to high-signal S/H bank(Cmux1=0, Cmux2=1) and simultaneous low-signal/high-signal pixoutrouting to the per-column FGA and high-signal S/H bank (Cmux1=Cmux2=1).As shown, the low-signal and high-signal S/H banks include respectivereset-state capacitive elements (Cr1, Cr2) coupled to the correspondingread-out signal path (i.e., FGA output for low-signal readout path andcolumn mux output for high-signal readout path) by a respectiveSHR-controlled access-transistor. The low-signal and high-signalsample-and-hold control signals, SHS1 and SHS2 similarly controltransistor-switched access to sample-state capacitive elements Cs1 andCs2 within the low-signal and high-signal S/H banks, respectively. Bythis operation, the reset-state sample may be captured simultaneouslywithin the low-signal and high-signal S/H banks (i.e., on Cr1 and Cr2,respectively) in response to an SHR pulse, while SHS1 and SHS2 may bepulsed separately, at appropriate times, to capture low-signal andhigh-signal samples of the floating-diffusion signal-state, all asconveyed in the pixout signal line. Note that, in alternativeembodiments, column line multiplexer may have only one switch, Cmux1, toselectively connect and disconnect the input of the FGA. Alternatively,column line multiplexer may be omitted altogether, and the FGA isdisabled or powered down (and thus switchably disconnect from the pixoutline) during the SHS2 phase. Also, differential amplifiers or otheranalog-differencing circuits may be provided to generate, assingle-ended low-signal and high-signal CDS outputs, differences betweenthe reset-state and signal-state samples captured within the low-signaland high-signal S/H banks (i.e., Vcs1−Vcr1 and Vcs2−Vcr2). Inalternative embodiments, the reset-state and signal-state samples fromeach of the low-signal and high-signal S/H banks are supplied torespective differential inputs of the downstream circuit block and thusconstitute respective differential CDS outputs.

In the embodiment of FIG. 32, the CDS outputs from the S/H banks areprovided to respective input ports of 2:1 ADC input mux (i.e., percolumn components of multiplexer bank 649) which, in turn, sequentiallydelivers the low-signal and high-signal CDS outputs to the ADC circuitry650. In the embodiment shown, ADC circuitry 650 comprises a single-slopeADC (“SSADC”) formed by SSADC controller 651 and a bank of per-columnSSADC capture blocks 653. The SSADC controller includes a counter 654that advances incrementally through a sequence of digital numbers (DNs)and a ramp generator 656 that generates a corresponding voltage ramp tobe compared within respective SSADC capture blocks to column CDS valuessupplied by ADC input multiplexer 649.

An exemplary embodiment of an SSADC capture block 653 is shown in detailview 660 and includes a comparator 661 (the “SSADC comparator”), DNlatch or register 665, and trip bit latch or register 667. As shown, theVout signal (i.e., instance of pixout signal, with or without gain fromFGA 643, stored within a S/H bank 645 or 647 and then delivered via ADCinput mux 649) is supplied to one input of comparator 661 for comparisonwith the ADC voltage ramp (“ADC Ramp”) generated by ramp generator 656within SSADC controller 651. The output of the comparator 661, which isreset to a logic low state prior to comparison (e.g., by an auto-zerosignal or by virtue of lowering ADC ramp to a near-zero or below-zerolevel) remains low until the ADC ramp voltage rises above (or at leastreaches) the Vout signal level, at which point the comparator “trips,”transitioning its output from low to high. Although a respective SSADCcapture block 653 is provided per pixel column in the embodiment of FIG.32 and other embodiments below, in all cases, a single SSADC captureblock may be shared (e.g., via time multiplexing) among two or morepixel columns.

In a number of embodiments, the ADC ramp voltage at any step in the rampis correlated to the value within counter 654 (e.g., ramp generator 656may be implemented by a digital-to-analog (DAC) circuit which receivesthe count value and thus generates a monotonically increasing(single-slope) ADC ramp voltage as counter 654 is incremented/sequencedfrom initial to final count value) so that the ADC count value at thecomparator trip point represents the digital value corresponding to theramp voltage that yielded the trip event, and thus an ADC conversionresult. Accordingly, when the comparator trips, the high-goingcomparator output triggers storage of the current ADC count value withinDN latch 665 (thus capturing the ADC conversion result) and setting ofthe trip bit latch 667 (e.g., implemented by an SR flip-flop or otherbi-stable circuit capable of recording the trip event). In theembodiment shown, the trip bit and latched DN/conversion result areoutput from the per-column SSADC capture block 653 to decision and writelogic 655, which in turn, applies/evaluates the trip bit to determinewhether to store the accompanying ADC conversion result within digitaloutput buffer 657. For example, in one embodiment, decision/write logic655 selectively stores the latched DN value (conversion result) withindigital output buffer 657 if the trip bit is set. In embodiments thatperform sequential ADC conversion with respect to low-signal andhigh-signal readout, the digital decision/write logic may also includememory to record the low-signal trip bit for each pixel column tosignal, for subsequent signal-path selection decision, whether a validADC result was generated for the low-signal readout. In alternativeembodiments, the low-signal trip bit (i.e., trip bit generated forlow-signal ADC operation) may be stored within the digital output bufferitself (e.g., within a bit field that indicates which of the low-signaland high-signal readout paths sourced the corresponding ADC result)instead of within digital decision/write logic 655. Note also, that thetrip bit storage element 667 within the SSADC capture may be omitted inalternative embodiments and provided instead within the digitaldecision/write logic and/or digital output buffer. In furtherbifurcated-read-path embodiments disclosed below, the digitaldecision/write logic and digital output buffer are depicted as a unified“output logic/buffer” element.

Still referring to the bifurcated read path embodiment of FIG. 32,readout controller 633 issues control signals to the row decoder/driver635 and readout circuitry 637 as necessary to appropriately time readoutevents including, without limitation, operation of the column linemultiplexer bank 641, resetting/enabling/disabling per-column FGA 643,enabling reset-state capture within the low-signal and high-signal S/Hbanks 645, 647 (i.e., generating SHR pulse), enabling signal-statecapture within the low-signal S/H bank (SHS1 pulse), enablingsignal-state capture within the high-signal S/H bank (SHS2 pulse),operation of ADC input multiplexer 649 (control signal to select, as ADCinput source, either low-signal S/H bank or high-signal S/H bank andpossibly between reset-state and signal-state samples stored withineither bank). With respect to SSADC controller 651 and SSADC captureblocks 653, readout controller 633 outputs one or more control signalsto reset the SSADC and/or initiate ADC operation and may also outputcontrol signals that select between different profiles for low-signaland high-signal ADC ramps (e.g., as programmed within a ramp profilememory, not shown). For example, as explained in embodiments presentedbelow, the low-signal ADC ramp may have a significantly smaller voltagestep per count (DN) increment (i.e., a higher ADC gain) than thehigh-signal ADC ramp in view of the smaller low-signal pixout/Voutrange, and/or non-uniform step duration and/or size. Conversely, thehigh-signal ADC ramp may have a higher voltage step per DN than thelow-signal ramp, and may also have a non-uniform step duration and/orsize.

Continuing with FIG. 32, readout controller 633 also outputs signals todecision/write logic 655 and digital output buffer 657 (e.g., to resetand/or arm trip bit storage elements, time/trigger decision operations,and time/enable write operations within digital output buffer 657). Notethat, in addition to the operational control signals, readout controller633 may also include voltage generators to generate threshold voltages(e.g., for single-level comparison and/or ADC voltage ramp generation)and/or multiplexer elements to select between such voltages (e.g., assupplied by other on-chip or off-chip voltage generators) at appropriatetimes. Row decoder/driver 635, in addition to including logic forsequencing between row addresses (e.g., to perform row-sequentialreadout) and timing generation of row-select (RS), reset gate (RG),transfer gate (TG or TGr) and feedthrough compensation signals(TG*/Comp, etc.) applied to effect reset and feedthrough-compensated CDSreadout operations within a given pixel row, may also include voltagegenerators and/or selection multiplexers to enable selection/generationof pulse amplitudes and widths as described in various embodimentsherein. Also, wherever practicable, effects of different pulseamplitudes may alternatively be implemented within row decoder/driver bygeneration of pulse sequences (including control pulse variationseffected by both amplitude and pulse width and/or pulse sequencemodulation).

As with all embodiments disclosed herein, the pixel array 631 itself maybe composed of single-mode pixels (e.g., 4T or other types of pixelsthat lack column-line control over PD-to-FD photocharge transfer andthus support only unconditional readout) and/or dual mode pixels (i.e.,4T or other types of pixels having circuitry/input-point-connection thatenables joint column-line (TGc)/row-line (TGr) control over PD-to-FDphotocharge transfer and thus support both conditional readout andunconditional readout modes), with such pixels having shared floatingdiffusion nodes (e.g., pixel unit cells formed by a collection ofphotodiodes coupled by respective transfer gates to a shared floatingdiffusion, such as the four-row-by-one-column (4×1) pixel unit celldiscussed in reference to FIG. 1B, 2×2 pixel unit cells, etc.) orunshared floating diffusion nodes. Any of the pixels may additionallyinclude in-pixel feedthrough compensation structures as discussed aboveand the pixel array may be crossed by signal lines dedicated tofeedthrough compensation (e.g., lines coupled to in-pixel compensationstructures and/or disposed to yield a desired capacitive couplingwithout wired connection to other pixel components). Accordingly, thoughcolumn-based transfer-gate control lines (TGc) and/or dedicated row-and/or column-based feedthrough compensation lines may not be explicitlyshown in the embodiment of FIG. 32 or others presented herein, in allsuch cases such signal lines may be provided together with correspondinglogic circuitry.

In one embodiment, the gain value within per-column FGA bank 643 is setin conjunction with SSADC reference ramp generator 656 to provide lessthan or equal to 0.25 electrons per digital number (DN) increment.Because the FGA bank is provided with respect to the low-signal readoutpath only, no gain-switching is required as would be the case if aprogrammable gain amplifier (PGA) were used to process both the low andhigher signal levels sent to respective S/H banks 645 and 647. Also,because the gain amplifier is a FGA and not a PGA, fewer capacitors arerequired, enabling more compact implementation than a PGA. In addition,the bandwidth, noise and power of the FGA can be reduced compared tothat of an inter-row switchable PGA. The FGA value is also chosen toreduce the input referred noise of the ADC and S/H block to a levelwhere the total sensor temporal readout noise approaches the pixelsource follower read noise.

The higher signal bank does not need to be processed by the FGA sincethe signal will be photon shot noise limited. The gain applied to thehigher signal can be provided by the ADC references and/or SSADC ramp.In alternative embodiments, the gain applied to the higher signal pathcould be effected by a separate FGA or PGA. Further, if a PGA isemployed, the PGA may be used to supply the gain required for both thelow signal and higher signal readout paths.

FIG. 34 presents an exemplary timing diagram for a row readout operationwithin the image sensor architecture of FIG. 32. As shown, the SHR andSHS1 pulses go high prior to the falling edge of the reset signal RG,(note that only the falling edge of RG is shown as the details of theprior rising edge timing may vary in different embodiments). The SHS2signal is held low until after the falling SHS1 edge, to reduce thetotal capacitance during the SHS1 sampling phase in order to improvesettling time of SHS1. Both Cmux1 and Cmux2 (i.e., column multiplexercontrol signals as shown in FIG. 3b ) are asserted to connect the columnoutput line to Cr1 (via the FGA) and Cr2. After the falling edge of RG,the SHR signal goes low, switching off the access transistors shown inFIG. 33 to store the reset signal level on capacitors Cr1 and Cr2 in thelow and high signal S/H banks respectively.

A predetermined time after SHR falls, the TG and TGnull signals arepulsed to effect feedthrough-compensated photocharge transfer from thephotodiode to the floating diffusion. In one embodiment, thepredetermined time between the SHR falling edge and TG rising edge isjust long enough to ensure that, under all conditions, the RG fallingedge is complete prior to the TG rising edge. Because the TG rising edgeand the TGnull falling edge occur substantially simultaneously or closetemporally, the TG feedthrough to the floating diffusion is completelyor nearly completely eliminated. Accordingly, the column output signalline will remain at or very close to the reset signal level as chargebegins to transfer from the photodiode, making it possible to lower SHS1very shortly after the TG rising edge and prior to the TG falling edgeas discussed above.

In the embodiment of FIG. 34, the time between the rising edge of TG andthe falling edge of SHS1 is long enough to: (i) allow photodiode-to-FDtransfer of a predetermined amount of photocharge corresponding to theupper end of a “low signal” and (ii) allow the Cs1 capacitor to charge(according to the FGA-amplified pixout line voltage) and the columnoutput line to settle for a range of pixout signal levels that extendsto a signal level that is slightly above the upper end of a low signal.For example, the predetermined amount of charge may be 50 electrons (acharge level at which photon shot noise will be considerably higher thanthe low signal path read noise), and the settling limit (i.e., timebetween rising TG edge and falling SHS1 edge) may be set for pixoutsignal that results from a charge slightly more than 50 electrons. TheCs1 capacitor can be made small to improve the setting time since theFGA will reduce the input referred noise of sample-and-hold capacitorswithin low-signal S/H bank 645. This settling time can be, for exampleand without limitation, in the 20-40 ns range, thus providing anextremely brief low-signal CDS time in the 30-50 ns range.

After the falling edge of SHS1, SHS2 signal goes high to connect thecolumn output signal to the Cs2 capacitor. At this time the FGA isdisconnected from the column output line by de-asserting signal Cmux1,(the FGA may also be powered down at this time to save power). The S/Hphase for the low signal S/H bank is complete and the ADC mux is set toconnect S/H bank 1 to the SSADCs. Accordingly, the low-signal ADCconversion process proceeds by ramping the ADC ramp voltage (alsoreferred to herein as Vramp or “the reference ramp”—the output of rampgenerator 656) over a voltage range corresponding a low-light CDS signalrange. In one embodiment, the reference ramp terminates prior toreaching the maximum signal value. As described, this ramp range andattendant FGA gain value will provide sub-electron per digitalquantization step (i.e., per DN). In one embodiment, for example, a 0.25electron per low-light signal count for low signal level is used toaccount for FPN corrections. Given a predetermined signal of 40-50electrons, 160-200 ramp steps are sufficient cover the low signal rangeconversion. Consequently, with an exemplary ramp clock period of 4 ns(i.e., 4 ns per ramp step, though faster or slower ramp clocks may beused), the conversion time for the low signal banks is achieved in0.64-0.80 μs.

The ADC conversion with respect to outputs of low-signal S/H bank 645terminates with two possible outcomes. In one case, referred to hereinas “low-signal” confirmation (or “valid low-signal ADC result” or “trip”result), the reference ramp eventually rises to a level that exceeds thelow-signal CDS level, causing comparator 661 within the SSADC captureblock to trip (i.e., output transition from one logic state to another)and thereby latch the corresponding ramp count value (i.e., ADC countgenerated by counter 654 within ADC controller) within latch or register665 of the SSADC capture block. In the other case, referred to herein asa “large-signal confirmation,” the SSADC capture comparator does nottrip, meaning that the low-signal CDS value exceeds the low-light signalrange. A single “trip” bit may be used to record the low-signaltrip/no-trip result to indicate whether the low-signal readout pathyielded a valid conversion for a given pixel column and thus either alow-signal confirmation (low-trip bit=1) or high-signal confirmation(low-trip bit=0). In general, this trip/no-trip operation isassumed/described below with respect to other readout architectures thatemploy an SSADC, though in all cases alternative circuit arrangementsmay be used to effect SSADC capture and/or confirm validity of either alow-signal or high-signal CDS output.

After the low-signal ADC ramp has completed (i.e., ramped to the maximumVramp level), the contents of the SSADC capture latches (i.e., digitalvalues and thus ADC conversion results for columns that yieldedlow-signal confirmations) are transferred into digital output buffer657. For columns in which the SSADC capture comparator has not tripped,(i.e. low-trip bit=0), a value of zero may be transferred into thedigital line buffer, or alternatively transfer into the digital linebuffer write (i.e., the “line buffer write operation”) may be inhibitedto save power.

In one embodiment, sample capture within high-signal S/H bank 647 beginssubstantially concurrently with the ADC conversion of the low signal S/Hbank (i.e., low-signal Vramp generation). Given that the high-signal S/Hbank may need to settle for a full-well signal, exemplary SHS2 pulsewidths may be, for example and without limitation, in the 0.5 us to 1.0us range. As a result, the low-signal ramp profile can be designed tofinish just prior to the SHS2 falling edge, meaning that the entirelow-signal ADC operation may be hidden under the high-signal CDS time.If a valid low-light signal is converted (i.e., low-signal confirmationas indicated by the trip/no-trip bit), the two sample and hold bankswill have stored nominally the same signal value, scaled to account forthe FGA in the low-signal readout path. By contrast, if the actual pixelsignal is larger than the upper threshold for the low-signal outputrange, the high-signal CDS output will exceed the low-signal CDS output(i.e., after accounting for the FGA)—a consequence exploited inparallel-low/high-signal conversion embodiments discussed below.

At this point ADC input mux 649 is switched to supply ADC 650 withsignals from high-signal S/H bank 647 with each such signal beingconverted for the full signal range, (e.g. 4096 counts for a linear ramp12-bit converter, or 512 counts for a VLL-encoded (nonlinear) rampprofile that effects a 3-bit compression and thus a 9-bit converter).Note that the high-signal S/H bank outputs can be converted with anaccelerated-ramp SSADC without compromising image quality. In thespecific example mentioned above with a VLL-encoded high-signal SSADCramp, the entire readout will take 712 clocks, a more than 5× reductionin conversion time compared to a 4096-clock linear ramp readout fromsingle S/H bank. Further, because the low-signal ADC conversion ishidden inside the CDS time of the high-signal readout, the effectivereadout rate increase over a same-output bit-depth conventional sensoris approximately 8×. Further, because the VLL-encoding SSADC is now muchfaster than a standard or linear ramp SSADC, the VLL SSADC may bemultiplexed to more than one column (i.e., shared by two or morecolumns, performing ADC conversions for each column in sequence) toreduce power and die-area consumption.

At the end of the ADC conversion for high-signal S/H bank 647,decision/write logic 655 transfers the latched high-signal ADCconversion result for a given column to digital output buffer 657 if thetrip bit for that column indicates lack of low-signal conversion (i.e.,no low-signal confirmation). Otherwise, if the trip bit confirms alow-signal ADC result, no high-signal ADC value is transferred so thatthe low signal digital value remains in the digital line buffer for thesubject column. In a number of embodiments, the trip bit may also bestored within the digital line buffer to indicate to post-ADC correctionlogic (e.g. logic that performs FPN correction) the low-signal orhigh-signal source of the ADC output. Alternatively (or additionally),the finalized ADC result may be scaled or otherwise modified/encoded toidentify which of the low-signal and high-signal S/H banks sourced theADC-converted CDS output for a respective pixel. Note also that, forpower reduction, high-signal ADC conversion and decision processing maybe bypassed altogether for columns in which the low-trip bit indicates avalid low-signal ADC result. Overall, the SSADC is able to encode amaximum value equal to or greater than the full-well capacity of thepixel (e.g., either linearly or as a VLL-encoded value) with, forexample and without limitation, accuracy and/or resolution to 0.25electrons per DN step to enable post-process correction of fixed patternnoise (FPN), row temporal noise (RTN), dark current, etc. The per columnFGA can also be used to sufficiently reduce the input referred noise ofalternative ADC architectures, including without limitationcolumn-shared ADC architectures such as successive-approximationregistration (SAR) ADCs, and alternate per column ADC architectures suchas cyclic or sigma-delta converters. For example, a VLL-encoding SAR ADCmay be employed to reduce die and capacitor matching requirements and/orto provide higher bit-depth conversion.

Referring again to FIG. 32, readout of digital values (i.e., ADCresults) stored within the digital output buffer 657 commences aftercompletion of the large-signal ADC conversion (i.e., after anylarge-signal confirmed ADC results have been captured within the digitaloutput buffer). In the embodiment shown, the digitized CDS results(i.e., ADC outputs or digital pixel values) may be shifted out of thedigital output buffer for transmission to a memory IC and/orimage-processing IC via a physical signaling interface (PHY) of theimage sensor. In alternative embodiments, multiple digital pixel valuesmay be output in parallel. Also, the digital line buffer may includeseparate “write-in” and “read-out” buffers (or an alternating bufferpair) to enable pixel data for a given pixel row to be output from theimage sensor concurrently with storage of pixel data for the subsequentpixel row. With respect to image reconstruction, because the same ADC isused to digitize the low-light and brighter-light CDS outputs, lesscorrection and calibration may be needed to match the output responsesof low-signal and high-signal ADC results within the signal band betweenlow-light and brighter-light signals (i.e., near the signal levelcorresponding to the predetermined charge limit for the low-signal S/Hbank).

The image sensor architecture of FIG. 32 permits a number of otherimprovements/modifications that may further improve performance. Forexample, the CDS signal range may be split into three or more regions(instead of just two), with the S/H bank count and ADC operation countbeing correspondingly increased. As another example, capacitive storageelements in both the low-signal and high-signal S/H banks can be madesmaller than in more conventional designs to further improve settlingtime and reduce circuit area. More specifically, the input-referrednoise of the S/H capacitors of the low signal bank is reduced by the FGAgain so that smaller-sized capacitors do not impose a noise penalty. Thesize of the S/H capacitors for the larger signal bank is selected sothat kTC noise will not be discernable in view of the photon shot noiseof the higher signal.

Note also, that neither of the low-signal or high-signal readout pathsin the architecture of FIG. 32 requires a gain stage for analog ISOgain, (either from a gain amplifier or via the SSADC ramp orreferences). If the low-signal ADC is designed as an accurate electroncounter, there may be little or no advantage to performing ISO gain onthe analog signal. Any inaccuracy in counting electrons with respect tohigh-signal S/H may be disregarded because the read noise is still wellbelow the photon shot noise. Consequently, analog automatic gain control(AGC) may be eliminated (or at least disabled in selected operatingmodes), thus simplifying the image sensor and host camera system.

Conditional Read Sensor with Mixed SAR and SSADC Readout Architecture

As discussed above, pixels within a conditional-read image sensors maybe selectively (conditionally) readout depending on whether integratedphotocharge has reached/exceeded a conditional-read threshold. One ofthe benefits of conditional readout in oversampled readout approachesfor high dynamic range is to reduce the data rate and power consumptiondue to oversampling, as no readout is performed for underthresholdpixels. For an oversampled conditional-read sensor, much of the powersaving is achieved by power-down of the analog CDS readout and ADCconversion circuits once the valid pixels have been readout andconverted. A sub-electron read noise is generally desired for thethreshold detection and low light signal value readout. In general, theSSADC is good for low readout noise, but has less benefit for powerreduction when a below-threshold decision is made.

FIG. 35 illustrates an embodiment of an image sensor 690 having both aper-column SSADC (formed by controller 651 and capture blocks 653) and abank of column-shared SAR ADCs 695 and thus that provides bothsub-electron read noise and low power for oversampled conditionalreadouts. With this sensor readout architecture, the per col SSADC isused to provide low power, low noise readout for threshold assessmentand for readout of the low signal values. Bifurcated low-signal andhigh-signal readout paths are provided as generally discussed inreference to FIG. 32 (i.e., FGA and S/H bank 645 in low-signal readoutpath, and S/H bank 647 in high-signal readout path), with the low-signalS/H bank 645 storing both the reset and signal level for the thresholdassessment and for the low-light signal level for above-thresholdpixels. A SAR input multiplexer bank is provided in the high-signalreadout path (to receive analog CDS values from S/H bank 647) to delivera sequence of N analog CDS values (one for each of N columns of pixelarray 631) to a corresponding column-shared SAR ADC 695. Theper-N-column SAR ADC (successive approximation readout ADC) 695converts/digitizes each of N incoming high-signal analog CDS values, oneafter another within the time interval allotted to the SSADC conversionof the low-signal CDS values across the pixel array, thus parallelizingthe low-signal and high-signal ADC operations. Low ADC noise is notcritical with respect to the photon-shot-noise-dominated high signal, soa higher-noise SAR ADC is acceptable. Each of the per-N-column SAR ADCscan be completely powered down after the valid pixels in the N-columnblock have been converted. Note also that the ramp comparator withinper-column SSADC capture circuit 653 may serve as the per-column senseamp/comparator for conditional-read overthreshold detection. Also,readout controller 691 and digital output logic/buffer 697 operate asgenerally described above in reference to FIG. 32, with modification tocontrol time-multiplexed operations within SAR ADCs 695 (includingsequencing of the SAR input multiplexers 692) and to support selectivetransfer into digital output logic/buffer from either SSADC or SAR ADCaccording to the SSADC result and/or analog CDS results. Additionally, asecond sample and hold bank and attendant set of SHR and SHS controlsignals can be added in the embodiment of FIG. 35 to enable pipelinedstorage and readout of the high-signal values. The high-signal readoutcan then have pipelined storage of values for a given pixel row withinthe first sample and hold bank while the SAR ADC is converting signalvalues from a different pixel row that was previously stored in thesecond sample and hold bank.

Direct-Conversion Readout Architectures

In a number of embodiments described below, analog sample-and-holdcircuitry is omitted for either low-signal readout path, the high-signalreadout path or both, with the pixout signal instead being delivered to(and thus digitized by) the analog-to digital converter directly—anarchitecture and operation referred to herein as direct conversion. Saidanother way, the in-pixel signal driving element (e.g., source-followertransistor in the single-mode and dual-mode pixel architecturesdiscussed above) drives the analog pixout signal to the input of theanalog-to-digital converter for digitization, instead of asample-and-hold element in which a sample of the pixout signal isstored. Direct conversion provides a number of advantages andchallenges. For example, elimination of the sample-and-hold capacitorand access transistor saves die area, and simultaneously reduces KTCnoise and pixout settling time (i.e., by removing a switch element andcapacitive load from the signal output path). By contrast, the ADCconversion interval may exceed the sample-capture time of asample-and-hold element and thus present noise rejection challenges.These and other considerations are accounted for in various differentdirect conversion architectures, a number of which may have advantagesspecific to particular applications.

Dual Direct Conversion and Single Direct Conversion

The bifurcated readout path techniques and architectures discussed aboveprovide a number of direct conversion options. For example, both thelow-signal and high-signal readout paths may be directly converted in anarchitecture/technique referred to herein as “dual direct conversion,”or only one of those readout paths may be directly converted (“singledirect conversion”), with the other subject to sample-and-hold prior toconversion—a hybrid combination of direct conversion and sample/holdconversion. Both the dual direct and single direct conversionarchitectures are described below in various embodiments which employ asingle-slope ADC (SSADC). In all cases, other types of ADC circuits maybe used (e.g., SAR, sigma-delta, etc.).

Single and dual direct conversion architectures and features thereofcontemplated for use within image sensor embodiments herein include, forexample and without limitation:

-   -   Digital CDS: separate ADC conversion of the reset-state and        signal-state of a given pixel, with final CDS value generated by        differencing (subtracting) in the digital domain;    -   Analog CDS: CDS differencing done in the analog domain prior to        ADC conversion;    -   Gain amplifier included in low signal readout path, the high        signal readout path or both, with options including:    -   bypassing/disabling/omitting gain amplifier if        post-source-follower noise is low enough to meet desired total        read noise target;    -   bypassing/disabling/omitting gain amplifier if SSADC ramp        sufficient to provide desired readout gain;    -   fixed gain amplifier (FGA) in the low signal readout path, no        gain amplifier in high signal readout path;    -   programmable gain amplifier (PGA) in the low signal readout        path, no gain amplifier in high signal readout path; and    -   PGA in both the low signal and high signal readout paths and        switched between respective amplification levels for low signal        and high signal readouts;    -   TG-asserted direct conversion and/or sample-and-hold:        digitization or sampling is completed (or at least commenced)        prior to TG falling edge,    -   Post-TG direct conversion and/or sample-and-hold: digitization        or sampling is commenced after TG falling edge;    -   Dynamically adjusted readout bandwidth: switching between low        and high readout bandwidths (e.g., by switching the readout        current source between high and low current levels) for the        low-signal and high-signal readouts, respectively, thus        achieving reduced noise in the low-signal readout, while        providing faster settling for the high-signal readout;    -   Low-signal SSADC ramp time compression: non-uniform ramp step        time (progressively shortening) for the low signal readout to        reduce direct conversion time and thus shorten CDS time in        proportion to signal level; and    -   High-signal SSADC ramp time/step reduction: non-uniform ramp        step size to reduce number of clocks/ramp-steps required to span        high-signal range.

Timing diagrams shown in the following sections are based on single-mode4-transistor (4T) pixel, though dual-mode 4T pixels and other pixelarchitectures may also be used.

Dual Direct Conversion Architectures:

In addition to the various options discussed above, dual-directconversion architectures may have separate low-signal and high-signalADCs, or ADC components, or may share an ADC. Embodiments of thesevariations are described below in the context of SSADC implementations.As discussed, other types of ADCs may be used in alternativeembodiments.

Dual Direct Drive with Separate Low-Signal/High-Signal SSADCs

FIG. 36 illustrates an embodiment of a dual direct conversion imagesensor 705 having separate (respective) ADCs for bifurcated low-signaland high-signal readout paths. As shown, image sensor 705 includes,together with readout circuitry 707 containing low-signal andhigh-signal ADCs 710-L and 710-H, a pixel array 631, row decoder/driver635 and readout controller 711, all of which may be implemented/operatedwith the various options discussed above. Also, both the low-signal andhigh-signal ADCs are implemented by single-slope ADCs (SSADCs) in theexample shown, with the low-signal SSADC 710-L being formed by acolumn-shared low-signal (LS) SSADC controller 651-L (having a counterand ramp generator) and per-column LS ADC capture blocks 653-L, whichoperate as discussed in reference to FIG. 32 above. The high-signal (HS)SSADC is similarly formed by column-shared HS SSADC controller 651-H andper-column HS ADC capture blocks 653-H. Successive approximation readout(SAR) ADCs, sigma-delta ADCs or any other practicable ADC structures maybe used in place of either or both of the SSADCs in alternativeembodiments. Readout circuitry 707 also includes digital outputlogic/buffer 714 which generally performs the functions of both thedigital decision and write logic and write buffer described in referenceto FIG. 32.

Still referring to FIG. 36, the separate low-signal and high-signal ADCarrangement tends to be particularly effective in applications thatrequire fast row-readout times (i.e., when row time is a criticalfactor) as the dedicated ADC per readout path enables the differentSSADC voltage ramps that may be required for high and low signal readoutto be generated concurrently (i.e., at least partly overlapping in time)instead of sequentially. In a number of embodiments, for example, thelow signal readout ramp is designed to provide a higher gain than thehigh signal readout ramp so that, without separate ADC ramp generatorsand SSADC capture circuits, more time consuming serial ramp generationwould be needed.

FIG. 37 illustrates more detailed embodiments of low-signal ADC captureand high-signal ADC capture circuits that may be used to implement thelow-signal and high-signal capture blocks 653-L and 653-H in FIG. 36. Asshown, each ADC capture circuit includes an auto-zeroing comparatorhaving a first input capacitively coupled (i.e., via C1 and C2,respectively) to the pixout line and a second input coupled to receive arespective one of the ramp voltages (i.e., Vramp_low, Vramp_hi)generated by the low-signal SSADC controller and high-signal SSADCcontroller.

Still referring to FIG. 37, which includes a simplified model of thepixout generation (i.e., row-select and other elements of a pixel areomitted for simplicity), a source-follower load-bias transistor 725 isbiased to effect a source-follower operation within the pixelsource-follower transistor (“Pixel SF”). That is, Vbias is set toestablish, during a given readout operation, a constant load biascurrent flowing through the source follower transistor and load-biastransistor from Vdd-pix to ground (or Vss). This constant load currentcauses the voltage on pixout line to follow the voltage (VFD) onfloating diffusion node (FD) by virtue of the relationship between theconstant current through the source-follower transistor and itsgate-to-source voltage. That is, source-terminal voltage (Vs) of thesource-follower transistor follows (i.e., rises and falls with) the gatevoltage as needed to maintain the constant load-bias current and thus, ahigher or lower FD voltage will yield a correspondingly higher or lowerpixout voltage.

As FIG. 37 shows, the pixout line is capacitively coupled (i.e., viacapacitive elements C1 and C2) to the inputs of the comparators 727-Land 727-H within the low-signal and high-signal ADC capture blocks 653-Land 653-H, respectively (note that latch and trip bit storage elementsof the capture blocks are not shown in FIG. 37). This arrangementenables each comparator to be “zeroed” or auto-zeroed at the FDreset-state level and thus effects a correlated double-sample of thereset-state and signal state of the FD. More specifically, as shown inthe exemplary timing diagram of FIG. 38, after the floating diffusionnode (FD) has been reset and thus readied for photocharge transfer(i.e., after RG falls), the reset-state of the floating diffusion nodeis driven onto the pixout line (i.e., by virtue of a row select signalwhich enables a selected pixel within the pixel column to drive thatshared column line). Referring first to the low-signal ADC capture block653-L (both capture blocks operate identically in the embodiment shown,though the low- and high-signal voltage ramps may be different), becausethe capacitive coupling formed by C1 isolates (and thus floats) thesignal input to comparator 727-L, that floating input rises to apotential corresponding to the reset-state signal on the pixout line.Consequently, when auto-zeroed by switchably coupling the comparatoroutput node to the comparator signal input and then decoupling thecomparator output from the signal input (i.e., illustrated conceptuallyby “az” switch), the signal input is driven to a starting level thataccounts for the reset-state potential on the pixout line. Shortly afterthe auto-zero event, which effectively establishes a reset-state offsetat the comparator's signal input, TG is raised to enable photochargetransfer from the photodiode to floating diffusion, thereby drivingpixout according to the floating diffusion signal-state. As shown,feedthrough compensation (illustrated generically by “TGN_(ULL)”, whichmay include any one or combination of the various feedthroughcompensation signals/techniques described above) is provided to cancel(or negate, mitigate or otherwise compensate for) TG feedthrough sothat, at least in the case of a low-signal, the pixout line will quicklysettle to the signal-state potential. Accordingly, the signal input ofthe comparator will transition according to the FD signal-state (asconveyed on pixout), offset by the autozero operation to reflect theprior reset-state potential—in effect presenting a reset-state-adjustedsignal-state level at the comparator input and thus a correlated doublesample of the FD reset-state and signal-state. While pixout is activelydriven by the source follower signal (i.e., to establish the CDS signallevel at the comparator input), the ramp input to the low-signalcomparator is ramped through the low-signal voltage range as shown bythe “Vramp_low” waveform, thus triggering a comparator trip at a rampvoltage point corresponding to the CDS signal level at the comparatorinput if the CDS signal level does in fact fall within the low signalrange. Accordingly, as FIG. 38 shows, CDS time is proportional to signalamplitude (i.e., trip point may occur anywhere along low-signal andhigh-signal ramp) and commences with the falling edge of the autozeropulse (az). Note that trip bit and DN capture circuitry is not shownwithin the low-signal and high-signal ADC capture blocks in FIG. 37, butmay generally operate as discussed above in reference to FIG. 32.

Still referring to FIGS. 37 and 38, because separate SSADC controllersand capture blocks are provided for the low-signal and high-signalreadout paths, the high-signal ADC operation may be performed inparallel with the low-signal ADC operation, a circumstance illustratedby the parallel commencement of the high-signal and low-signal ramps inFIG. 38. Because the pixout settling time will generally be longer for alarger (brighter-light) signal and the large-signal range may generallyspan a wider voltage range, the high-signal ramp voltage may proceed ata different ramp rate and span a broader voltage range than thelow-signal voltage ramp and thus continue after the low-signal ramp hasconcluded. Note also that positive voltage ramps are shown for purposesof explanation only. Without inversion in the read signal path, readoutsignal polarity will be negative (i.e., more negative to indicate morephotocharge) so that the voltage ramps may also have a negativepolarity, monotonically decreasing from a higher starting voltage to alower ending voltage.

In the embodiment of FIG. 38, Vramp_low is ramped as rapidly as possiblewith the desired voltage step size in order to achieve a short CDS time.Vramp_low ends at voltage level that is designed to cover the low signalswing only (i.e., anticipated range of a low signal). Additionally, whendesigning for a below-single-electron read noise system, it may bedesirable to quantize the low signal readout to less than 1 electron perdata number (DN) increment. For example, a quantization of 0.25electrons per DN step is implemented in a number of embodiments to yielda ramp step less than a single-electron signal produced at the SFoutput. Larger or smaller quantization steps may be applied in otherembodiments. Conversion time will vary according to the amplitude of thelow signal—that is, a valid conversion will occur sooner for alower-amplitude signal and later for a larger-amplitude signal so thatthe CDS time and attendant noise reduction factor is a function ofsignal level. Next, after a desired amount of time to allow for a largersignal to transfer and settle, Vramp_hi begins for the high signalreadout (i.e., despite the simultaneity shown, large-signal rampcommencement may occur later than low-signal ramp commencement).Vramp_hi ramps at a desired rate and count for the targeted row time andgain, and ends at a voltage level that is designed to cover thefull-well signal of the pixel. TG then goes low to conclude the rowreadout.

Returning briefly to the embodiment of FIG. 37, it can be seen that nogain amplifier is disposed within either of the low-signal orhigh-signal readout paths. This may be acceptable in cases where thelow-signal and high-signal ADCs yield the desired gain (i.e., in termsof step per photocharge carrier). In other embodiments, some of whichare discussed below, separate or shared fixed-gain or programmable-gainamplifiers can be added to the low-signal readout path and/orhigh-signal readout path.

FIG. 39 illustrates an alternative embodiment of a dual directconversion image sensor 740 implemented generally as shown in FIG. 36,except that the ADC circuitry 743 includes only one SSADC controller 651(i.e., a single ramp generator and a single step count generator), withseparate low-signal and high-signal capture blocks 653-L and 653-H.Readout controller 741 and digital output logic/buffer 745 are modifiedto reflect the alternative ADC configuration—a configuration thatreduces die-area consumption and power consumption at the cost ofsomewhat increased row time (i.e., as sequential rather parallel ADCramps are generated for the low-signal and high-signal ranges).

As can be seen in the exemplary low-signal and high-signal capture blockembodiments 653-L/653-H shown in FIG. 40 (and in which DN latch andtrip-bit storage are not specifically shown), capture block comparators727-L and 727-H are capacitively coupled to the pixout line (i.e., viaC1 and C2, respectively) and thus enable auto-zero-based CDS conversionas discussed above in reference to FIGS. 36-38. FIG. 41 illustrates anexemplary high-level timing diagram corresponding to operation withinADC capture blocks 653-L and 653-H of image sensor 740. As shown, bothcapture-block comparators auto-zero during reset of the pixel (i.e.,while RG is high). After RG goes low, TG is switched on (enablingphotocharge transfer from photodiode to floating diffusion) and Vrampstarts for low signal path after a brief, predetermined time intervallong enough for a signal within the low-signal range to settle on thefloating diffusion node and pixout line. In a number of embodiments,Vramp is ramped as rapidly as possible to achieve a short CDS time, butwithout compromising the desired voltage step size. As shown, Vramp forthe low-signal range ends at a predetermined voltage level (i.e.,yielding a ramp profile designed to cover the low-signal range) and isthen restored to a starting point in preparation for a high-signal ramp.A valid low-signal conversion may occur at any point along the voltageramp, depending on the low-signal readout level, and thus will occursooner (and yield a correspondingly shorter CDS time) as signal level(and thus luminance) drops. Thus, CDS time and attendant noise rejectionis a function of signal level and thus integrated photocharge.

Still referring to FIG. 41, after a predetermined time designed toensure full-well large-signal settling prior to high-signal ADC capture,Vramp starts again for the high signal readout. Note that, though notspecifically shown, the high-signal Vramp may start above the “zero”level to avoid re-spanning the low-signal range and thus reduce thenumber of high-signal ramp steps. For example, in a number ofembodiments (including those for other ADC arrangements), thehigh-signal Vramp begins at a level just below the upper level of thelow-signal Vramp (i.e., to avoid any gaps in the overall span of the tworamp ranges). In any case, Vramp proceeds at a predetermined orprogrammable rate and count for the targeted row time and gain. Asdiscussed below, the duration and amplitude of voltage steps may varyacross the low-signal ramp range, high-signal ramp range or both (e.g.,progressively shorter and/or larger voltage steps, including piecewiselinear and/or curve-fit profiles). As in the embodiment of FIG. 36, aseparate fixed or programmable gain amplifier can be added to thelow-signal or high-signal readout paths, and the low-signal readout maybe quantized to less than 1 electron per DN step (e.g., 0.25 electronsper DN step).

Dual Readout Path Valid Signal Determination and Selection:

In general, for the dual ADC embodiment of FIG. 36 and otherarchitectures where the low and high signal conversions occur inparallel, it is not necessary to complete both analog-to-digitalconversions per pixel readout operation. For example, if a valid digitalconversion is obtained via the low-signal readout path before thehigh-signal conversion is complete, the analog-to-digital conversionoperation for the high signal readout can be aborted (i.e., stoppedprior to completion). Similarly, for the shared-ADC-controllerembodiment of FIG. 39 and other architectures that execute the low andhigh signal conversions serially (i.e., one after the other), the highsignal conversion can be skipped/omitted altogether (i.e., inhibitedfrom initiating) or aborted at an early stage of the conversionoperation. Techniques for signaling or determining that high-signalconversion can or should be aborted/inhibited and/or effecting theabort/inhibit include for example and without limitation:

-   -   Recording the status/result of the low signal readout in a per        column latch (i.e., trip bit storage as discussed above).    -   Writing a known value to the ADC output latch signifying that        the high-signal conversion should be aborted or skipped (e.g.,        encoding the trip bit value within the ADC output value).    -   Explicitly and selectively enabling the high signal conversion        process to start (e.g., high-signal-conversion start signal is        conditionally asserted)    -   Inferring that high-signal conversion should be aborted or        skipped based on contents of the ADC output latch (e.g., knowing        that a DN value less than a specified value must have come from        the low signal readout, high-signal conversion may be        selectively enabled/disabled according to whether the DN value        resulting from low-signal conversion is within or outside,        respectively, a predetermined or programmed range of DN values)

As explained above, analog-to-digital (A/D) conversion of the low-signalreadout path terminates in a number of embodiments, with two possibleoutcomes: (i) a successful conversion in which the comparator trips andlatches the attendant counter value as the conversion result, or (ii) noconversion—the comparator does not trip and no conversion result iscaptured. As discussed above, a single trip bit can be used to recordthe trip/no-trip result to indicate whether the low signal path had avalid conversion for a given pixel column. This bit can be used tocontrol (i.e., enable or disable) the conversion process for the highsignal readout. For example the high signal conversion process can beaborted or inhibited according to the state of the trip/no-trip bitresulting from the low-signal conversion, thus saving power andabbreviating the overall readout operation. After the low signal path isconverted, the latched counter values are transferred into the digitalline buffer from the SSADC latches. If the comparator has not tripped,(i.e. a non-valid conversion result), a value of zero is transferredinto the digital line buffer, or alternately the write is inhibited tosave power.

In the no-conversion case, where the comparator has not tripped, thehigh signal conversion process either continues or is initiated/enabled.At the end of the A/D conversion for the high signal readout, using thedigital decision and write logic block (i.e., logic within the digitaloutput logic/buffer components of the image sensors shown in FIGS. 36and 39 and other embodiments described below), the latched count valuein the A/D converter is transferred and stored in the digital linebuffer. The same valid conversion bit for the low signal conversions maybe used to indicate to the post ADC correction logic (e.g. FPNcorrection) which readout path sourced the digital data (i.e.,low-signal conversion or high-signal conversion). Other techniques canalso be employed to identify which readout path was used to generate thedigital conversion data for a respective pixel, and, if necessary ordesirable, scale the digital conversion data (e.g., to account forapplied gain).

In one embodiment, readout of the digital values from the digital outputlogic/buffer (also referred to herein as the “line buffer”) initiatesafter A/D conversion of the second S/H bank is complete and theappropriate values are written into the digital line buffer. Inembodiments in which both the low-signal and high-signal conversions areperformed sequentially by a shared ADC, less correction and calibrationmay be required to match the output responses of the low-signal andhigh-signal readout paths for CDS results that fall within the signalband between the low-signal and high-signal output ranges (i.e., nearthe signal level corresponding to the upper photocharge threshold forthe low-signal readout path).

In a number of embodiments, including those shown in FIGS. 36 and 39,the image sensor will output, from digital output logic/buffer, onedigital value per pixel that will be properly scaled and transmittedaccording to which of the low-signal and high-signal readout pathssourced the finalized data (and optionally including information thatindicates the source readout path). For example a finalized digital CDSvalue sourced by a low-signal readout path that provides a higher-gainreadout than the high-signal readout path, that digital value (DN) maybe scaled for consistency with (e.g., to yield uniform gain with)high-signal readout path results. Column FPN correction values can alsobe collected and applied appropriately given knowledge of which readoutthe valid data was obtained from.

FIG. 42 illustrates another embodiment of a dual direct conversion imagesensor 760, in this case having low-signal/high-signal bifurcatedreadout path circuitry 762 with a shared SSADC 653 as in FIG. 32 (i.e.,“completely shared” SSADC with a single SSADC controller 651 and bank ofper-column capture blocks 653) and also a source-follower (SF) biasmultiplexer bank 765 that enables different load bias currents to beapplied to the per-column pixout lines during low-signal and high-signalreadout. Image sensor 760 also includes a readout controller 761, rowdecoder/driver 635, and pixel array 631 that may be implemented with thevarious options presented above, and in which readout controller 761 isdesigned to issue a high/low bias-select signal (“H/L Sel”) to SF biasmultiplexer bank 765. In addition to the SF bias multiplexer bank andSSADC circuitry 650, readout circuitry 762 includes digital outputlogic/buffer 766, which generally performs the functions ofdecision/write logic 655 and digital output buffer 657 shown in FIG. 32.

Continuing with FIG. 42, source-follower bias multiplexer bank 765enables selection of different load-bias points and thus differentreadout bandwidths during low-signal and high-signal readout. FIG. 43illustrates an embodiment of a per-column bias multiplexer 770 that maybe implemented within the bias multiplexer bank of FIG. 42 in connectionwith a shared low-signal/high-signal ADC capture block 653 (“LS/HS ADCCapture”). In the implementation shown, bias multiplexer includes abias-voltage multiplexer 771 (or other selection element) that selectsbetween high and low load bias voltages (“vbh” and “vbl”), applying oneor the other to load-bias transistor 725 (i.e., as “Vbias”) inaccordance with a high/low bandwidth select signal (H/L Sel) fromreadout controller 761. By this arrangement, a relatively high currentor a relatively low current may be selectively established on the pixoutline (i.e., “high” or “low” source follower current according to thebandwidth select signal), thus effecting selection between relativelyfast-settling (high-bandwidth), higher-noise pixout signal generationand relatively slow-settling (low-bandwidth), lower-noise pixout signalgeneration. Comparator 661, capacitive coupling through C1 and auto-zeroswitch element (i.e., responsive to auto-zero signal, “az”) operategenerally as discussed above. As further explained below, the high/lowbandwidth selection may be leveraged in the embodiment of FIG. 42 andothers to yield low-noise, low-bandwidth pixout readout in combinationwith linear or nonlinear low-signal readout voltage ramp (note thatanalog gain may be implemented in whole or part via the SSADC voltageramp), with pixout conversion occurring before or after the falling edgeof the TG pulse.

Low Bandwidth (BW) for Low Signal Readout Path:

As discussed, capturing (or converting) a CDS value for the low-signalreadout path prior to the falling edge of TG may enable a very brief CDStime (i.e., by not requiring the elapsed time of a full TGpulse—especially for large arrays where the rise and fall time of TGpulses are longer). The residual TG feedthrough, however, will morelikely be a FPN component in the low signal readout path as discussed,for example, with respect to FIGS. 31A and 31B.

The selectable load-bias image sensor of FIG. 42 enables alternativereadout strategies in which post-TG-pulse (i.e., after TG falling edge)CDS capture or direct CDS conversion are executed in both or either ofthe low-signal and high-signal readout paths, while retaining brief(low-noise) low-signal CDS times. FIGS. 44 and 45 illustrate anexemplary timing diagram and flow diagram for such a switched-biasreadout approach that leverages the image sensor and bias multiplexerembodiments shown in FIGS. 42 and 43.

Starting with FIG. 44, the low signal path CDS and ADC conversion beginsafter the falling edge of a first TG pulse. The length of this TG pulseis designed to transfer, from photodiode to floating diffusion node, anyamount of photocharge up to a predetermined maximum level of thelow-signal range. After completion of the first TG pulse, low-signalconversion starts and completes. During this time the Vbias voltage isset to the relatively low level, “vbl,” so that the source follower (SF)current (or bias current or load-bias current) is set to a desired lowervalue. After completion of the low-signal conversion, TG is pulsed asecond, potentially longer time to enable any accumulated photochargeabove the predetermined maximum for the low-signal range to betransferred to the floating diffusion node. At substantially the sametime, Vbias is raised to “vbh” (i.e., by transitioning multiplexercontrol signal, H/L Sel) to raise the bandwidth of the source-followeroutput and thus enable more rapid pixout settling for any high-signallevel that may be present on the floating diffusion node. After apredetermined high-signal settling time delay, Vramp is sequencedthrough the high-signal range to complete a high-signal A/D conversion.In the embodiment of FIG. 44, Vbias goes low a predetermined time beforethe high-signal Vramp commences to avoid a DC offset between thelow-signal and high-signal outputs.

Reflecting on FIGS. 42-44, reasons for/benefits of modulating the sourcefollower bias current (i.e., raising and lowering Vbias at differenttimes within a pixel readout) include, without limitation:

-   -   For a conventionally designed sensor with bandwidth designed to        readout full signals at reasonable speeds, a CDS time of 50        ns-100 ns may be required to get substantial noise reduction.    -   100 ns CDS time is difficult to achieve with the requirement to        convert the signal given a full TG pulse width to transfer        signal charge.    -   Because noise is reduced by narrowing the CDS bandpass and the        bandpass width is itself a function of ω_(c)*ΔT (i.e., product        of source follower corner frequency and CDS time), a        sufficiently small ω_(c)*ΔT, (i.e. less than 2 tau) may be        achieved by having a lower bandwidth (ω_(c)) readout for a        conventional TG pulse width and attendant CDS time.    -   Reducing bandwidth of the low signal readout path will limit the        signal swing for any given readout time, but that is Ok since we        are reading out a very small signal, (10e-20e, stopping where        the signal is photon shot noise limited).    -   Low-signal readout bandwidth may be reduced in various different        ways including, for example and without limitation, reducing        source-follower bias current, increasing pixout capacitance        (e.g., switchably/dynamically coupling a capacitive element to        pixout to reduce readout bandwidth), or a combination of both.    -   With this approach, source-follower current may be reduced to        0.5 uA and a tau of 0.69 may be obtained (70% 1/f noise        reduction) for a CDS time of 133 ns, (instead of 30 ns if the SF        bias current were 10 uA).    -   This also enables design of a lower bandwidth FGA if one is        needed, (this is discussed in a later section), which further        provides lower power and lower noise.    -   One can increase the current for subsequent SSADC clocks in the        readout of progressively higher signals for the low-signal        readout phase so that the low signal readout does not add too        much row time.

FIG. 45 illustrates an exemplary readout operation with respect to thearchitecture shown in FIGS. 42 and 43 and timing diagram of FIG. 44(note that the timing diagram of FIG. 44 is a high level diagramillustrating the timing and operation and is not a detailed to-scaletiming diagram and also that bandwidth switching may be achieved usingvarious techniques other than or in combination with the source-followerbias current approach shown). Starting at 781, the SF bias current isset to a first desired high value, providing a higher readout bandwidth(i.e., faster pixout settling). The pixel is reset at 782 (i.e., RGpulse applied) and then, a predetermined time after the falling edge ofRG, the SF bias current is set to the lower value at 783, establishing alower, less noise-responsive readout circuit bandwidth in preparationfor low-signal readout. In the direct conversion embodiments of FIGS. 42and 43, the auto-zero signal, az, may be raised concurrently with RGassertion, but in any case goes low at 784 (shortly after the falling RGedge) to autozero the SSADC comparator and thus enable direct CDSconversion. Note also that the falling edge of RG can optionally becompensated to reduce feedthrough and improve settling time.

Continuing with FIG. 45, after the auto-zero signal goes low, TG andTGnull signals are pulsed with opposite polarity at 785 to effectfeedthrough-compensated transfer charge from the photodiode to thefloating diffusion node. In the embodiment shown, the length of thisinitial, “short” TG pulse is designed to enable transfer of apredetermined amount photocharge just above the maximum photochargelevel for the signal range allocated to the low signal path, butsignificantly less than a full-well level of photocharge. Aftercompletion of the first TG pulse conversion of the low signal starts andcompletes as shown at 786 and by the low-signal Vramp profile in FIG.44. During this time the Vbias remains at a low value.

The SSADC low-signal ramp may be a linear or non-linear ramp designed ineither case to span a predetermined low-signal range. An implementationof one of many possible non-linear low-signal voltage ramps is shown inFIG. 46, which illustrates an exemplary plot showing ramp voltage stepsvs. time, with the time axis being marked in units of τ (i.e., theproduct of CDS time and source-follower corner frequency, ωc). Forexample, if ω_(c) is 10 MHz, then a CDS time of 100 ns corresponds to aduration of 1.0 τ on the x-axis.

The exemplary ramp shown in FIG. 46 is an accelerated ramp that startsat a ramp rate or ramp step time that is slower than a conventional rampat the start and becomes progressively faster (i.e., progressivelyshorter time between successive voltage steps). This permits, forexample, the shortest possible CDS time (or at least a progressivelyshortened time) at each signal level. The CDS time is the time fromfalling edge of SHR to the valid conversion of signal, wherever that mayoccur (if at all) along the low-signal ramp range.

The settling time for one electron (“1e”) of signal is less than thatfor two electrons, which is less than three, etc. By designing a rampthat follows the settling time of the signal, (i.e. the ramp reaches thedesired specified target signal level just after the signal line cansettle to that value), a CDS time proportional to signal level may beachieved that has the nominally shortest CDS time for each signal level,(i.e. there is no delay to wait for start of the ramp due to settling ofa 20e⁻ signal). Assuming, for example, that the conversion gain fromfloating diffusion node to source-follower output is 100 μV/e⁻, thenominal pixout settling time for a 1e⁻ FD charge level and thus a 100 μVpixout signal is 0.693τ. The nominal settling time for a 2e⁻ FD chargelevel (i.e. 200 μV output signal) is 1.386τ, the nominal setting timefor a 3e⁻ FD charge level (300 μV output signal) is 1.791τ, the nominalsettling time for a 4e⁻ FD charge level (400 μV output signal) is2.079τ, and so forth.

In embodiments or operating modes in which sub-electron quantization isdesired, the low-signal readout ramp step can be set to sub-100 μVincrements. For example, the four 25 μV steps at 801, a ramp resolutionwhich could be implemented across the entire low-signal range or in anyportion thereof, could be implemented instead of the single 100 μV stepto provide an approximate quantization of 0.25e⁻/DN.

As mentioned above, if the SSADC comparator trips during the low-signalreadout for a particular column (affirmative result in decision 787),ADC conversion of that pixel column is deemed complete and high-signalreadout path conversion for that pixel column is unnecessary (and thusmay be skipped). If the comparator does not trip during the low signalconversion attempt (negative decision at 787), the counter and rampgenerator are paused (held) as shown at 788, the SF bias current isswitched to a high value at 789 (i.e., shifting the DC value of thepixel output signal towards ground and away from Vdd and thus in adirection away from the ramp value so the comparator will not tripduring the bias change) and, at approximately the same time as the biascurrent change, TG and TGnull are pulsed a second time at 790, withpulse-widths long enough to transfer a full-well photocharge from thephotodiode to floating diffusion node. At the high source-follower biaslevel, the column output line will settle more quickly to the signalvalue, thereby avoiding extended settling time that may otherwise berequired for the high-signal photocharge range. After delaying at 791for a time sufficient for pixout settling follow a photocharge transferin an amount up to the photodiode full-well level (and for settling withrespect to any residual feedthrough, which will be small compared to thesignal level), the SF bias current is switched back to thelow-bandwidth, low-noise setting at 792, thus restoring the high signalDC level to a point where the conversion is valid with respect to thelow SF bias reset level. A predetermined time after switching back tothe low source-follower bias, the ramp and counter are restarted at 793and ADC conversion of the high signal readout proceeds to completion,thus finishing A/D conversion of the pixel output. Note that the rampfor the high-signal conversion may start at a point just below the rangeof the low signal readout to avoid redundant ramp steps or,alternatively, may simply start at “zero.” As with the low-signalvoltage ramp, the ADC ramp for the high signal conversion may be linearor non-linear in either step duration or step size (voltage per step) atall or any part of the large-signal ramp range. Also, the large-signalADC ramp may also start sooner than shown in FIG. 44 and follow thesignal settling as described for the low-signal readout. Further, asingle TG pulse may be generated instead of the two shown in FIG. 44 if,for example, a full-well charge can be transferred in a TG pulse widththat is consistent with achieving the desired short CDS time for the lowsignal readout.

Digital CDS

FIGS. 47A and 47B illustrate an alternative SSADC capture block 804 andoperational sequence that may be employed within the image sensor ofFIG. 42. As shown, SSADC capture block is identical to the capture blockshown in FIG. 43, except that digital CDS is performed. FIG. 47Billustrates an exemplary operational sequence at 809-823 that may beemployed to effect a digital CDS readout using the SSADC captureblock—an operational sequence similar to that of FIG. 45 (i.e., ananalog CDS sequence) with modification for comparator reset andanalog-to-digital conversion of the floating diffusion reset-state.

A number of exemplary embodiments discussed above achieve a desiredlow-signal readout gain through design of the low-signal SSADC ramp(i.e., yielding a desired step/photocharge resolution). FIG. 48illustrates an alternative image sensor embodiment 830 in which afixed-gain amplifier (FGA) bank 833 is provided within readout circuitry831 to implement a pixout signal gain uniformly in the low-signal andhigh-signal readout paths. Any additional gain required or desired inthe low-signal readout path may be provided by the low-signal SSADCramp. The fixed gain value is generally set (e.g., through design,calibration and/or programming) to avoid saturating the high-signalreadout at full-well and to provide a desired resolution in thelow-signal readout (e.g., at or below 0.25e⁻ per DN increment). The FGAvalue is also chosen to reduce input-referred noise of ADC circuitry 650and other analog circuits in the readout path after the pixel sourcefollower to a level where the total sensor temporal readout noiseapproaches the pixel source follower read noise. In alternativeembodiments, a programmable gain amplifier (PGA) could be used to supplythe gain required for both the low signal and higher signal readoutpaths, being switched between gain levels accordingly. The image sensorembodiments disclosed herein may, for example, be configurable foreither bifurcated low-signal/high-signal readout or for a moreconventional single-path readout mode (i.e., no oversampled FD within agiven pixel readout operation). In such embodiments, a PGA may beprovided to enable the single-path readout mode, so that, leveragingthat same PGA to effect different low-signal/high-signal readout pathgains in the bifurcated readout mode would consume little or noadditional die area. Remaining circuit blocks within image sensor 830are implemented generally as discussed above, with readout controller832 modified to generate or output fixed or programmable gain amplifiercontrol signals (e.g., bias, reset, etc.)

FIG. 49 illustrates an embodiment of a per-column FGA 841 that may beused to implement FGA bank 833 and its interconnection between a biasmultiplexer 770 and SSADC capture block 653, both of which may beimplemented generally as described above. The FGA is a switchedcapacitor amplifier. The fixed voltage gain is A and is determined bythe ratio of the input capacitor Cin1 and the feedback capacitor Cin1/A.The rst switch is used for putting the FGA into an initial state aftercompletion of a sample measurement to start the next sample measurement.Vclmp is reference voltage to control the bias point of the fixed gainamplifier and serve as a reference for the differential measurement. VLLRamp for High Signal Conversion:

Although high-signal A/D conversion has generally been described interms of linear-ramp SSADC (e.g. 4096 counts and corresponding uniformramp voltage steps for a linear ramp 12 bit converter), avirtually-lossless lookup (VLL) ramp having nonlinear voltage stepincreases across at least part of the ramp range may be employed inalternative embodiments or operating modes to reduce the number ofhigh-signal ramp steps, thus saving time and compressing the output datasize. In one embodiment, for example, a 9-bit (512-step) VLL ramp spansthe same high-signal voltage range as a 12-bit (4096 step) linear ramp,thereby reducing the number of ramp steps by 8× and reducing output bitdepth by three bits. Continuing the example, an SSADC that generates a512-step VLL ramp (which may be applied with respect to direct or S/Hhigh-signal conversion without loss of image quality) following a200-step low-signal ramp, will require a mere 712 clocks in total tocomplete the bifurcated low-signal/high-signal conversions; a more than5× conversion time reduction compared to a 12-bit linear ramp readoutfrom a single readout path. When the low-signal bank conversion ishidden under the high-signal conversion (i.e., parallel low-signal andhigh-signal conversion operations), the effective conversion timereduction grows to 8× over a 12-bit linear ramp, single-readoutapproach.

Single Direct Conversion Architecture for Low Noise Readout:

In a number of embodiments a hybriddirect-conversion/sampled-hold-conversion is implemented with, forexample, direct conversion in the low-signal readout path andsample-and-hold conversion (i.e., inclusion of a S/H bank) in thehigh-signal readout path. These hybrid embodiments enable row-timereduction by virtue of rapid direct-conversion low-signal readout incombination with row-pipelined readout in the high-signal path ((i.e.ADC conversion of the high signal for one row occurs in temporallyoverlapped manner with storage of the high signal of another row). Also,the high-signal path sample-and-hold bank enables application of alow-signal path FGA (or PGA) that might otherwise saturate thehigh-signal path reset-state or signal-state readouts.

FIG. 50 illustrates an embodiment of a single direct conversion,bifurcated-readout path image sensor 50 having the optional readout patharchitectures shown for example in FIGS. 51A and 51B. Note that not allreadout path details are shown in FIGS. 51A and 51B. For example,differential amplifiers may be provided to perform analog CDS operations(i.e., subtracting the reset-state sample from the signal-state samplein the analog domain).

Referring to FIGS. 50 and 51A, the low noise, low-signal signal readoutpath includes per-column Fixed Gain Amplifier (FGA) 860, while thehigh-signal readout path bypasses the FGA and is connected to a Sampleand Hold (S/H) bank 862 for storage of the reset-state and signal-statesamples during readout. The low-signal output of FGA 860 and thehigh-signal output of S/H bank 862 are supplied, via ADC inputmultiplexer 864, to per-column SSADC capture block 653, whichsequentially converts the low-signal and high-signal analog inputs.Readout controller 832, pixel array 631, row decoder/driver 635 anddigital output logic/buffer 766 may be implemented generally asdescribed above, with modification to the readout controller 832 tomanage the hybrid direct-conversion/sample-hold readout operations.

FIG. 51B illustrates an alternative embodiment of a low-signal readoutpath that may be implemented within the image sensor of FIG. 50. Asshown, the embodiment of FIG. 51B includes a per-column multiplexer 860,high-signal S/H bank 863, ADC input multiplexer 865 and per-column ADCcapture block 653, all of which operate similarly to counterpartelements shown in FIG. 51A, except that a single capacitive element(Cr/Cs) and access transistor are provided to sequentially capturesamples of the floating diffusion node reset state and signal state. ADCinput multiplexer 865 is modified (relative to counterpart 84 in FIG.51A) to receive the signal-state and reset-state samples sequentially(instead of in parallel or differentially) and to forward each to theper-column ADC capture block 653. In one embodiment, the SSADCcontroller (e.g., element 651 of FIG. 50) is managed by readoutcontroller 832 such that separate reset-state and signal-stateconversions are performed (i.e., as those analog signals are deliveredone after the other to SSACD capture block 653 via multiplexer 865),thereby permitting completion of the high-signal path CDS result in thedigital domain.

FIG. 51C illustrates a more detailed embodiment of the bifurcatedlow-signal and high-signal readout paths, showing an exemplaryunity-gain FGA implementation 868 in the low-signal readout path.

In each of the embodiments shown in FIGS. 51A-51C, the low-signal pathgain amplifier (860, 864) is implemented by a fixed gain amplifier (FGA)with the gain value set in conjunction with the SSADC reference rampgenerator to provide less than or equal to 0.25 electrons per digitalnumber (DN) increment. The FGA is provided in the low-signal readoutpath only so that gain-switching between low-signal and high-signalreadout paths is not required (in contrast to the alternating gainslikely applied to low-signal and high-signal readout paths by aprogrammable gain amplifier (PGA) disposed in both readout paths). Sincethe gain amplifier is a FGA and not a PGA, fewer capacitors are requiredand the gain amplifier can be made smaller than that required for a PGA.In addition, since the FGA will generally be applied to a very smallsignal range, (e.g., pixout signal range corresponding to 0-to-30electrons), a relatively simple, low bandwidth (and small footprint) FGAmay be used (e.g., as shown at 868 in FIG. 51C). In particular,non-switched-capacitor amplifier designs can be used with reducedcomponent count in order to reduce die area consumption and so that,overall, the bandwidth, noise and power consumption of the FGA can bereduced compared to that of a row-rate switchable PGA. The FGA value isalso chosen to reduce the input-referred noise of the ADC and otheranalog circuits in the readout path after the pixel source follower to alevel where the total sensor temporal readout noise approaches the pixelsource follower read noise.

In the embodiments of FIGS. 50 and 51A-51C, analog gain may be omittedfrom the high-signal readout path in view of the larger,photon-shot-noise-dominated signal, with any readout gain insteadprovided during A/D conversion (e.g., by ADC references, SSADC ramp,etc.). In alternative embodiments, programmable or fixed analog gaincircuitry may be disposed in (e.g., via multiplexer or hardwiring) thehigh-signal readout path. For example, a single PGA could be used tosupply the gain required for both the low signal and higher signalreadout paths. In embodiments that support single-path readout modesthat benefit from PGA operation, the single-path PGA may be leveraged inthe bifurcated-read-path mode, thus limiting die area increase. Also, byproviding sample-and-hold circuitry in the high-signal readout path, asingle per-column SSADC capture block can be used for both thelow-signal and high-signal readout paths.

In the embodiments of FIGS. 51A-51C, the SSADC capture block is operatedin direct conversion mode for the low-signal path. That is, as discussedabove, the pixel source-follower directly drives the input to the SSADCcomparator during the conversion operation instead ofsampling-and-holding the reset-state and signal-state pixout levels. Thelow-signal direct conversion may be carried out in at least two ways. Ina number of embodiments, for example, the low signal level is determinedusing the SSADC and digital CDS techniques (e.g., as discussed above).In that case, the reset-state and signal-state of the floating diffusionnode are digitized one after another in respective direct conversionoperations, with the final digitized CDS value generated in the digitaldomain by subtracting the reset-state conversion result from thesignal-state conversion result (i.e., yielding [photochargesignal+reset-state]−[reset-state]=photocharge signal).

FIG. 52 illustrates an exemplary digital CDS operation that may becarried out within the embodiments of FIGS. 50 and 51A-51C. In theexample shown, the SHR and optionally the SHS pulse go high prior to thefalling edge of the reset signal RG, (note that only the falling edge ofRG is shown). After the falling edge of RG, the SHR signal goes low tostore the reset signal level on capacitor Cr in the high signal S/Hbanks. At this time the Mux Sel signal is set to connect the low-signalFGA output to the input of the SSADC. The SSADC ramp and counters beginoperation in order to produce a digital output representing the resetlevel of the pixel. After some predetermined number of counts andelapsed time, the reset level conversion completes.

A predetermined time after the reset ramp completes, the TG andTG_(null) signals are asserted to effect feedthrough-compensatedphotocharge transfer. Because the TG rising edge and the TG_(null)falling edge occur substantially simultaneously or close temporally, TGfeedthrough to the floating diffusion is canceled and the column outputsignal line will remain at or very close to the reset-state level.Accordingly, the column output line will settle very quickly followingphotocharge transfer from the photodiode to the floating diffusion node.Despite the feedthrough compensation, a small residual feedthrough maystill result due to, for example, spatial variation between the TG-to-FDcoupling capacitance and the TG_(null)-to-FD coupling capacitance. Ingeneral, such residual feedthrough will produce a spatial fixed patternoffset noise (FPN) that may be corrected as discussed.

A predetermined delay is imposed after TG goes high (e.g., sufficientsettling time for a pixout signal corresponding to 1e⁻ of photochargeplus residual feedthrough) after which the SSADC controller commencessequencing of the voltage ramp and counter to effect analog-to-digitalconversion of the pixout signal level. For a low signal level, (e.g.1e⁻), the SSADC will reach a valid conversion on the first ramp step andthus yield a very short CDS time. For larger signals within thelow-signal range (e.g. 2, 3, 4 . . . 30 electrons), the SSADC willcomplete conversion at correspondingly later ramp steps/ramp voltagesand thus yield correspondingly longer CDS times. That is, the directconversion CDS time (and therefore noise rejection or immunity) isproportional to the pixout signal level and thus the integratedphotocharge. Because low-signal readout is meaningful only over arelatively narrow photocharge range, it will generally require fewerramp clocks than the high-signal range. For example, if the signal rangeof the low signal readout corresponds to 30 electrons, conversion willrequire a maximum of 120 clocks given a 0.25e⁻ (i.e., four rampsteps/counts per electron) ADC quantization. As explained above,attempted conversion of the low-signal path terminates with two possibleoutcomes: valid conversion (the comparator trips and latches theattendant counter value), or invalid conversion (comparator does nottrip). As discussed above, various different techniques may be employedto select between valid low-signal and high-signal conversions,selectively abort/inhibit high-signal conversion, correct fixed patternnoise, scale digital outputs, etc.

Still referring to FIG. 52, the TG signal goes low after low-signal pathconversion completes and, a predetermined time after the TG fallingedge, SHS signal goes low to store the pixout signal within thehigh-signal path sample-and-hold bank (i.e., on the Cs capacitiveelement shown in FIG. 51A. Thereafter, the ADC input mux is switched toselect the S/H bank and the SSADC comparator is auto-zeroed again(timing not shown) using the stored reset level on the sample-and-holdreset-state capacitive element (Cr). Because the S/H bank may need tocapture (and settle) for a signal as large as a full-well signal,typical SHS pulse widths may be, for example and without limitation, inthe 0.5 μs to 1.0 μs range. Accordingly, in a number of embodiments, thelow-signal direct-conversion time is designed to occur and finish duringthe SHS pulse.

At the end of the A/D conversion for the large-signal CDS value storedwithin the S/H bank, the digital output logic/buffer selects between thelow-signal and high-signal conversion results as generally discussedabove, passing one value or the other as the digital pixel output,together with optional information that indicates the source readoutpath (low-signal or high-signal) for purposes of downstream processing(i.e., post-ADC correction logic such as FPN correction, scaling logic,image reconstruction logic, etc.). Note that, though FIG. 52 showslow-signal readout completion prior to the falling edge of TG,low-signal readout may be completed after TG falls in alternativeembodiments.

Still referring to FIGS. 50 and 51A-51C, in an embodiment in whichhigh-signal path CDS is achieved digitally through separate conversionsof the FD reset state and signal state, a single sample-and-holdcapacitive element may be used as in FIG. 51B (e.g., capacitive elementCr used to store, at different times, both the reset-state sample andsignal-state sample of the floating diffusion node). By contrast, ifanalog high-signal path CDS is desired or pipelining of analog storageof high-signal path samples for one pixel row with analog-to-digitalconversion of high-signal path samples from another row, a multiple S/Hcapacitor bank may be provided as in FIG. 51A.

In the bifurcated readout path embodiment of FIG. 53, the low-signalpath signal-state output is determined using an AC coupled analog CDStechnique in which the analog CDS voltage is converted by the SSADC. Inthe implementation shown, the reset-state level drives input ofamplifier 843 via capacitor C1, while the other input is clamped to areference voltage, Vclmp. This occurs in conjunction with auto-zeroingof the SSADC comparator. An exemplary timing diagram for this approachis shown in FIG. 54A and is similar to the timing diagram of FIG. 52except there is no ramp conversion for the reset level.

Although the timing diagram in FIG. 54A shows low-path signal readout(i.e., by direct conversion in this example) prior to the falling edgeof TG, post-TG-pulse readout may be employed in alternative embodimentsor operating modes.

Single Direct Conversion—Analog CDS for the Low Signal; Switched SF BWand Sample after Falling Edge of TG Signal:

FIG. 54B illustrates another embodiment of a hybrid directconversion/sampled conversion readout for an image sensor havingbifurcated low-signal/high-signal read paths. In general, the readoutoperations shown in FIG. 54B are similar to those shown and described inreference to FIGS. 52 and 54A except the low-signal path CDS is effectedin the analog domain. The reset-state of the floating diffusion node,when driven onto pixout, is used to clamp and auto-zero the FGA and ADCcomparator. After low-signal conversion is complete, ADC inputmultiplexer control signal (Mux Sel) is raised to connect the S/H bankreset capacitor (and attendant buffer—as shown in FIG. 51C) to the ADCcapture block input and the autozero signal (az) is pulsed to auto-zerothe ADC comparator in preparation for conversion of the high-signalreadout.

Also following conversion of the low signal, Vbias (and thus the sourcefollower bias current) is increased to raise the source followerbandwidth for the high signal readout. The SSADC comparator isauto-zeroed from the reset capacitor. TG is pulsed for a second timewith a pulse width sufficient to transfer a full-well signal from thephotodiode. SHS is enabled after the rising edge of the second TG pulse,and SHS is lowered after the falling edge of the second TG pulse. TheSSADC conversion operation for the high signal commences after thefalling edge of SHS.

Though depicted as a linear ramp, the low-signal ADC ramp mayalternatively be non-linear as described above with respect to dualdirect conversion. Also, as in all embodiments herein, any practicableADC circuitry may be used in addition to or in place of the single-slopeADC circuitry described above. Further, the SSADC ramp signals shown inthe timing diagrams of FIGS. 52, 54A and 54B (and elsewhere herein) areintended to show the general operation of the SSADC andreadout/conversion of the low and high pixel output signals. The rampsignals may be inverted from those shown in a detailed implementation.Such a case would be a n-type pinned photodiode and source followerwhere a low light signal is further from a ground potential (i.e.,closer to the photodiode reset potential and a high light signal iscloser to the ground potential (further from the photodiode resetpotential).

Pseudo-Digital CDS

In a digital CDS operation, analog signals representative of thereset-state and signal-state of a pixel's floating diffusion node areseparately digitized with the digitized reset-state value subtractedfrom the digitized signal-state to yield a finalized digital CDS value(i.e., representative of transferred photocharge and lacking thereset-state/noise component)—an operation that, of course, requires twoanalog-to-digital conversions. The pseudo-digital readout approachdescribed below in reference to FIGS. 55A, 55B and 56 does not requireextra circuit elements compared to a baseline per column SSADC withdigital CDS architecture and may yield tightly compressed (low-noise)CDS times through TG-asserted pixout sampling. In general, the residualfeedthrough cancellation techniques discussed above (e.g., in referenceto FIGS. 31A and 31B) may be employed to effect row-by-row digitaldomain correction for FPN noise that may otherwise occur in thelow-signal readout path.

FIG. 55A illustrates an embodiment of another direct-conversion,bifurcated readout image sensor 760. In general, image sensor 760 may beimplemented as discussed in reference to FIG. 42, except that SourceFollower Bias Mux bank may be replaced with a Source Follower BandwidthSelection Mux. This bandwidth selection mux can use selectable biascurrent, pixout capacitance, pixout resistance, or other circuitattributes individually or in combination. Similarly, FIG. 55Billustrates a more detailed example of the bias-multiplexed read-outpath and SSADC comparator, both of which may operate generally asdescribed above in reference to FIG. 43. FIG. 56 illustrates anexemplary timing diagram for the bifurcated low-signal/high-signalreadout operations, enumerated to correspond to the operation sequencelisted below. Steps 1-7 are preferably done in a low source followerbandwidth state. After step 7, the source follower is switched to a highbandwidth state. The source follower is switched back to the lowbandwidth state prior to step 8. The source Depending on the method usedto select source follower bandwidth, steps 7-12 may be done in a highbandwidth state, (e.g. capacitance of the pixout line, since the DCoffset is not affected).

-   -   1. The floating diffusion is reset, (RG is high).    -   2. The az signal is asserted while RG is high    -   3. RG is turned off    -   4. Az signal is turned off, and the auto-zeroed input is clamped        with respect to the FD reset level output signal    -   5. TG and TGnull are asserted to transfer charge to the FD. The        pixout signal decreases by an amount equal to the transferred        charge and the residual feedthrough signal. In the timing        diagram in FIG. 3, the signal level is a relatively small        signal.    -   6. At a predetermined amount of time after the rising edge of        TG, the small signal SSADC ramp commences. The small signal        SSADC ramp will typically be a smaller slope than the large        signal ramp, and will only cover the predetermined small signal        readout range.    -   7. The small signal SSADC ramp completes. At this point the        valid converted digital values will represent        (Vsignal+ΔVft)−Vreset.    -   8. At some predetermined time after the completion of the small        signal ramp, the large signal ramp commences. The large signal        ramp can start at “0” or start at a signal level near the high        signal for the small signal readout range.    -   9. The large signal SSADC ramp completes. At this point the        valid converted digital values will represent        (Vsignal+ΔVft)−Vreset.    -   10. The comparator is auto-zeroed while the pixel output line is        at Vsignal (Vsignal+ΔVft).    -   11. TG and TGnull are turned off and on respectively. The pixel        output line will change by ΔVft.    -   12. A predetermined time after the falling edge of TG, the SSADC        ramp is started to convert the digital value representing −ΔVft.        This ramp will run at a slope to provide the same mV/DN as the        small signal ramp, or a slope that provides ease of scaling for        subtraction from the small and large digital values, and        provides low enough quantization error. The ramp will be a small        number of clocks since the residual feedthrough signal will be        very small (e.g. 1-2 mV).

Following the above-readout, a pseudo digital CDS is performed tocorrect for the ΔVft in each pixel in the row by subtracting the digitalvalue obtained in operation 12 from the respective valid digital signalvalue obtained at operation 7 or 9. By knowing whether the digital valuefor the pixel was obtained from the small or large signal readout, theappropriate scaling can be done when ΔVft is subtracted.

Note that the TG does not need to be held high for the entiresmall-signal and large-signal readout period as shown in FIG. 56. Forexample, TG may be switched off, (and TGnull correspondingly switched onfor feedthrough compensation) a predetermined time prior to completionof the large-signal ADC ramp in order to reduce TG dark currentcollection time. TG may then be switched back on prior to the second azpulse. This alternate timing is shown in dashed line for TG and TGnullin FIG. 56.

Readout-Switched Conversion Gain

In feedthrough-compensated embodiments for which fast-CDS operationyields sub-electron read noise for the pixel source follower, the totalread noise may be dominated by circuits after the pixel source follower.In order to realize sub-electron total read noise, the input-referrednoise of the circuits after the pixel source follower (for example,sample and hold circuits, ADC, etc.) as well as the input-referred noiseof the source follower itself is reduced in embodiments described belowby increasing the pixel conversion gain. For example, by implementing a500 μV/e− conversion gain instead of 100 μV/e− conversion gain forlow-signal readout, post-source-follower noise may be reduced by 5×. Asa more specific example, if noise-post source follower is 150 μV, thenraising the conversion gain from 100 μV/e⁻ to 500 μV/e⁻ will reduceeffective readout noise by a factor of 5 from 1.5e⁻ to 0.3e⁻. Due tocompensation of TG feedthrough, higher conversion gain can be employedwithout causing a large voltage excursion and long pixel output settlingtime.

While pixel conversion gain may be increased by reducing floatingdiffusion capacitance, charge storage capacity of the floating diffusionnode will be correspondingly reduced and may fall below the capacityrequired to store the photocharge from a full-well photodiode (i.e.,depending upon photodiode capacity, practical floating diffusion swinglimitations, etc.) and thus compromising dynamic range at the upperlimit of the large-signal range. In a number of embodiments, dynamicrange is preserved by using a variable conversion gain pixelarchitecture that enables the floating diffusion capacitance to bechanged dynamically between low-signal and high-signal readoutoperations. That is, by configuring the pixel in a lowcapacitance/high-conversion-gain readout mode (i.e., low noise mode) forthe low-signal readout, and then switching to ahigher-capacitance/lower-conversion-gain readout mode (i.e., largercharge storage capacity) during large-signal readout, the noise benefitof high conversion gain readout may be achieved without compromising theupper end of the large-signal range.

FIG. 57A illustrates an embodiment of a variable-conversion-gain (VCG)pixel 900 together with readout circuitry that includes a S/H bank 224(e.g., implemented as discussed in reference to FIG. 14B) and acapacitively-coupled, auto-zeroed per-column comparator 903. As shown,variable conversion gain (VCG) pixel 900 is formed by a 4Tpinned-photodiode pixel generally implemented as discussed above inreference to FIG. 1A, but additionally having a capacitive element Cxcoupled between the supply rail (Vdd) and floating diffusion node 112via conversion-gain (CG) control transistor 901. By this arrangement,when the control signal (Csel) coupled to the gate of transistor 901goes high, CG-control transistor switches on to couple Cx to floatingdiffusion node 112, supplementing the FD capacitance (i.e., effectivelyextending/increasing FD node capacitance) so that conversion gain isreduced and charge storage capacity is increased. When Csel is low,transistor 901 is switched to a non-conducting state to decouple Cx fromthe floating diffusion node, thus lowering the effective FD nodecapacitance and raising the conversion gain of the pixel. Note that thevariable-gain arrangement may also be employed with respect todual-mode/conditional-read pixels (e.g., as shown in FIG. 1B) and thatvarious other switchable conversion gain pixel architectures can beemployed, including arrangements in which a single capacitive element Cxis shared across a column of pixels (or at least multiple same-columnpixels) and/or transistor 901 is shared by a column of pixels or atleast multiple same-column pixels.

FIG. 57B is an exemplary timing diagram corresponding to a readoutoperation within variable-conversion-gain pixel 900 of FIG. 57A. Asshown, Csel is initially low to establish a high conversion gain withinVCG pixel 900 (i.e., low effective FD node capacitance). RG_(n) ispulsed to reset the floating diffusion node and SHR is pulsed to capturethe reset-state level within S/H bank 224 (i.e., on Cr). After Cr hascharged to the reset-state potential and prior to the falling edge ofSHR, auto-zero signal, az, is raised to auto-zero per column comparator903, clamping the comparator signal input according to the pixout (andCr) potential on the pixout-side of capacitive element C1.Feedthrough-compensated photocharge transfer from photodiode 110 tofloating diffusion node 112 is then enabled by the opposite polaritypulses shown on TG and TGnull, with SHRS being pulsed as shown to storethe resultant signal-state of the floating diffusion node on capacitorCs. By this operation, the difference between the signal-state andreset-state samples (i.e., analog CDS value) develops and is present atthe comparator input when compare-enable signal, CmpEn is pulsed.Accordingly, depending on whether the CDS value exceeds thresholdvoltage Vthr (e.g., corresponding to the upper limit of a low-signalpixout range), comparator 903 will either trip, driving Csel high, ornot trip, maintaining the low Csel level. If the comparator does nottrip, a low-signal readout is confirmed and the signal-state andreset-state samples stored on Cs and Cr are either supplied as analogCDS input to downstream ADC circuitry, or separately digitized anddifferenced in the digital domain to yield a digital CDS result. Bycontrast, if the comparator trips, a high-signal readout is confirmed,and the high-state of Csel enables a rapid transition to the reducedconversion gain/higher-capacity readout mode within VCG pixel 900. Inthat case, TG may be pulsed again as shown at 921 to enable transfer ofall remaining photocharge from photodiode 110 to floating diffusion node112. Thereafter, SHS is pulsed again at 923 to capture the large-signalpixout signal (signal-state of floating diffusion node 112) within S/Hbank 224 on capacitive element Cs. Thereafter, floating diffusion node112 is reset by RG pulse 925 and the resulting reset-state pixout levelis captured within S/H bank 224 on capacitive element Cr in response toSHR pulse 927. The high-signal readout path signal-state and reset-statesamples captured within S/H bank 224 may be separately digitized andthen differenced to yield a digital double-sampled result, ordifferenced in the analog domain to yield an analog double-sampledresult prior to digitization. In either case, the resulting high-signalreadout value constitutes an uncorrelated double sample since the resetlevel is obtained after the signal level. In general, any potentiallyhigher noise resulting from the lack of reset-state correlation in thetwo samples will be negligible in view of the more dominant photon shotnoise of the larger signal.

FIG. 57C is a table of exemplary CDS times, readout noise levels,conversion gains and dynamic range that may be achieved by avariable-conversion-gain, feedthrough-compensated, bifurcated readoutpath image sensor embodiment, comparing those performance metrics withthose of a more conventional image sensor lacking those features.

Reflecting on FIGS. 57A and 57B, numerous alternative circuitarrangements/techniques may be employed for implementing variableconversion gain and for controlling variable-gain readout. For example,in a number of feedthrough-compensated bifurcated-readout-pathembodiments, deterministic low-signal and high-signal readouts areseparately performed as part of each pixel readout with high conversiongain being applied in the low-signal readout and low conversion gainapplied in the high-signal readout. That is, instead of conditionallyexecuting a low-conversion gain readout depending on the thresholdcomparison result in per-column comparator 903, that comparator may beomitted (or bypassed in a selected operating mode) and Csel insteadcontrolled by a row control signal (i.e., dedicated to a given pixelrow, shared among all pixel rows, or asserted to override to theper-column comparator output) so that every high-conversion-gain outputonto pixout is followed by a low-conversion-gain output onto pixout. Inthat case, the dashed pulses shown at 921, 925, 927 and 923, and thedashed high-going Csel signal may be generated deterministically (i.e.,without condition) as part of the readout operation shown. Also, insteadof two TG pulses, a single TG pulse (and coincident TGnull pulse) may beapplied, with low-signal readout captured in analog or digital samples(i.e., within S/H or converted by ADC) before or after the falling edgeof the TG pulse. In that case, the high-signal readout may also becaptured (in analog or digital samples) before or after the falling TGedge. Also, the SHR falling edge may be used to capture reset-statesamples for both low-signal and high-signal readouts at the same time(and prior to corresponding signal-state captures) so that both thelow-signal and high-signal readouts constitute correlated doublesamples.

Dark Pixel Emulation with Active Floating-Diffusion Stabilization

In various embodiments disclosed herein, image sensors that implementcontrol-signal feedthrough compensation as described above are operatedin both full-resolution and reduced-resolution (enhanced low-lightsensitivity) read-out modes during respective subframes of an exposureinterval, and/or may include one or more columns and/or rows of pixelsoperated in dark emulation modes (e.g., leveraging the above-describedfloating-diffusion stabilization techniques), all of which are describedbelow. Accordingly, spatial resolution of the image sensor may bepreserved while also enhancing low-light sensitivity. In a number ofembodiments, reduced-resolution image data is selectively applied infinal image reconstruction according to a light-intensity determinationbased upon the subframe or frame-to-frame readouts themselves. In otherembodiments, subframe intervals are programmably controlled to balanceread-out circuitry utilization and limit on-board data storage needswhile achieving desired imaging results effects. In yet otherembodiments, a binary threshold used to trigger conditional read-outoperations is calibrated according to read-out results and/or referencecharge injection. These and other features and benefits are described ingreater detail below.

There a number of reasons to expect a much larger RC delay of signallines in the pixel array in the near future. For one, 3D stackingtechnology will allow a large increase in the active pixel array areacreating unique opportunities to use larger optical formats by pushingthe analog and digital section beneath the footprint of the pixel array.Also, the pace of pixel pitch reduction is expected to slow, as thepixel pitch approaches the diffraction limit, putting greater pressureon increased optical formats to provide the generational improvements inimage resolution. Further, continuing improvement in ISP processingpower allows use of larger resolutions.

At least one problem with increased RC delay in image sensors is thatthe propagation delay across the imaging array begins to enter thetransfer function bandwidth of the high-signalcorrelated-double-sampling (CDS) period. Consider that an RC timeconstant of 33 ns could enter a high-signal CDS transfer function of 33Mhz, with 3 sigma settling stressing a 10 Mhz transfer function. Ahigh-signal CDS transfer function may be from 100 khz to 1 MHz (forexample and without limitation to such range), so it is easy to expect afeasibility challenge of signal uniformity in the near future. Inaddition, because row-wise signals are approximate square waves,dispersion due to line inductances is a factor. In practical terms, ithas been observed that an 18 Megapixel sensor with 1.25 micron pitch, ifdriven from one side of the array, achieves visible left to right rownoise, due to the RC propagation delay. Even a measured row temporalnoise ratio of, for example, 14× is unacceptable in many applications,with designers opting for a differential video mode requiring nearlytwice the power consumption.

There are at least two fundamental problems with the conventional rownoise correction (RNC) approaches. First, the pixels in dark correctionblocks, covered with a light shield or other light block material (e.g.,as shown by shaded regions in FIG. 58), have different capacitive loadsthan the active pixels (i.e., pixels in the light sensitive portion ofthe array). This can cause a miscorrelation in dark signal performancebetween active and dark arrays. Second, the RC propagation delay acrossthe array tends to produce a mismatch in both voltage and pulse shapethat enters the pixel. As a result, the row noise correction referencepixels are fundamentally inadequate to represent the distribution ofpixel behaviors across the array, and there are fundamental limits tothe effectiveness of conventional RNC approaches.

Fortunately, the various conditional-read pixel architectures disclosedherein, and specifically the two-dimensional control of the transfergate between photodiode and floating diffusion, allows for a practicaldistributed sampling of dark level behavior, solving the fundamentalproblem at its root source.

FIG. 59 illustrates an exemplary dark-emulation with respect to afull-resolution pixel array. In the example shown, each row of pixels islogically organized in groups of N pixels (e.g., 48 pixels sharing anADC circuit as discussed above) and in which a random or pseudo-randomor otherwise deterministic one (or more) of the pixels within eachN-pixel group is “dark-sampled” each subframe or full-frameinterval—read-out using a dark-column emulation protocol as discussedbelow. More specifically, a local “dark level” read is performed in thedark-sampled pixels to obtain an emulated dark-pixel value. Becausethese active pixels are not covered by metal or other shielding and arelight-sensitive, a special control sequence is applied to discard chargefrom the pixels before executing a CDS read-out, thus emulating the darkread within conventional shielded pixels.

In the particular arrangement shown in FIG. 59, the pixel(s) selectedfor dark-emulation read-out is dynamically varied for each N-pixel groupwithin a given row and subframe, and with the dynamic selection repeatedfor each successive row to disperse the dark-emulation read-out in apreferably invisible sequence, but with controlled density, throughoutthe pixel array. Note that, in one embodiment, a pixel used fordark-pixel emulation in one subframe of a frame may be used as alight-gathering pixel in one or more other subframes of the same frame.Also, in various embodiments, dark-emulation read-out is appliedexclusively with respect to green pixels (i.e., pixels covered by orotherwise associated with a green color filter element) in view of thelarger proportion of those pixels within the array (e.g., 2× in aBayer-pattern CFA).

FIG. 60 illustrates exemplary timing diagrams for a number of pixelread-out modes within a conditional-read image sensor, including theconditional and unconditional read-out modes described above as well asa dark-emulation read-out mode. In the timing diagrams shown, the rowand column transfer gate control signals (TGr and TGc) are shown in acombined, logically-ANDed form as “transfer-enable” signal, “TxEn”). Asshown, both the conditional and unconditional read-out operationscommence with a floating diffusion reset operation (pulsing the RGsignal as discussed above), followed by a reset-state sampling operationat 951 (pulsing the SHR signal). In the conditional read operation, thepartial read operation and threshold evaluation are omitted for ease ofunderstanding, but are carried out as previously described. TxEn israised only in columns for which an over-threshold pixel state isdetected (i.e., conditionally asserting TGc as discussed above, thusenabling full transfer of integrated charge from photodiode to floatingdiffusion pursuant to pixel read-out), while TGc and thus TxEn isasserted unconditionally. SHS is asserted in both conditional andunconditional instances to trigger signal-state sampling.

Still referring to FIG. 60, dark-emulation read-out begins withassertion of TxEn at 952 for selected columns on a row to transferintegrated charge from photodiode to floating diffusion and thus empty(reset) the photodiode. As discussed below, this operation is controlledthrough assertion of TGc within pattern-selected pixel columns, with theselection pattern being dynamically varied from row to row and/or fromsubframe to subframe. After the photodiode reset at 952, the remainingoperations are the same as unconditional read mode and thus include thefloating diffusion reset (RG pulse, which may overlap the TxEn pulse),reset-state sample (SHR pulse), and signal-state read-out (TxEn pulsefollowed by SHS pulse), with the signal-state read-out capturing theempty state of the photodiode and thus an emulation of a dark pixelread-out. It is noted that such pixels are not truly “dark” in that theygather light between the two TxEn pulses. Generally, however, these twooperations are only a few microseconds apart and vanishingly little tono light will be gathered, compared to the surrounding light-gatheringoperations that gather light for hundreds of microseconds to hundreds ofmilliseconds, depending on exposure. In a given embodiment, varioustechniques can be used to compensate for or reject a “dark” pixel thathas received too much actual light or is faulty, including: rejecting adark value based on eclipse detection; rejecting a dark value based onits variation from other dark values gathered for that row and subframe;rejecting a dark value based on the amount of light gathered bysurrounding pixels; or compensating for light gathered by such a pixelby subtracting from its value a proportional fraction of light gatheredby surrounding light-gathering pixels.

FIG. 61 illustrates a more complete timing diagram for emulateddark-pixel read-out, showing the pipelined sequence of operations withinthe pixel array, sample-and-hold logic, comparator and ADC circuitry. Asshown, additional TGc pulses are applied to reset the photodiode incolumns selected for dark-emulation read-out in each row. As explainedabove, conditional-assertion of TGc during the signal-state read-outoperation (i.e., TGc signal pulses denoted by ‘*’) applies duringconditional-read/reset operations—TGc is asserted unconditionally duringthe same interval in an unconditional read operation. In either case,pixels that were designated as dark pixels for that row (i.e.,operations denoted by ‘**’) are also read at the time of the conditionalor unconditional read of the light-gathering pixels on the row for thatsubframe.

FIG. 62 illustrates an exemplary image sensor architecture 2170 thatsupports emulated-dark read-out operations discussed above. As shown,the image sensor includes row logic 961 (i.e., row decoder/driver) andreadout controller 963, both of which operate generally as discussedabove, except that row logic 961 is modified to generate an additionalTGr pulse shown to enable pre-read photodiode reset operations inselected dark-emulation pixels, and readout controller 963 is modifiedto provide one or more additional dark-emulation control signals asdiscussed below. As in the embodiments discussed above, the pixel arrayincludes a number of m*n pixel blocks, only one of which is shown (i.e.,pixel block ‘i’ 965), and the column read-out circuitry includes acorresponding number of constituent read-out logic blocks, only one ofwhich is shown (read-out block ‘i’ 967). While the pixel array isimplemented generally as described above, each of the read-out blocks967 is modified to support dark-emulation read-out. More specifically,read-out block 967 includes multi-bank sample/hold circuitry 968,multiplexers 969 and 970, column-shared PGA 971 and column-shared ADC972 (e.g., a SAR ADC, though an SSADC formed by column-shared SSADCcontroller and per-column SSADC capture blocks may alternatively beused), status bit buffers 973 and 974, and output buffers 975 and 976.Note that status flags stored with buffers 973 and 974 (e.g., indicatingeclipsed, saturated, underthreshold status, and/or low-signalhigh-signal readout path source) may signify instances of dark-emulationread-out data as discussed below. Per-column comparator circuitry 977may operate generally as discussed above, except that additional controllogic is provided to accommodate dark-emulation read-out, includingdark-column pattern controller 978 to control the pixel column orcolumns selected for dark-emulation read-out within a given row and/orsubframe.

FIG. 63 illustrates an embodiment of a dark-column pattern controller980 that may be used to implement pattern controller 978 of FIG. 62. Inthe implementation shown, pattern controller 980 includes apseudo-random number generator 981 that outputs a pseudo-random M-bitnumber to M:n decoder 982. Decoder 982 decodes the incomingpseudo-random number to assert one of n dark-emulation enable signals(EnDE), thus enabling a dark-emulation operation within thecorresponding pixel column. As each successive pixel row is selected forconditional or unconditional read-out, the pseudo-random numbergenerator produces a new pseudo-random number, thereby selecting adifferent pixel column for dark-emulation and randomizing the pattern ofdark-emulation pixels within the pixel block. In one embodiment,pseudo-random number generator 981 may be designed to ensure a minimumpixel offset between pixels in successive rows and may also be seeded(or constructed) differently than the pseudo-random number generator forneighboring pixel blocks to randomize the dark-emulation pixel patternfrom block to block. For example, a single generator may be used withdifferent scramblings of M bitlines to each block—the pseudo-randomnumber may be larger than M bits as well, with different subgroups ofthe bits supplied to each block Also, M:n decoder 982 and/orpseudo-random number generator 981 may include circuitry to ensureassertion of an adjacent green pixel in response to a pseudo-randomnumber that would otherwise select a red or blue pixel column within agiven column, thus effecting a green-pixel-only dark-emulationembodiment.

In other embodiments, the controller can comprise a circuit to feed abit pattern into one end of a linear shift register, with one registerelement per column of the array. A pattern of ‘0’ and ‘1’ bits is fedinto the shift register, along with calculated shift lengths betweenrows, to provide the EnDE[i] signals. For decimated modes, the registercan be loaded with a fixed pattern that does not change between rows,subframes, and frames. In other embodiments, various other circuits maybe employed to control which columns are designated for dark-emulationread-out within each row and subframe.

FIG. 64 illustrates an embodiment of a read-enable logic 985 (e.g., thatmay be implemented within logic block 977 of FIG. 62) having circuitryto support dark-emulation read-out. More specifically, eclipse andoverthreshold flags are supplied, together with the EnDE bit for thesubject pixel column (i.e., EnDE[i]), to a read/dark-emulation logiccircuit 987 which asserts the TGc signal for that pixel column (i.e.,TGc[i]) according to those inputs and a set of control inputs from theread-out control logic (i.e., element 967 of FIG. 62). In oneembodiment, shown for example in FIG. 65, read/dark-emulation logic 990asserts TGc[i] in response to one of three circumstances: (i) aconditional read is to be carried out as indicated by either an eclipsedstate (in which the conditional read is executed to clear the photodiodeand floating diffusion) or an overthreshold determination; (ii) anunconditional read is to be executed as signaled by an all-columnunconditional-read signal from the read-out control logic; or (iii) thedark-read enable bit, EnDE[i], is asserted for the subject pixel column.In the depicted implementation, the EnDE bit is logically ANDed with adual-pulse dark-emulation timing signal from the read-out control logic(“Dark Read”) to generate a two-pulse TGc signal assertion; an initialpulse to enable the photodiode emptying operation discussed above, and afinal pulse to enable the signal-state capture operation at the sametime that signal-states are captured for light-gathering pixels.

Returning to FIG. 64, the EnDE[i] bit is also supplied toADC-enable/dilation logic circuit 989 to enable generation of statusflags, RE and MP. In the embodiment shown, an asserted RE bit signals anADC-enable event as discussed above, and when RE is low, the MP bit(multi-purpose bit) is high or low to indicate the reason for the ADCsuppression (i.e., MP=0 if pixel underthreshold, MP=1 if pixel eclipsedor saturated). In contrast to embodiments in which one of the statusflags (e.g., the AB bit described above) is unused and reallocated toADC bit conveyance in the event of a logic ‘1’ RE bit, the MP bit isretained in the ADC-enable case and used to indicate whether theread-out is a dark-emulation read-out (MP=1) or an image data read-out(MP=0). One consequence of this arrangement is that the net data streamsize may be increased by one bit relative to the double-dutyAB-bit/ADC-bit embodiments, though the status flags may be encodedwithin the ADC value itself (e.g. reserving upper and/or lower ADCvalues to signal the different status conditions shown), thus avoidingdata bandwidth increase.

FIGS. 66 and 67 relate to an image sensor architecture that enablessimultaneous readout of two diagonal pixels within a four-pixel Bayerpattern—one that provides dark emulation and another that provides anactive image signal (i.e., pixel value corresponding to a region of ascene). For conventional architecture, individual diagonal pixel readoutis not readily feasible since there is no two-dimensional transfer-gateactivation. Diagonal alternating is possible by staggering the tx and rscontrol signals diagonally (and it would be hardwired with noflexibility), and sensor companies have continuously been challengedwith the task of trying diagonal metal routing jogging strategies withlittle to no luck (diagonal readout can give higher resolution binning)due to the challenges and asymmetries of the layout.

The pixel control schematic of FIG. 66 can achieve diagonal readoutthrough the timing sequence shown in FIG. 67. Note that in the exampleshown the tx pulse train is implemented to achieve high RNC correlationbetween two different rows by envelope matching. That is, pulse envelopeapproximation may be an effective technique that minimizes phase errorbetween FD and pixout that is slew-rate limited by column-driven Vin. Inthe embodiment shown, transfer envelopes can be approximated from onecolumn to the next and one row to the next without destroying activepixels by shifting as shown at 1031. Such TG line pulsing may be omittedin other embodiments that carry out dark pixel emulation with activefloating-diffusion stabilization. Further embodiments of dark-emulationpixels in which active floating-diffusion stabilization may be employedare described below.

When received within a computer system via one or more computer-readablemedia, such data and/or instruction-based expressions of the abovedescribed circuits can be processed by a processing entity (e.g., one ormore processors) within the computer system in conjunction withexecution of one or more other computer programs including, withoutlimitation, net-list generation programs, place and route programs andthe like, to generate a representation or image of a physicalmanifestation of such circuits. Such representation or image canthereafter be used in device fabrication, for example, by enablinggeneration of one or more masks that are used to form various componentsof the circuits in a device fabrication process.

In the foregoing description and in the accompanying drawings, specificterminology and drawing symbols have been set forth to provide athorough understanding of the disclosed embodiments. In some instances,the terminology and symbols may imply specific details that are notrequired to practice those embodiments. For example, any of the specificnumbers of bits, signal path widths, signaling or operating frequencies,component circuits or devices and the like can be different from thosedescribed above in alternative embodiments. Additionally, links or otherinterconnection between integrated circuit devices or internal circuitelements or blocks may be shown as buses or as single signal lines. Eachof the buses can alternatively be a single signal line, and each of thesingle signal lines can alternatively be buses. Signals and signalinglinks, however shown or described, can be single-ended or differential.A signal driving circuit is said to “output” a signal to a signalreceiving circuit when the signal driving circuit asserts (orde-asserts, if explicitly stated or indicated by context) the signal ona signal line coupled between the signal driving and signal receivingcircuits. The term “coupled” is used herein to express a directconnection as well as a connection through one or more interveningcircuits or structures. Integrated circuit device “programming” caninclude, for example and without limitation, loading a control valueinto a register or other storage circuit within the integrated circuitdevice in response to a host instruction (and thus controlling anoperational aspect of the device and/or establishing a deviceconfiguration) or through a one-time programming operation (e.g.,blowing fuses within a configuration circuit during device production),and/or connecting one or more selected pins or other contact structuresof the device to reference voltage lines (also referred to as strapping)to establish a particular device configuration or operation aspect ofthe device. The term “light” as used to apply to radiation is notlimited to visible light, and when used to describe sensor function isintended to apply to the wavelength band or bands to which a particularpixel construction (including any corresponding filters) is sensitive.The terms “exemplary” and “embodiment” are used to express an example,not a preference or requirement. Also, the terms “may” and “can” areused interchangeably to denote optional (permissible) subject matter.The absence of either term should not be construed as meaning that agiven feature or technique is required.

The section headings in the above detailed description have beenprovided for convenience of reference only and in no way define, limit,construe or describe the scope or extent of the corresponding sectionsor any of the embodiments presented herein. Also, various modificationsand changes can be made to the embodiments presented herein withoutdeparting from the broader spirit and scope of the disclosure. Forexample, features or aspects of any of the embodiments can be applied incombination with any other of the embodiments or in place of counterpartfeatures or aspects thereof. Accordingly, the specification and drawingsare to be regarded in an illustrative rather than a restrictive sense.

What is claimed is:
 1. An integrated-circuit image sensor having pixelsdisposed in constituent rows and columns of a pixel array, theintegrated-circuit image sensor comprising: a first photodetector thataccumulates photocharge in response to incident light; a first andsecond capacitive nodes; a first transfer gate disposed between thephotodetector and the first capacitive node and having a controlterminal coupled to a transfer-gate control line that extends in arow-wise direction across the pixel array; a reset transistor coupledbetween a supply voltage node and the first capacitive node; an outputtransistor having a control terminal coupled to the first capacitivenode and an output terminal switchably coupled to a column output linethat extends in a column-wise direction across the pixel array; and aconversion-gain transistor coupled between the first and secondcapacitive nodes and having a control terminal coupled to aconversion-gain-select line that extends in the column-wise directionacross the pixel array; a comparator having a first input capacitivelycoupled to the column output line, a second input coupled to receive athreshold voltage, and an output to the conversion-gain-select line; anauto-zeroing transistor coupled between the first input of thecomparator and the output of the comparator; and control circuitry toswitchably couple the output terminal of the output transistor to thecolumn output line throughout a readout interval and, during the readoutinterval, to: concurrently assert (i) a reset pulse at a gate of thereset transistor to reset the first capacitive node to a reset voltagelevel and to generate, on the column output line, a first analog outputsignal corresponding to the reset voltage level, and (ii) an auto-zeropulse at a gate of the auto-zeroing transistor to establish, byswitchably coupling the output of the comparator to the input of thecomparator via the auto-zeroing transistor, a zero-amplitude at theinput of the comparator corresponding to an amplitude of the firstanalog output signal; assert a first transfer-enable pulse on thetransfer-gate control line to enable transfer of accumulated photochargefrom the photodetector to the first capacitive node via the firsttransfer gate and produce, on the column output line, a second analogoutput signal having an amplitude corresponding to the accumulatedphotocharge; and enable the comparator to assert aconversion-gain-adjust pulse on the conversion-gain-select lineaccording to whether the amplitude of the second analog output signalexceeds a sum of the zero-amplitude and the threshold voltage.
 2. Theintegrated-circuit image sensor of claim 1 wherein the conversion-gaincontrol transistor switchably couples the first and second capacitivenodes in parallel in response to assertion of conversion-gain-selectsignal on the conversion-gain-select line.
 3. The integrated-circuitimage sensor of claim 1 further comprising a sample-and-hold circuitcoupled to the column output line.
 4. The integrated-circuit imagesensor of claim 3 wherein the control circuitry comprises readoutcircuitry to: assert a first sample-and-hold pulse concurrently withassertion of the reset pulse to store, within a first capacitive storageelement of the sample-and-hold circuit, a first readout voltage levelcorresponding to the amplitude of the first analog signal; and assert asecond sample-and-hold pulse during or after assertion of thetransfer-enable pulse to store, within a second capacitive storageelement of the sample-and-hold circuit, a second readout voltage levelcorresponding to the amplitude of the second analog signal.
 5. Theintegrated-circuit image sensor of claim 1, wherein the controlcircuitry is further to assert a second transfer-enable pulse on thetransfer-gate control line, concurrently with assertion of theconversion-gain-adjust pulse by the comparator circuitry, if theamplitude of the analog output signal exceeds the sum of thezero-amplitude and the threshold voltage.
 6. The integrated-circuitimage sensor of claim 5 wherein transfer of accumulated photocharge fromthe first capacitive node via the first transfer gate is characterizedby a first conversion gain and wherein assertion of the secondtransfer-enable pulse on the transfer-gate control line enables transferof a residual portion of the accumulated photocharge to at least thesecond capacitive node, the transfer of the residual portion of theaccumulated photocharge being characterized by a second conversion gainthat is lower than the first conversion gain.
 7. The integrated-circuitimage sensor of claim 1 wherein the first photodetector, first andsecond capacitive nodes, first transfer gate, output transistor, andconversion-gain transistor are constituent elements of a first pixelwithin the pixel array, and wherein each other pixel of the pixel arrayis constituted by a respective other photodetector, other first andsecond capacitive nodes, other transfer gate, other output transistorand other conversion-gain transistor.
 8. The integrated-circuit imagesensor of claim 1 further comprising a second photodetector and a secondtransfer gate coupled between the second photodetector and the firstcapacitive node.
 9. The integrated-circuit image sensor of claim 8wherein the first photodetector and first transfer gate constituteelements of a first pixel within the pixel array, the secondphotodetector and the second transfer gate constitute elements of asecond pixel within the pixel array and the first and second capacitivenodes, at least, are shared by the first and second pixels.
 10. Theintegrated-circuit image sensor of claim 1 wherein the second capacitivenode has a higher capacitance than the first capacitive node.